JP2007235097A - 撮像装置 - Google Patents
撮像装置 Download PDFInfo
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- JP2007235097A JP2007235097A JP2006332509A JP2006332509A JP2007235097A JP 2007235097 A JP2007235097 A JP 2007235097A JP 2006332509 A JP2006332509 A JP 2006332509A JP 2006332509 A JP2006332509 A JP 2006332509A JP 2007235097 A JP2007235097 A JP 2007235097A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 53
- 230000005684 electric field Effects 0.000 claims abstract description 38
- 238000006243 chemical reaction Methods 0.000 claims abstract description 32
- 239000000969 carrier Substances 0.000 claims abstract description 29
- 238000009825 accumulation Methods 0.000 claims description 22
- 238000009792 diffusion process Methods 0.000 description 31
- 239000000758 substrate Substances 0.000 description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 230000004888 barrier function Effects 0.000 description 14
- 239000012535 impurity Substances 0.000 description 13
- 238000002955 isolation Methods 0.000 description 10
- 230000010354 integration Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000000926 separation method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14806—Structural or functional details thereof
- H01L27/14812—Special geometry or disposition of pixel-elements, address lines or gate-electrodes
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
【解決手段】この撮像装置(CMOSイメージセンサ)は、光電変換機能を有するとともに、光電変換により生成された電子を蓄積するためのフォトダイオード部15と、電界による衝突電離により電子を増倍するための電界を印加する増倍ゲート電極13を含む増倍部25と、フォトダイオード部15と増倍ゲート電極13との間に、フォトダイオード部15および増倍ゲート電極13に隣接するように設けられた1つの転送ゲート電極12とを備えている。
【選択図】図2
Description
図1は、本発明の第1実施形態によるCMOSイメージセンサの全体構成を示した平面図であり、図2は、図1に示した第1実施形態によるCMOSイメージセンサの構造を示した断面図である。また、図3は、図1に示した第1実施形態によるCMOSイメージセンサの画素を示した平面図であり、図4は、図1に示した第1実施形態によるCMOSイメージセンサの構成を示した回路図である。まず、図1〜図4を参照して、第1実施形態によるCMOSイメージセンサの構造について説明する。
図9は、本発明の第2実施形態によるCMOSイメージセンサの構造を示した断面図である。図9を参照して、この第2実施形態では、上記第1実施形態と異なり、フォトダイオード部15が読出ゲート電極14と隣接するように形成された画素30を含むCMOSイメージセンサの構造について説明する。
図11は、本発明の第3実施形態によるCMOSイメージセンサの構造を示した断面図である。図11を参照して、この第3実施形態では、上記第1実施形態と異なり、フォトダイオード部15上に転送ゲート電極42が形成された画素40を含むCMOSイメージセンサの構造について説明する。
12 転送ゲート電極(第1転送電極)
13 増倍ゲート電極(増倍電極)
14 読出ゲート電極(読出電極)
15 フォトダイオード部(キャリア蓄積部)
16 フローティングディフュージョン領域(キャリア数電圧変換部)
25、35 増倍部
42 転送ゲート電極(第2転送電極)
Claims (8)
- 光電変換機能を有するとともに、光電変換により生成されたキャリアを蓄積するためのキャリア蓄積部と、
電界による衝突電離によりキャリアを増倍するための電界を印加する増倍電極を含む増倍部と、
前記キャリア蓄積部と前記増倍電極との間に、前記キャリア蓄積部および前記増倍電極に隣接するように設けられた1つの第1転送電極とを備えた、撮像装置。 - キャリアを衝突電離により増倍させることが可能な電圧を前記増倍電極に印加した後、前記キャリア蓄積部から前記増倍部へとキャリアを転送するように前記第1転送電極の電圧を制御する、請求項1に記載の撮像装置。
- 前記衝突電離によって増倍されたキャリアを前記キャリア蓄積部に戻すように、前記第1転送電極および前記増倍電極の電圧を制御し、
前記増倍部から前記キャリア蓄積部に戻されたキャリアを、再び前記増倍部に転送するように、前記第1転送電極の電圧を制御する、請求項2に記載の撮像装置。 - 前記増倍電極に、隣接する前記第1転送電極に印加されている電圧よりも小さい電圧を印加した後、前記増倍部から前記キャリア蓄積部へとキャリアを転送するように前記第1転送電極の電圧を制御する、請求項3に記載の撮像装置。
- 増倍されたキャリア数を電圧に変換するキャリア数電圧変換部と、
前記キャリア数電圧変換部へのキャリアの転送を行うための読出電極とをさらに備え、
前記キャリア蓄積部、前記増倍電極を有する増倍部、前記第1転送電極、前記キャリア数電圧変換部および前記読出電極を1つの画素内に含む、請求項1〜4のいずれか1項に記載の撮像装置。 - 前記読出電極は、前記増倍電極と前記キャリア数電圧変換部との間に、前記増倍電極および前記キャリア数電圧変換部と隣接するように設けられている、請求項5に記載の撮像装置。
- 前記読出電極は、前記キャリア蓄積部と前記キャリア数電圧変換部との間に、前記キャリア蓄積部および前記キャリア数電圧変換部と隣接するように設けられている、請求項5に記載の撮像装置。
- 前記キャリア蓄積部上に、前記第1転送電極と隣接するように設けられた第2転送電極をさらに備える、請求項1〜7のいずれか1項に記載の撮像装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006332509A JP4212623B2 (ja) | 2006-01-31 | 2006-12-08 | 撮像装置 |
US11/670,861 US7619196B2 (en) | 2006-01-31 | 2007-02-02 | Imaging device including a multiplier electrode |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006021609 | 2006-01-31 | ||
JP2006332509A JP4212623B2 (ja) | 2006-01-31 | 2006-12-08 | 撮像装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007235097A true JP2007235097A (ja) | 2007-09-13 |
JP4212623B2 JP4212623B2 (ja) | 2009-01-21 |
Family
ID=38321194
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006332509A Expired - Fee Related JP4212623B2 (ja) | 2006-01-31 | 2006-12-08 | 撮像装置 |
Country Status (2)
Country | Link |
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US (1) | US7619196B2 (ja) |
JP (1) | JP4212623B2 (ja) |
Cited By (2)
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---|---|---|---|---|
JP2012205305A (ja) * | 2011-03-23 | 2012-10-22 | E2V Semiconductors | 非常に大きなダイナミックレンジを有する画像センサー |
DE112017002137T5 (de) | 2016-04-22 | 2019-01-03 | Sony Corporation | Festkörper-bildgebungselement, treiberverfahren und elektronische vorrichtung |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2007026777A1 (ja) * | 2005-08-30 | 2007-03-08 | National University Corporation Shizuoka University | 半導体測距素子及び固体撮像装置 |
JP2008060550A (ja) * | 2006-07-31 | 2008-03-13 | Sanyo Electric Co Ltd | 撮像装置 |
JP5205002B2 (ja) * | 2007-07-11 | 2013-06-05 | ブレインビジョン株式会社 | 固体撮像素子の画素構造 |
US7969492B2 (en) * | 2007-08-28 | 2011-06-28 | Sanyo Electric Co., Ltd. | Image pickup apparatus |
JP2009130015A (ja) * | 2007-11-21 | 2009-06-11 | Sanyo Electric Co Ltd | 撮像装置 |
JP2009135242A (ja) * | 2007-11-30 | 2009-06-18 | Sanyo Electric Co Ltd | 撮像装置 |
FR2924862B1 (fr) * | 2007-12-10 | 2010-08-13 | Commissariat Energie Atomique | Dispositif microelectronique photosensible avec multiplicateurs par avalanche |
US20090152605A1 (en) * | 2007-12-18 | 2009-06-18 | Sanyo Electric Co., Ltd. | Image sensor and cmos image sensor |
US7952635B2 (en) * | 2007-12-19 | 2011-05-31 | Teledyne Licensing, Llc | Low noise readout apparatus and method with snapshot shutter and correlated double sampling |
US8077240B2 (en) * | 2008-04-23 | 2011-12-13 | Inernational Business Machines Corporation | Methods for enhancing quality of pixel sensor image frames for global shutter imaging |
JP5243100B2 (ja) * | 2008-05-12 | 2013-07-24 | ブレインビジョン株式会社 | 固体撮像素子の画素構造 |
JP2010003868A (ja) * | 2008-06-20 | 2010-01-07 | Sanyo Electric Co Ltd | 撮像装置 |
JP2010021348A (ja) * | 2008-07-10 | 2010-01-28 | Sanyo Electric Co Ltd | 撮像装置 |
JP2010027668A (ja) * | 2008-07-15 | 2010-02-04 | Sanyo Electric Co Ltd | 撮像装置 |
US8009215B2 (en) * | 2008-07-16 | 2011-08-30 | International Business Machines Corporation | Pixel sensor cell with frame storage capability |
US8009216B2 (en) * | 2008-07-16 | 2011-08-30 | International Business Machines Corporation | Pixel sensor cell with frame storage capability |
JP5283216B2 (ja) * | 2008-07-31 | 2013-09-04 | 国立大学法人静岡大学 | 高速電荷転送フォトダイオード、ロックインピクセル及び固体撮像装置 |
JP5473951B2 (ja) * | 2009-02-13 | 2014-04-16 | パナソニック株式会社 | 固体撮像装置及びカメラ |
FR2945667B1 (fr) | 2009-05-14 | 2011-12-16 | Commissariat Energie Atomique | Capteur d'image integre a tres grande sensibilite. |
US9698196B2 (en) * | 2009-08-14 | 2017-07-04 | Heptagon Micro Optics Pte. Ltd. | Demodulation pixel incorporating majority carrier current, buried channel and high-low junction |
JP5648923B2 (ja) * | 2009-10-09 | 2015-01-07 | 国立大学法人静岡大学 | 半導体素子及び固体撮像装置 |
FR2973160B1 (fr) * | 2011-03-23 | 2013-03-29 | E2V Semiconductors | Capteur d'image a multiplication d'electrons |
JP5573978B2 (ja) * | 2012-02-09 | 2014-08-20 | 株式会社デンソー | 固体撮像素子およびその駆動方法 |
EP3066689B1 (en) | 2013-11-04 | 2020-07-08 | Artto Aurola | Improved semiconductor radiation detector |
FR3031237B1 (fr) * | 2014-12-29 | 2016-12-23 | E2V Semiconductors | Capteur d'image a pixels actifs en technologie cmos a multiplication d'electrons |
EP3475987A4 (en) * | 2016-06-21 | 2020-01-01 | Shenzhen Xpectvision Technology Co., Ltd. | IMAGE SENSOR BASED ON AVALANCHE PHOTODIODS |
CN111787247B (zh) * | 2020-06-19 | 2022-09-16 | 中国电子科技集团公司第四十四研究所 | 倍增寄存器结构以及包括该倍增寄存器结构的emccd |
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JP3483261B2 (ja) | 1992-07-10 | 2004-01-06 | テキサス インスツルメンツ インコーポレイテツド | イメージセンサ |
JP3447326B2 (ja) | 1993-06-25 | 2003-09-16 | 日本放送協会 | 固体撮像素子 |
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JP2005268564A (ja) | 2004-03-19 | 2005-09-29 | Ricoh Co Ltd | 固体撮像素子及び固体撮像素子の製造方法 |
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2006
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-
2007
- 2007-02-02 US US11/670,861 patent/US7619196B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012205305A (ja) * | 2011-03-23 | 2012-10-22 | E2V Semiconductors | 非常に大きなダイナミックレンジを有する画像センサー |
DE112017002137T5 (de) | 2016-04-22 | 2019-01-03 | Sony Corporation | Festkörper-bildgebungselement, treiberverfahren und elektronische vorrichtung |
Also Published As
Publication number | Publication date |
---|---|
JP4212623B2 (ja) | 2009-01-21 |
US7619196B2 (en) | 2009-11-17 |
US20070176213A1 (en) | 2007-08-02 |
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