JP2009528701A5 - - Google Patents

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JP2009528701A5
JP2009528701A5 JP2008557387A JP2008557387A JP2009528701A5 JP 2009528701 A5 JP2009528701 A5 JP 2009528701A5 JP 2008557387 A JP2008557387 A JP 2008557387A JP 2008557387 A JP2008557387 A JP 2008557387A JP 2009528701 A5 JP2009528701 A5 JP 2009528701A5
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substrate
source
trench
logic
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JP5282888B2 (ja
JP2009528701A (ja
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JP2008557387A 2006-03-02 2007-03-01 Ｕ型トランジスタおよび関連する製造方法 Active JP5282888B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/366,212 US7476933B2 (en) 2006-03-02 2006-03-02 Vertical gated access transistor
US11/366,212 2006-03-02
PCT/US2007/005305 WO2007103147A2 (en) 2006-03-02 2007-03-01 U-shaped transistor and corresponding manufacturing method

Publications (3)

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JP2009528701A JP2009528701A (ja) 2009-08-06
JP2009528701A5 true JP2009528701A5 (enExample) 2010-04-30
JP5282888B2 JP5282888B2 (ja) 2013-09-04

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US (5) US7476933B2 (enExample)
EP (1) EP2011147B1 (enExample)
JP (1) JP5282888B2 (enExample)
KR (1) KR101364780B1 (enExample)
CN (1) CN101395714B (enExample)
WO (1) WO2007103147A2 (enExample)

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