JP2005518674A5 - - Google Patents

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Publication number
JP2005518674A5
JP2005518674A5 JP2003572077A JP2003572077A JP2005518674A5 JP 2005518674 A5 JP2005518674 A5 JP 2005518674A5 JP 2003572077 A JP2003572077 A JP 2003572077A JP 2003572077 A JP2003572077 A JP 2003572077A JP 2005518674 A5 JP2005518674 A5 JP 2005518674A5
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JP
Japan
Prior art keywords
substrate
axis
support
pushing member
edge
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JP2003572077A
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English (en)
Japanese (ja)
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JP2005518674A (ja
JP4290561B2 (ja
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Priority claimed from US10/084,762 external-priority patent/US6824343B2/en
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Publication of JP2005518674A publication Critical patent/JP2005518674A/ja
Publication of JP2005518674A5 publication Critical patent/JP2005518674A5/ja
Application granted granted Critical
Publication of JP4290561B2 publication Critical patent/JP4290561B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003572077A 2002-02-22 2003-02-18 基板支持体 Expired - Lifetime JP4290561B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/084,762 US6824343B2 (en) 2002-02-22 2002-02-22 Substrate support
PCT/US2003/004885 WO2003073479A1 (en) 2002-02-22 2003-02-18 Substrate support

Publications (3)

Publication Number Publication Date
JP2005518674A JP2005518674A (ja) 2005-06-23
JP2005518674A5 true JP2005518674A5 (https=) 2006-01-05
JP4290561B2 JP4290561B2 (ja) 2009-07-08

Family

ID=27753531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003572077A Expired - Lifetime JP4290561B2 (ja) 2002-02-22 2003-02-18 基板支持体

Country Status (7)

Country Link
US (2) US6824343B2 (https=)
EP (1) EP1485946B1 (https=)
JP (1) JP4290561B2 (https=)
KR (1) KR100636491B1 (https=)
CN (1) CN100413017C (https=)
TW (1) TWI279876B (https=)
WO (1) WO2003073479A1 (https=)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6824343B2 (en) * 2002-02-22 2004-11-30 Applied Materials, Inc. Substrate support
CA2527342A1 (en) * 2003-06-05 2004-12-16 Bioprocessors Corp. System and method for process automation
DE102004036435B4 (de) * 2003-08-07 2007-08-30 Nanophotonics Ag Haltevorrichtung für scheibenförmige Objekte
US7207766B2 (en) * 2003-10-20 2007-04-24 Applied Materials, Inc. Load lock chamber for large area substrate processing system
US20050160992A1 (en) * 2004-01-28 2005-07-28 Applied Materials, Inc. Substrate gripping apparatus
US7018161B2 (en) * 2004-06-18 2006-03-28 Blueprint Automation B.V. Suction head
US7144813B2 (en) * 2004-11-12 2006-12-05 Semitool, Inc. Method and apparatus for thermally processing microelectronic workpieces
US7440091B2 (en) * 2004-10-26 2008-10-21 Applied Materials, Inc. Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
US7547181B2 (en) * 2004-11-15 2009-06-16 Dainippon Screen Mfg. Co., Ltd. Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum
KR100710598B1 (ko) * 2004-12-08 2007-04-24 주식회사 에이디피엔지니어링 평판표시소자 제조장치
KR20070013134A (ko) 2005-07-25 2007-01-30 삼성전자주식회사 표시장치용 기판의 제조장치 및 제조방법
KR100749755B1 (ko) * 2006-02-10 2007-08-16 주식회사 싸이맥스 웨이퍼 처리장치
JP4098338B2 (ja) * 2006-07-20 2008-06-11 川崎重工業株式会社 ウェハ移載装置および基板移載装置
KR100829923B1 (ko) * 2006-08-30 2008-05-16 세메스 주식회사 스핀헤드 및 이를 이용하는 기판처리방법
EP2095412B1 (en) * 2006-12-14 2016-06-29 Kemet Japan CO., LTD. Disc holding apparatus and defect/foreign material detecting apparatus
US20080203083A1 (en) * 2007-02-28 2008-08-28 Wirth Paul Z Single wafer anneal processor
US8234771B2 (en) * 2007-03-21 2012-08-07 General Electric Company Method and system for machining an array of components
WO2008133149A1 (ja) * 2007-04-23 2008-11-06 Ulvac, Inc. 支持部材およびキャリアと支持方法
TW200908363A (en) * 2007-07-24 2009-02-16 Applied Materials Inc Apparatuses and methods of substrate temperature control during thin film solar manufacturing
US8276959B2 (en) 2008-08-08 2012-10-02 Applied Materials, Inc. Magnetic pad for end-effectors
KR101111399B1 (ko) * 2009-02-09 2012-02-24 주식회사 싸이맥스 웨이퍼 전달 및 열처리가 동시에 수행되는 로드락 챔버
JP5501688B2 (ja) * 2009-07-30 2014-05-28 東京エレクトロン株式会社 基板位置合わせ機構、それを用いた真空予備室および基板処理システム
KR20110019511A (ko) * 2009-08-20 2011-02-28 삼성전자주식회사 매거진의 로킹 장치
JP5258981B2 (ja) * 2010-02-05 2013-08-07 東京エレクトロン株式会社 基板保持具及び基板搬送装置及び基板処理装置
KR101013019B1 (ko) * 2010-06-21 2011-02-14 김정태 웨이퍼 이송 시스템 및 이송 방법
US9371584B2 (en) * 2011-03-09 2016-06-21 Applied Materials, Inc. Processing chamber and method for centering a substrate therein
US9421617B2 (en) 2011-06-22 2016-08-23 Tel Nexx, Inc. Substrate holder
US8613474B2 (en) 2011-07-06 2013-12-24 Tel Nexx, Inc. Substrate loader and unloader having a Bernoulli support
US9082799B2 (en) * 2012-09-20 2015-07-14 Varian Semiconductor Equipment Associates, Inc. System and method for 2D workpiece alignment
KR101404987B1 (ko) * 2012-10-29 2014-06-10 주식회사 선익시스템 인라인 증착장비의 글라스 홀더용 냉각 챔버
JP6314157B2 (ja) * 2013-12-26 2018-04-18 川崎重工業株式会社 エンドエフェクタおよび基板搬送ロボット
CN105575868B (zh) * 2014-11-10 2018-12-07 上海理想万里晖薄膜设备有限公司 基板校准方法与装置
JP6535187B2 (ja) * 2015-03-10 2019-06-26 株式会社荏原製作所 基板搬送用ハンド
WO2016172003A1 (en) * 2015-04-20 2016-10-27 Applied Materials, Inc. Buffer chamber wafer heating mechanism and supporting robot
WO2017066418A1 (en) * 2015-10-15 2017-04-20 Applied Materials, Inc. Substrate carrier system
CN105177509B (zh) * 2015-10-16 2017-08-11 京东方科技集团股份有限公司 一种背板夹取装置、对位装置及蒸镀设备
US10121655B2 (en) 2015-11-20 2018-11-06 Applied Materials, Inc. Lateral plasma/radical source
EP3419045B1 (en) * 2015-11-20 2020-08-19 Shimadzu Corporation Vacuum processing apparatus and mass spectrometer
JP6493339B2 (ja) * 2016-08-26 2019-04-03 村田機械株式会社 搬送容器、及び収容物の移載方法
CN107841727A (zh) * 2017-12-15 2018-03-27 北京创昱科技有限公司 一种冷却构件及真空镀膜设备
CN110970344B (zh) * 2018-10-01 2024-10-25 Asmip控股有限公司 衬底保持设备、包含所述设备的系统及其使用方法
JP7280132B2 (ja) * 2019-07-12 2023-05-23 株式会社アルバック 真空チャンバ及び基板処理装置
GB201913356D0 (en) * 2019-09-16 2019-10-30 Spts Technologies Ltd Wafer processing system
JP7752985B2 (ja) * 2021-07-21 2025-10-14 ダイキンファインテック株式会社 基板処理装置
CN117645059A (zh) * 2022-09-02 2024-03-05 群翊工业股份有限公司 直立式夹持基板载具结构
DE102023212913A1 (de) * 2023-12-19 2024-02-08 Vitesco Technologies Germany Gmbh Haltevorrichtung zum Halten eines Substrats, Anordnungsvorrichtung zum Halten und Verbinden von zumindest zwei Substraten und Lötwerkzeug

Family Cites Families (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2302975A1 (fr) * 1975-03-04 1976-10-01 Saint Gobain Dispositif de centrage de feuilles de verre sur le plateau d'une machine
US4347927A (en) * 1980-06-23 1982-09-07 Libbey-Owens-Ford Company Sheet aligning apparatus
US5374147A (en) * 1982-07-29 1994-12-20 Tokyo Electron Limited Transfer device for transferring a substrate
JP2855046B2 (ja) 1993-03-31 1999-02-10 大日本スクリーン製造株式会社 回転式基板処理装置用の基板回転保持装置
US4655584A (en) * 1984-05-11 1987-04-07 Nippon Kogaku K. K. Substrate positioning apparatus
JPS61214445A (ja) 1985-03-19 1986-09-24 Fujitsu Ltd ウエ−ハの位置合わせ機構
US4621797A (en) * 1985-10-10 1986-11-11 Rca Corporation Device for orienting an object on a flat surface
US4764076A (en) * 1986-04-17 1988-08-16 Varian Associates, Inc. Valve incorporating wafer handling arm
US4788994A (en) 1986-08-13 1988-12-06 Dainippon Screen Mfg. Co. Wafer holding mechanism
JPS63124543A (ja) 1986-11-14 1988-05-28 Hitachi Electronics Eng Co Ltd 板体チヤツキング機構
US4784377A (en) * 1986-12-23 1988-11-15 Northern Telecom Limited Apparatus for locating and supporting ceramic substrates
US5040484A (en) * 1987-05-04 1991-08-20 Varian Associates, Inc. Apparatus for retaining wafers
US4817556A (en) 1987-05-04 1989-04-04 Varian Associates, Inc. Apparatus for retaining wafers
JPH01242989A (ja) * 1988-03-24 1989-09-27 Kazuya Hirose テーブルの縦横移動旋回機構
US4898639A (en) * 1989-04-14 1990-02-06 Bjorne Enterprises, Inc. Wafer retention device
JP2523177B2 (ja) * 1989-04-28 1996-08-07 日本写真印刷株式会社 位置決めテ―ブル
JPH0613222Y2 (ja) * 1989-07-31 1994-04-06 セントラル硝子株式会社 板ガラスの位置決め装置
US5192087A (en) 1990-10-02 1993-03-09 Nippon Steel Corporation Device for supporting a wafer
US5173029A (en) * 1991-07-16 1992-12-22 Toledo Automated Concepts, Inc. Glass sheet positioning device
JPH0590238A (ja) 1991-09-27 1993-04-09 Dainippon Screen Mfg Co Ltd 回転式基板処理装置の基板回転保持具
US5636960A (en) * 1992-07-29 1997-06-10 Tokyo Electron Limited Apparatus for detecting and aligning a substrate
JP3139155B2 (ja) * 1992-07-29 2001-02-26 東京エレクトロン株式会社 真空処理装置
JP3335983B2 (ja) 1993-02-26 2002-10-21 東京エレクトロン株式会社 Ｌｃｄ用ガラス基板の位置合わせ機構及び真空処理装置
US5378215A (en) 1993-05-14 1995-01-03 Harkins; Robert L. Rehabilitation apparatus for ambulatory patients
US5636980A (en) 1994-04-12 1997-06-10 Halliburton Company Burner apparatus
US5566466A (en) * 1994-07-01 1996-10-22 Ontrak Systems, Inc. Spindle assembly with improved wafer holder
US5538231A (en) * 1994-11-30 1996-07-23 Caterpillar Inc. Apparatus for locating a workpiece on a burn table
US5505438A (en) * 1994-11-30 1996-04-09 Caterpillar Inc. Work piece locating apparatus
US5579718A (en) 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
US5630269A (en) * 1995-06-19 1997-05-20 General Motors Corporation Method for fixturing abutted sheet metal parts for welding
US5853214A (en) 1995-11-27 1998-12-29 Progressive System Technologies, Inc. Aligner for a substrate carrier
JPH09213772A (ja) * 1996-01-30 1997-08-15 Dainippon Screen Mfg Co Ltd 基板保持装置
US5961107A (en) 1996-03-06 1999-10-05 Morghen; Manfred A. Workpiece indexing and clamping system
JPH09290890A (ja) 1996-04-25 1997-11-11 Nikon Corp 基板キャリア
US5775000A (en) 1996-05-13 1998-07-07 Ebara Corporation Substrate gripper device for spin drying
US5851041A (en) * 1996-06-26 1998-12-22 Ontrak Systems, Inc. Wafer holder with spindle assembly and wafer holder actuator
JP3831043B2 (ja) * 1997-01-24 2006-10-11 東京エレクトロン株式会社 回転処理装置
US6045620A (en) 1997-07-11 2000-04-04 Applied Materials, Inc. Two-piece slit valve insert for vacuum processing system
US5974681A (en) 1997-09-10 1999-11-02 Speedfam-Ipec Corp. Apparatus for spin drying a workpiece
JP2001510640A (ja) 1997-10-03 2001-07-31 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 半導体サブストレートのためのホルダ及びこのようなホルダを使用して半導体装置を製造する方法
US5897108A (en) 1998-01-26 1999-04-27 Gordon; Thomas A. Substrate support system
DE19829580A1 (de) 1998-07-02 2000-01-05 Bosch Gmbh Robert Vorrichtung zur mechanischen Ausrichtung eines Trägersubstrats für elektronische Schaltungen
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
US6167893B1 (en) 1999-02-09 2001-01-02 Novellus Systems, Inc. Dynamic chuck for semiconductor wafer or other substrate
US6163015A (en) 1999-07-21 2000-12-19 Moore Epitaxial, Inc. Substrate support element
US6262582B1 (en) 1999-10-15 2001-07-17 International Business Machines Corporation Mechanical fixture for holding electronic devices under test showing adjustments in multiple degrees of freedom
TW452917B (en) * 1999-10-29 2001-09-01 Winbond Electronics Corp Holder
US6544338B1 (en) * 2000-02-10 2003-04-08 Novellus Systems, Inc. Inverted hot plate cure module
US20020051697A1 (en) * 2000-07-08 2002-05-02 Ko Alexander Sou-Kang Removable gripper pads
US6612014B1 (en) * 2000-07-12 2003-09-02 Applied Materials, Inc. Dual post centrifugal wafer clip for spin rinse dry unit
US6485248B1 (en) * 2000-10-10 2002-11-26 Applied Materials, Inc. Multiple wafer lift apparatus and associated method
US6692219B2 (en) * 2000-11-29 2004-02-17 Tokyo Electron Limited Reduced edge contact wafer handling system and method of retrofitting and using same
US6485246B1 (en) * 2001-07-20 2002-11-26 New Holland North America, Inc. Apparatus for raising ramps on an implement transporter
US6652656B2 (en) * 2001-07-24 2003-11-25 Tokyo Electron Limited Semiconductor wafer holding assembly
KR100897431B1 (ko) * 2001-11-27 2009-05-14 도쿄엘렉트론가부시키가이샤 액처리장치 및 액처리방법
US6824343B2 (en) * 2002-02-22 2004-11-30 Applied Materials, Inc. Substrate support
GB2392309B (en) * 2002-08-22 2004-10-27 Leica Microsys Lithography Ltd Substrate loading and unloading apparatus
US7101253B2 (en) * 2002-08-27 2006-09-05 Applied Materials Inc. Load cup for chemical mechanical polishing
US7104535B2 (en) * 2003-02-20 2006-09-12 Applied Materials, Inc. Methods and apparatus for positioning a substrate relative to a support stage
US7151981B2 (en) * 2003-02-20 2006-12-19 Applied Materials, Inc. Methods and apparatus for positioning a substrate relative to a support stage

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