JP2011521431A5 - - Google Patents

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Publication number
JP2011521431A5
JP2011521431A5 JP2011510643A JP2011510643A JP2011521431A5 JP 2011521431 A5 JP2011521431 A5 JP 2011521431A5 JP 2011510643 A JP2011510643 A JP 2011510643A JP 2011510643 A JP2011510643 A JP 2011510643A JP 2011521431 A5 JP2011521431 A5 JP 2011521431A5
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JP
Japan
Prior art keywords
outlet
block
substrate
gap
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2011510643A
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English (en)
Japanese (ja)
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JP2011521431A (ja
JP5727368B2 (ja
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Application filed filed Critical
Priority claimed from PCT/US2009/044502 external-priority patent/WO2009143142A2/en
Publication of JP2011521431A publication Critical patent/JP2011521431A/ja
Publication of JP2011521431A5 publication Critical patent/JP2011521431A5/ja
Application granted granted Critical
Publication of JP5727368B2 publication Critical patent/JP5727368B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011510643A 2008-05-19 2009-05-19 電子デバイスにおける気相コーティングの装置および方法 Expired - Fee Related JP5727368B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5424108P 2008-05-19 2008-05-19
US61/054,241 2008-05-19
PCT/US2009/044502 WO2009143142A2 (en) 2008-05-19 2009-05-19 Apparatus and method of vapor coating in an electronic device

Publications (3)

Publication Number Publication Date
JP2011521431A JP2011521431A (ja) 2011-07-21
JP2011521431A5 true JP2011521431A5 (enExample) 2012-06-28
JP5727368B2 JP5727368B2 (ja) 2015-06-03

Family

ID=41340819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011510643A Expired - Fee Related JP5727368B2 (ja) 2008-05-19 2009-05-19 電子デバイスにおける気相コーティングの装置および方法

Country Status (5)

Country Link
US (1) US20110092076A1 (enExample)
JP (1) JP5727368B2 (enExample)
KR (1) KR20110014653A (enExample)
TW (1) TW201011114A (enExample)
WO (1) WO2009143142A2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080286487A1 (en) * 2007-05-18 2008-11-20 Lang Charles D Process for making contained layers
WO2009055628A1 (en) * 2007-10-26 2009-04-30 E. I. Du Pont De Nemours And Company Process and materials for making contained layers and devices made with same
US8592239B2 (en) * 2009-07-27 2013-11-26 E I Du Pont De Nemours And Company Process and materials for making contained layers and devices made with same
US11220737B2 (en) 2014-06-25 2022-01-11 Universal Display Corporation Systems and methods of modulating flow during vapor jet deposition of organic materials
EP2960059B1 (en) 2014-06-25 2018-10-24 Universal Display Corporation Systems and methods of modulating flow during vapor jet deposition of organic materials
US11267012B2 (en) * 2014-06-25 2022-03-08 Universal Display Corporation Spatial control of vapor condensation using convection
US10566534B2 (en) 2015-10-12 2020-02-18 Universal Display Corporation Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP)
JP6640781B2 (ja) * 2017-03-23 2020-02-05 キオクシア株式会社 半導体製造装置
KR102233995B1 (ko) 2019-04-30 2021-03-31 한국과학기술원 접촉점화성 고체 연료 및 이의 제조 방법

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