JP2007517140A5 - - Google Patents

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Publication number
JP2007517140A5
JP2007517140A5 JP2006547095A JP2006547095A JP2007517140A5 JP 2007517140 A5 JP2007517140 A5 JP 2007517140A5 JP 2006547095 A JP2006547095 A JP 2006547095A JP 2006547095 A JP2006547095 A JP 2006547095A JP 2007517140 A5 JP2007517140 A5 JP 2007517140A5
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JP
Japan
Prior art keywords
vinylpyridine
reaction product
polymer compound
substituted pyridyl
poly
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JP2006547095A
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English (en)
Japanese (ja)
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JP4539925B2 (ja
JP2007517140A (ja
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Publication date
Priority claimed from US10/963,369 external-priority patent/US8002962B2/en
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Publication of JP2007517140A publication Critical patent/JP2007517140A/ja
Publication of JP2007517140A5 publication Critical patent/JP2007517140A5/ja
Application granted granted Critical
Publication of JP4539925B2 publication Critical patent/JP4539925B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2006547095A 2003-12-22 2004-12-13 微小電子機器における銅の電着 Expired - Lifetime JP4539925B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US53177103P 2003-12-22 2003-12-22
US10/963,369 US8002962B2 (en) 2002-03-05 2004-10-12 Copper electrodeposition in microelectronics
PCT/US2004/041620 WO2005066391A1 (en) 2003-12-22 2004-12-13 Copper electrodeposition in microelectronics

Publications (3)

Publication Number Publication Date
JP2007517140A JP2007517140A (ja) 2007-06-28
JP2007517140A5 true JP2007517140A5 (https=) 2008-02-07
JP4539925B2 JP4539925B2 (ja) 2010-09-08

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ID=34752972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006547095A Expired - Lifetime JP4539925B2 (ja) 2003-12-22 2004-12-13 微小電子機器における銅の電着

Country Status (7)

Country Link
US (4) US8002962B2 (https=)
EP (1) EP1697561B1 (https=)
JP (1) JP4539925B2 (https=)
KR (1) KR101157284B1 (https=)
PT (1) PT1697561T (https=)
TW (1) TWI266383B (https=)
WO (1) WO2005066391A1 (https=)

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