JP2009535849A - 集積化mosfet−ショットキーデバイスのレイアウトに影響を与えずにショットキーブレークダウン電圧(bv)を高める - Google Patents
集積化mosfet−ショットキーデバイスのレイアウトに影響を与えずにショットキーブレークダウン電圧(bv)を高める Download PDFInfo
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Abstract
Description
するという利点を提供する。しかしながら、オフ状態で許容可能な低リーク電流を得るために必要な、障壁が高い金属は、ショットキーおよびソース-ボディオーミックコンタクトの要件を満たすために、障壁が高い金属と低い金属の両方を堆積しなくてはならず、その結果コストが高くなるという欠点を示す。
法をさらに含む。
るように、ショットキーP+ポケット領域におけるPドーパント濃度の勾配は、急峻な逆転からゆるやかな変動へと大きく変化している。これは、ショットキーポケット領域におけるPN接合にかかる電界を大きく減少する。さらに、フリンジ電界を大きく減少する。その結果、急峻なドーパント分布ととがった隅による早期のブレークダウンが除去される。
が最大化されたMOSFETデバイス300の上面図である。図8のMOSFETデバイスの上面図を参照すると、ショットキー領域はマクロセル構造内に形成される。
Claims (39)
- 複数のパワートランジスタセルを持つアクティブセル領域と、接合障壁制御ショットキー(JBS)領域とを含む半導体パワーデバイスであって、
前記JBS領域は、半導体基板の上面付近のエピタキシャル層上に配置された複数のPN接合間に点在した複数のショットキーダイオードを含み、前記JBS領域は、前記PN接合における早期のブレークダウンを防ぐために、前記PN接合付近のドーパントプロファイルの逆転の急峻性を軽減するため、前記エピタキシャル層内に配置されたカウンタードーパント領域をさらに含む、
半導体パワーデバイス。 - 前記JBSは、エピタキシャル層内に配置されたボディ型ドーパント領域を含み、前記カウンタードーパント領域は低エピタキシャルドーパント領域を含む、請求項1の半導体パワーデバイス。
- 前記JBSは、N型ドーパントエピタキシャル層内に配置されたP型ドーパント領域を含み、前記カウンタードーパント領域は、前記PN接合付近のドーパントプロファイルの前記逆転の急峻性を軽減するために、前記P型ドーパント領域を取り囲む低N型ドーパント領域を含む、請求項1の半導体パワーデバイス。
- 前記半導体パワーデバイスが、金属酸化物半導体電界効果トランジスタ(MOSFET)デバイスをさらに含む、請求項1の半導体パワーデバイス。
- マクロセル構造をさらに含み、各マクロセルは複数のMOSFETセルとJBS領域とを含む、請求項1の半導体パワーデバイス。
- 前記エピタキシャル層が、通常のドーパント濃度を持つエピタキシャル層の上の前記ショットキーダイオードを包囲する上面付近に、低ドーパント濃度を持つ上部エピタキシャル層をさらに含む、請求項1の半導体パワーデバイス。
- 前記JBS領域内に配置された前記カウンタードーパント領域は、20〜80%の範囲でエピタキシャルドーパント濃度が減少しており、それによって前記アクティブセル領域内の前記パワートランジスタセルの性能パラメータが影響を受けない、請求項1の半導体パワーデバイス。
- 前記エピタキシャル層が、通常のドーパント濃度を持つエピタキシャル層にブランクボディ型ドーパント注入を適用することによって形成される、前記ボディ型ドーパント領域を包囲する上面付近に、低ドーパント濃度を持つ上部エピタキシャル層をさらに含む、請求項1の半導体パワーデバイス。
- 前記ショットキーダイオードがエピタキシャル層内に配置されたボディ型ドーパント領域間に点在し、前記カウンタードーパント領域は、前記PN接合付近のドーパントプロファイルの逆転の急峻性を軽減するために、前記ボディ型ドーパント領域を取り囲むカウンタードーパント領域を形成するため、コンタクト開口部を通してボディ型ドーパント注入を適用することによって形成される低エピタキシャルドーパント領域を含む、請求項1の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内のボディ型ドーパント領域間に点在したオープンストライプとして構成される、請求項1の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内の四角形ショットキーコンタクト領域を取り囲むボディ型ドーパント領域の交差ストライプとして構成される、請求項1の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内の六角形ショットキーコンタクト領域を取り囲むボディ型ドーパント領域の周辺ストライプとして構成される、請求項1の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内の多角形ショットキーコンタクト領域を取り囲むボディ型ドーパント領域の周辺ストライプとして構成される、請求項1の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内の円形ショットキーコンタクト領域を取り囲むボディ型ドーパント領域の周辺領域として構成される、請求項1の半導体パワーデバイス。
- 櫛歯状に、前記アクティブセル領域から前記JBS領域にまでのびて形成されたゲートバスをさらに含み、それによって、前記JBS領域の周囲の周辺領域を通して前記ゲートバスをはしらせないことにより、前記JBS領域のより大きな領域がもたらされる、請求項1の半導体パワーデバイス。
- 複数のパワートランジスタセルを持つアクティブセル領域と、接合障壁ショットキー(JBS)領域とを備える半導体パワーデバイスを製造するための方法であって、
半導体基板前記JBS領域の上面付近のエピタキシャル層上に複数のPN接合を形成することによって、複数のショットキーダイオードを形成するステップ、
前記PN接合における早期のブレークダウンを防ぐために、前記PN接合付近のドーパントプロファイルの逆転の急峻性を軽減するため、前記PN接合の各々の付近の前記エピタキシャル層内にカウンタードーパント領域を形成するステップ、
をさらに含む方法。 - 前記エピタキシャル層内に前記カウンタードーパント領域を形成する前記ステップが、通常のドーパント濃度を持つエピタキシャル層の上の前記ショットキーダイオードを包囲する上面付近に、低ドーパント濃度を持つ上部エピタキシャル層を形成するステップをさらに含む、請求項16の方法。
- 前記JBS領域内に前記カウンタードーパント領域を形成する前記ステップが、通常のエピタキシャルドーパント濃度の20〜80%の範囲のエピタキシャルドーパント濃度を持つエピタキシャルドーパント濃度減少領域を前記JBS領域内に形成するステップをさらに含み、それによって前記アクティブセル領域内の前記パワートランジスタセルの性能パラメータが影響を受けない、請求項16の方法。
- 前記エピタキシャル層内に前記カウンタードーパント領域を形成する前記ステップが、前記ショットキーダイオードを包囲する上面付近に低ドーパント濃度を持つ上部エピタキシャル層を形成するために、エピタキシャル層にブランクボディ型ドーパント注入を適用するステップをさらに含む、請求項16の方法。
- 前記JBS領域内に前記カウンタードーパント領域を形成する前記ステップが、前記PN接合付近のドーパントプロファイルの前記逆転の急峻性を軽減するために、前記ボディ型ドーパント領域を取り囲む前記カウンタードーパント領域を形成するため、コンタクト開口部を通してボディ型ドーパント注入を適用するステップをさらに含む、請求項16の方法
。 - 前記ショットキーダイオードを、前記JBS領域内のボディ型ドーパント領域間に点在したオープンストライプとして形成するステップをさらに含む、請求項16の方法。
- 前記ショットキーダイオードを、前記JBS領域内の四角形エピタキシャルドーパント領域を取り囲むボディ型ドーパント領域の交差ストライプとして形成するステップをさらに含む、請求項16の方法。
- 前記ショットキーダイオードを、前記JBS領域内の六角形エピタキシャルドーパント領域を取り囲むボディ型ドーパント領域の周辺ストライプとして形成するステップをさらに含む、請求項16の方法。
- 前記ショットキーダイオードを、前記JBS領域内の多角形エピタキシャルドーパント領域を取り囲むボディ型ドーパント領域の周辺ストライプとして形成するステップをさらに含む、請求項16の方法。
- 前記ショットキーダイオードを、前記JBS領域内の円形エピタキシャルドーパント領域を取り囲むボディ型ドーパント領域の周辺領域として形成するステップをさらに含む、請求項16の方法。
- 櫛歯状に、前記アクティブセル領域から前記JBS領域にまでのびるようにゲートバスを形成するステップをさらに含み、それによって、前記JBS領域の周囲の周辺領域を通して前記ゲートバスをはしらせないことにより、前記JBS領域のより大きな領域がもたらされる、請求項16の方法。
- 複数のパワートランジスタセルを持つアクティブセル領域と、接合障壁制御ショットキー(JBS)領域とを含む半導体パワーデバイスであって、
前記JBS領域は、各々が複数のPN接合間に点在した複数のショットキーダイオードを含み、各前記PN接合は、半導体基板の上面付近のエピタキシャル層上に配置されたボディ型ドーパント領域を含み、
前記ボディ型ドーパント領域は、前記PN接合における早期のブレークダウンを防ぐために、前記PN接合付近のドーパントプロファイルの逆転の急峻性を軽減するため、高濃度ボディ型ドーパント領域と、前記高濃度ボディ型ドーパント領域を取り囲む低濃度ボディ型ドーパント領域とをさらに含む、
半導体パワーデバイス。 - 前記ボディ型ドーパント領域は、N型ドーパントエピタキシャル層内に配置されたP型ドーパントを含む、請求項27の半導体パワーデバイス。
- 前記半導体パワーデバイスは、金属酸化物半導体電界効果トランジスタ(MOSFET)デバイスをさらに含む、請求項27の半導体パワーデバイス。
- 前記半導体パワーデバイスは、トレンチ金属酸化物半導体電界効果トランジスタ(MOSFET)デバイスをさらに含み、前記アクティブセル領域は複数のMOSFETセルを含む、請求項27の半導体パワーデバイス。
- 前記エピタキシャル層は、通常のドーパント濃度を持つエピタキシャル層の上の前記ショットキーダイオードを包囲する上面付近に、低ドーパント濃度を持つ上部エピタキシャル層をさらに含む、請求項27の半導体パワーデバイス。
- 前記JBS領域内に配置された前記カウンタードーパント領域は、20〜80%の範囲でエピタキシャルドーパント濃度が減少しており、それによって前記アクティブセル領域内の前記パワートランジスタセルの性能パラメータが影響を受けない、請求項27の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内のボディ型ドーパント領域間に点在したオープンストライプとして構成される、請求項27の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内の四角形ショットキーコンタクト領域を取り囲むボディ型ドーパント領域の交差ストライプとして構成される、請求項27の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内の六角形ショットキーコンタクト領域を取り囲むボディ型ドーパント領域の周辺ストライプとして構成される、請求項27の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内の多角形ショットキーコンタクト領域を取り囲むボディ型ドーパント領域の周辺ストライプとして構成される、請求項27の半導体パワーデバイス。
- 前記ショットキーダイオードが、前記JBS領域内の円形ショットキーコンタクト領域を取り囲むボディ型ドーパント領域の周辺領域として構成される、請求項27の半導体パワーデバイス。
- 櫛歯状に、前記アクティブセル領域から前記JBS領域にまでのびて形成されたゲートバスをさらに含み、それによって、前記JBS領域の周囲の周辺領域を通して前記ゲートバスをはしらせないことにより、前記JBS領域のより大きな領域がもたらされる、請求項27の半導体パワーデバイス。
- 各マクロセルが複数のMOSFETセルとJBS領域とを含むマクロセル構造をさらに含む、請求項27の半導体パワーデバイス。
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PCT/US2007/010259 WO2007133426A2 (en) | 2006-04-29 | 2007-04-27 | Enhancing schottky breakdown voltage (bv) without affecting an integrated mosfet-schottky device layout |
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JP2016006854A (ja) * | 2014-05-28 | 2016-01-14 | パナソニックIpマネジメント株式会社 | 半導体素子およびその製造方法 |
WO2016002057A1 (ja) * | 2014-07-03 | 2016-01-07 | 株式会社日立製作所 | 半導体装置、パワーモジュール、電力変換装置、3相モータシステム、自動車、並びに鉄道車両 |
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US20060202264A1 (en) | 2006-09-14 |
CN101385147A (zh) | 2009-03-11 |
US7436022B2 (en) | 2008-10-14 |
WO2007133426A2 (en) | 2007-11-22 |
CN101385147B (zh) | 2010-08-18 |
WO2007133426A3 (en) | 2008-10-16 |
KR20090037382A (ko) | 2009-04-15 |
TW200802868A (en) | 2008-01-01 |
TWI312576B (en) | 2009-07-21 |
KR101329997B1 (ko) | 2013-11-15 |
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