JP2007531819A5 - - Google Patents

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Publication number
JP2007531819A5
JP2007531819A5 JP2007505009A JP2007505009A JP2007531819A5 JP 2007531819 A5 JP2007531819 A5 JP 2007531819A5 JP 2007505009 A JP2007505009 A JP 2007505009A JP 2007505009 A JP2007505009 A JP 2007505009A JP 2007531819 A5 JP2007531819 A5 JP 2007531819A5
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JP
Japan
Prior art keywords
organic material
permeable
manifold
vaporizing
film
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007505009A
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English (en)
Japanese (ja)
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JP2007531819A (ja
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Publication date
Priority claimed from US10/805,980 external-priority patent/US7238389B2/en
Application filed filed Critical
Publication of JP2007531819A publication Critical patent/JP2007531819A/ja
Publication of JP2007531819A5 publication Critical patent/JP2007531819A5/ja
Pending legal-status Critical Current

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JP2007505009A 2004-03-22 2005-03-14 流動化した有機材料の気化 Pending JP2007531819A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/805,980 US7238389B2 (en) 2004-03-22 2004-03-22 Vaporizing fluidized organic materials
PCT/US2005/008545 WO2005093117A2 (en) 2004-03-22 2005-03-14 Vaporizing fluidized organic materials

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012247297A Division JP5727448B2 (ja) 2004-03-22 2012-11-09 流動化した有機材料の気化

Publications (2)

Publication Number Publication Date
JP2007531819A JP2007531819A (ja) 2007-11-08
JP2007531819A5 true JP2007531819A5 (enExample) 2008-05-01

Family

ID=34963135

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2007505009A Pending JP2007531819A (ja) 2004-03-22 2005-03-14 流動化した有機材料の気化
JP2012247297A Expired - Lifetime JP5727448B2 (ja) 2004-03-22 2012-11-09 流動化した有機材料の気化

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012247297A Expired - Lifetime JP5727448B2 (ja) 2004-03-22 2012-11-09 流動化した有機材料の気化

Country Status (7)

Country Link
US (1) US7238389B2 (enExample)
EP (1) EP1733066B1 (enExample)
JP (2) JP2007531819A (enExample)
KR (1) KR101146267B1 (enExample)
CN (1) CN1934284B (enExample)
TW (1) TWI360581B (enExample)
WO (1) WO2005093117A2 (enExample)

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US8147989B2 (en) * 2009-02-27 2012-04-03 Global Oled Technology Llc OLED device with stabilized green light-emitting layer
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US8526213B2 (en) 2010-11-01 2013-09-03 Micron Technology, Inc. Memory cells, methods of programming memory cells, and methods of forming memory cells
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DE102011051261A1 (de) * 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs insbesondere Verdampfungsvorrichtung dazu
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US8969116B2 (en) * 2012-01-23 2015-03-03 Universal Display Corporation Selective OLED vapor deposition using electric charges
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JP6584067B2 (ja) * 2014-05-30 2019-10-02 日立造船株式会社 真空蒸着装置
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CN104178734B (zh) * 2014-07-21 2016-06-15 京东方科技集团股份有限公司 蒸发镀膜装置
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