JP2009009935A - 製造装置および発光装置の作製方法 - Google Patents
製造装置および発光装置の作製方法 Download PDFInfo
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- JP2009009935A JP2009009935A JP2008137564A JP2008137564A JP2009009935A JP 2009009935 A JP2009009935 A JP 2009009935A JP 2008137564 A JP2008137564 A JP 2008137564A JP 2008137564 A JP2008137564 A JP 2008137564A JP 2009009935 A JP2009009935 A JP 2009009935A
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Abstract
【解決手段】レーザビームを用いてマスクの開口を通過させ、選択的に有機化合物を含む層の成膜を行う。光吸収層、及び有機化合物を含む材料層を形成した被照射基板と、第1の電極が設けられた被成膜基板とを向かい合わせて配置し、マスクの開口を通過したレーザビームが光吸収層を加熱することによって加熱された領域と重なる位置の有機化合物を蒸発させることで被成膜基板の面上に選択的に成膜を行う。
【選択図】図1
Description
図1は本発明の製造装置の一例を示す斜視図である。射出されるレーザ光はレーザ発振装置103(YAGレーザ装置、エキシマレーザ装置など)から出力され、ビーム形状を矩形状とするための第1の光学系104と、整形するための第2の光学系105と、平行光線にするための第3の光学系106とを通過し、反射ミラー107で光路が被照射基板101に対して垂直となる方向に曲げられる。その後、選択的に光透過する開口を有するマスク110にレーザビームを通過させて光吸収層114に照射する。
ここで、図1に示す製造装置を用いて成膜する前後の様子を図2(A)、図2(B)、及び図2(C)に示す。
実施の形態2では、光吸収層を用いる例を示したが、光吸収層に代えて光を照射するとガスを発生するガス発生層を用いる例を図6(A)、図6(B)、及び図6(C)に示す。
11:走査方向
14:マスク
16:開口
20:絶縁物
21:第1の膜
22:第2の膜
23:第3の膜
34:マスク
36:開口
41:第1の膜
42:第2の膜
43:第3の膜
54:マスク
56:開口
100:被成膜基板
101:被照射基板
103:レーザ発振装置
104:第1の光学系
105:第2の光学系
106:第3の光学系
108:撮像素子
109:基板ステージ
110:マスク
114:光吸収層
115:材料層
116:制御装置
200:被照射基板
201:光吸収層
202:有機化合物を含む層
205:マスク
206:被成膜基板
207:第1の電極
208:絶縁物
211:有機化合物を含む層
300:被照射基板
301:ガス発生層
302:有機化合物を含む層
305:マスク
306:被成膜基板
307:第1の電極
308:絶縁物
311:有機化合物を含む層
1501:第1の基板
1504:絶縁膜
1513:第1の電極
1514:隔壁
1515R、1515G、1515B:発光層を含む積層膜
1516:第2の電極
1521:発光領域
1522:逆テーパ状の隔壁
1601:第1の基板
1602:データ線
1603:走査線
1604:隔壁
1605:領域
1607:入力端子
1608:接続配線
1609a、1609b:FPC
1700 有機化合物を含む層
1701 ソース側駆動回路
1702 画素部
1703 ゲート側駆動回路
1704 封止基板
1705 シール材
1707 空間
1709 FPC(フレキシブルプリントサーキット)
1710 素子基板
1711 スイッチング用TFT
1712 電流制御用TFT
1713 陽極
1714 絶縁物
1715 発光素子
1716 陰極
1723 nチャネル型TFT
1724 pチャネル型TFT
8001 筐体
8002 支持台
8003 表示部
8004 スピーカー部
8005 ビデオ入力端子
8101 本体
8102 筐体
8103 表示部
8104 キーボード
8105 外部接続ポート
8106 マウス
8201 本体
8202 表示部
8203 筐体
8204 外部接続ポート
8205 リモコン受信部
8206 受像部
8207 バッテリー
8208 音声入力部
8209 操作キー
8301 照明部
8302 傘
8303 可変アーム
8304 支柱
8305 台
8306 電源
8401 本体
8402 筐体
8403 表示部
8404 音声入力部
8405 音声出力部
8406 操作キー
8407 外部接続ポート
8408 アンテナ
9501 車体
9502 表示パネル
Claims (8)
- レーザ光を射出する光源ユニットと、
前記レーザ光を矩形状または線状のレーザビームに成形する光学系と、
前記矩形状または線状のレーザビームを選択的に遮光または反射する光制御手段と、
前記光制御手段を通過したレーザビームを被照射基板に設けられた光吸収層上に走査する走査手段と、
前記光制御手段と、前記被照射基板と、被成膜基板との位置あわせを行うアライメント手段とを有し、
前記光制御手段を通過したレーザビームは、前記光吸収層を加熱し、前記光吸収層が前記被照射基板に設けられた第1の材料層を加熱し、前記第1の材料層の少なくとも一部を気化させ、前記被照射基板に対向して配置された前記被成膜基板上に第2の材料層を形成する製造装置。 - レーザ光を射出する光源ユニットと、
前記レーザ光を矩形状または線状のレーザビームに成形する光学系と、
前記矩形状または線状のレーザビームを選択的に遮光または反射する光制御手段と、
前記光制御手段を通過したレーザビームを被照射基板に設けられたガスを発生する層上に走査する走査手段と、
前記光制御手段と、前記ガスを発生する層及び第1の材料層が積層された被照射基板と、被成膜基板との位置あわせを行うアライメント手段とを有し、
前記光制御手段を通過したレーザビームは、前記被照射基板に設けられた前記ガスを発生する層を加熱し、前記ガスを発生する層を気化させ、前記被照射基板に対向して配置された前記被成膜基板上に第2の材料層を形成する製造装置。 - 請求項1または請求項2において、さらに前記光源ユニット、前記光制御手段、及び前記走査手段を制御する制御装置を備えている製造装置。
- 請求項1乃至3のいずれか一において、前記矩形状または線状のレーザビームの長辺方向は、前記走査手段で走査する方向と直交する製造装置。
- 請求項1乃至4のいずれか一において、前記被照射基板は、透光性を有する基板である製造装置。
- 請求項1乃至5のいずれか一において、前記光制御手段は、フォトマスク、スリット、またはメタルマスクである製造装置。
- 被照射基板の一方の面上に光の照射によりガスを発生する層を形成し、
前記ガスを発生する層上に材料層を形成し、
被成膜基板の一方の面を前記被照射基板の一方の面と対向させて配置し、
前記被照射基板のもう一方の面を通過させて光を前記ガスを発生する層に照射して、前記被成膜基板の一方の面上に材料層を成膜する発光装置の作製方法。 - 請求項7において、前記光は、レーザ光、放電灯、または発熱灯である発光装置の作製方法。
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Also Published As
Publication number | Publication date |
---|---|
US8232038B2 (en) | 2012-07-31 |
US20120285379A1 (en) | 2012-11-15 |
JP2015092504A (ja) | 2015-05-14 |
US20080299496A1 (en) | 2008-12-04 |
KR20080105998A (ko) | 2008-12-04 |
KR101563237B1 (ko) | 2015-10-26 |
CN101314841A (zh) | 2008-12-03 |
JP5957098B2 (ja) | 2016-07-27 |
JP2013127977A (ja) | 2013-06-27 |
CN101314841B (zh) | 2013-06-12 |
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