JP2007510173A5 - - Google Patents

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Publication number
JP2007510173A5
JP2007510173A5 JP2006536846A JP2006536846A JP2007510173A5 JP 2007510173 A5 JP2007510173 A5 JP 2007510173A5 JP 2006536846 A JP2006536846 A JP 2006536846A JP 2006536846 A JP2006536846 A JP 2006536846A JP 2007510173 A5 JP2007510173 A5 JP 2007510173A5
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JP
Japan
Prior art keywords
composition
weight
containing solvent
salt
weight percent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2006536846A
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English (en)
Japanese (ja)
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JP2007510173A (ja
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Priority claimed from US10/689,657 external-priority patent/US7135445B2/en
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Publication of JP2007510173A publication Critical patent/JP2007510173A/ja
Publication of JP2007510173A5 publication Critical patent/JP2007510173A5/ja
Ceased legal-status Critical Current

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JP2006536846A 2003-10-22 2004-10-22 石英で被覆したポリシリコンおよびその他の資材の洗浄におけるビスコリンおよびトリスコリンの使用工程 Ceased JP2007510173A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/689,657 US7135445B2 (en) 2001-12-04 2003-10-22 Process for the use of bis-choline and tris-choline in the cleaning of quartz-coated polysilicon and other materials
PCT/US2004/035148 WO2005043250A2 (en) 2003-10-22 2004-10-22 Process for the use of bis-choline and tris-choline in the cleaning of quartz-coated polysilicon and other materials

Publications (2)

Publication Number Publication Date
JP2007510173A JP2007510173A (ja) 2007-04-19
JP2007510173A5 true JP2007510173A5 (enExample) 2007-12-06

Family

ID=34549851

Family Applications (1)

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JP2006536846A Ceased JP2007510173A (ja) 2003-10-22 2004-10-22 石英で被覆したポリシリコンおよびその他の資材の洗浄におけるビスコリンおよびトリスコリンの使用工程

Country Status (6)

Country Link
US (1) US7135445B2 (enExample)
EP (1) EP1682944A2 (enExample)
JP (1) JP2007510173A (enExample)
KR (1) KR20070003772A (enExample)
CN (1) CN1871553A (enExample)
WO (1) WO2005043250A2 (enExample)

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