JP2008519904A5 - - Google Patents

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Publication number
JP2008519904A5
JP2008519904A5 JP2007540188A JP2007540188A JP2008519904A5 JP 2008519904 A5 JP2008519904 A5 JP 2008519904A5 JP 2007540188 A JP2007540188 A JP 2007540188A JP 2007540188 A JP2007540188 A JP 2007540188A JP 2008519904 A5 JP2008519904 A5 JP 2008519904A5
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JP
Japan
Prior art keywords
organic material
temperature
control region
temperature control
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007540188A
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English (en)
Japanese (ja)
Other versions
JP2008519904A (ja
JP5144268B2 (ja
Filing date
Publication date
Priority claimed from US10/984,095 external-priority patent/US20060099344A1/en
Application filed filed Critical
Publication of JP2008519904A publication Critical patent/JP2008519904A/ja
Publication of JP2008519904A5 publication Critical patent/JP2008519904A5/ja
Application granted granted Critical
Publication of JP5144268B2 publication Critical patent/JP5144268B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007540188A 2004-11-09 2005-11-09 有機材料の気化を制御するための方法と装置 Expired - Lifetime JP5144268B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/984,095 US20060099344A1 (en) 2004-11-09 2004-11-09 Controlling the vaporization of organic material
US10/984,095 2004-11-09
PCT/US2005/040539 WO2006053017A1 (en) 2004-11-09 2005-11-09 Method and apparatus for controlling the vaporization of organic material

Publications (3)

Publication Number Publication Date
JP2008519904A JP2008519904A (ja) 2008-06-12
JP2008519904A5 true JP2008519904A5 (enExample) 2008-12-04
JP5144268B2 JP5144268B2 (ja) 2013-02-13

Family

ID=35892418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007540188A Expired - Lifetime JP5144268B2 (ja) 2004-11-09 2005-11-09 有機材料の気化を制御するための方法と装置

Country Status (8)

Country Link
US (2) US20060099344A1 (enExample)
EP (1) EP1834364B1 (enExample)
JP (1) JP5144268B2 (enExample)
KR (1) KR101172410B1 (enExample)
CN (1) CN101057349B (enExample)
DE (1) DE602005025695D1 (enExample)
TW (1) TWI382099B (enExample)
WO (1) WO2006053017A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
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US7989021B2 (en) 2005-07-27 2011-08-02 Global Oled Technology Llc Vaporizing material at a uniform rate
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KR20110050690A (ko) * 2008-09-24 2011-05-16 이데미쓰 고산 가부시키가이샤 복합 유기 전계 발광 재료
US8425801B2 (en) * 2009-04-10 2013-04-23 Idemitsu Kosan Co., Ltd. Composite organic electroluminescent material and production method thereof
DE102010007111B4 (de) * 2010-02-05 2012-02-16 Von Ardenne Anlagentechnik Gmbh Verfahren und Pulvermischung zur Beschichtung von Substraten aus der Dampfphase
CN104711514B (zh) * 2015-04-07 2017-05-31 合肥京东方光电科技有限公司 一种成膜装置及方法
CN117051361B (zh) * 2023-08-14 2025-10-28 兰州空间技术物理研究所 一种真空卷绕有机物蒸镀防护装置

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