WO2008133149A1 - 支持部材およびキャリアと支持方法 - Google Patents

支持部材およびキャリアと支持方法 Download PDF

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Publication number
WO2008133149A1
WO2008133149A1 PCT/JP2008/057448 JP2008057448W WO2008133149A1 WO 2008133149 A1 WO2008133149 A1 WO 2008133149A1 JP 2008057448 W JP2008057448 W JP 2008057448W WO 2008133149 A1 WO2008133149 A1 WO 2008133149A1
Authority
WO
WIPO (PCT)
Prior art keywords
supporting member
supporting
carrier
substrate
main body
Prior art date
Application number
PCT/JP2008/057448
Other languages
English (en)
French (fr)
Inventor
Koji Ishino
Hajime Nakamura
Mayako Matsuda
Takaaki Shindou
Yukio Kikuchi
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to CN2008800129640A priority Critical patent/CN101663744B/zh
Priority to JP2009511832A priority patent/JP5186491B2/ja
Priority to KR1020097022034A priority patent/KR101246310B1/ko
Priority to US12/596,926 priority patent/US8550441B2/en
Publication of WO2008133149A1 publication Critical patent/WO2008133149A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49998—Work holding

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Buffer Packaging (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

　この支持部材およびキャリアと支持方法は、回動自在に取り付けられた支持部材本体を備え、支持部材本体は、回動中心軸から放射状に延設された複数の突起を備え、突起を基板の端部に当接させて基板を支持するため、基板のクラックの発生を防止することができ、また、支持部材本体を長寿命化することができる。
PCT/JP2008/057448 2007-04-23 2008-04-16 支持部材およびキャリアと支持方法 WO2008133149A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN2008800129640A CN101663744B (zh) 2007-04-23 2008-04-16 支撑部件以及托架和支撑方法
JP2009511832A JP5186491B2 (ja) 2007-04-23 2008-04-16 キャリアと支持方法
KR1020097022034A KR101246310B1 (ko) 2007-04-23 2008-04-16 지지부재 및 캐리어와 지지방법
US12/596,926 US8550441B2 (en) 2007-04-23 2008-04-16 Supporting member and carrier, and method of supporting

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-113226 2007-04-23
JP2007113226 2007-04-23

Publications (1)

Publication Number Publication Date
WO2008133149A1 true WO2008133149A1 (ja) 2008-11-06

Family

ID=39925605

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057448 WO2008133149A1 (ja) 2007-04-23 2008-04-16 支持部材およびキャリアと支持方法

Country Status (6)

Country Link
US (1) US8550441B2 (ja)
JP (2) JP5186491B2 (ja)
KR (1) KR101246310B1 (ja)
CN (1) CN101663744B (ja)
TW (1) TWI422520B (ja)
WO (1) WO2008133149A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010189093A (ja) * 2009-02-16 2010-09-02 Okamura Corp 吊り下げ搬送装置
JP2011108822A (ja) * 2009-11-17 2011-06-02 Nippon Electric Glass Co Ltd 基板フォルダ
WO2018225826A1 (ja) * 2017-06-08 2018-12-13 株式会社アルバック 基板ガイド、キャリア
WO2019146544A1 (ja) * 2018-01-25 2019-08-01 株式会社ブイ・テクノロジー 基板保持装置及び基板検査装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101669081B1 (ko) 2011-04-29 2016-10-25 주식회사 원익아이피에스 기판처리시스템 및 그에 사용되는 트레이
TWI476139B (zh) * 2011-06-30 2015-03-11 Sfa Engineering Corp 用於傳送基板的裝置
US10005625B2 (en) * 2013-10-29 2018-06-26 Sakai Display Products Corporation Plate support body and conveyance apparatus
JP6632469B2 (ja) 2016-05-24 2020-01-22 三菱電機株式会社 ウエハトレイ
CN107685972B (zh) * 2017-08-24 2020-01-24 京东方科技集团股份有限公司 传送装置
WO2019228610A1 (en) * 2018-05-29 2019-12-05 Applied Materials, Inc. Holder, carrier comprising at least two holders, apparatuses and methods
EP3989271B1 (en) * 2020-10-20 2024-06-05 Semsysco GmbH Clipping mechanism for fastening a substrate for a surface treatment of the substrate

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04271138A (ja) * 1990-11-28 1992-09-28 Mitsubishi Electric Corp 半導体ウエハ搬送体
JPH07231035A (ja) * 1994-02-15 1995-08-29 Yodogawa Kasei Kk 板体の支承部材およびそれを用いた板体支承用ホルダー
JPH11121596A (ja) * 1997-10-17 1999-04-30 Dainippon Screen Mfg Co Ltd 基板回転保持装置および回転式基板処理装置
JPH11238783A (ja) * 1998-02-20 1999-08-31 Dainippon Screen Mfg Co Ltd 基板処理装置および方法
JP2004315146A (ja) * 2003-04-15 2004-11-11 Wakomu Denso:Kk 基板搬送方法
JP2006114675A (ja) * 2004-10-14 2006-04-27 Ulvac Japan Ltd 真空処理装置

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US3175820A (en) * 1962-11-09 1965-03-30 Portage Machine Company Rotary table having trimetric adjustment features
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JPH04125222A (ja) 1990-09-17 1992-04-24 Kokusai Electric Co Ltd 真空装置用縦型トレイ搬送機構
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US6299153B1 (en) * 1999-07-26 2001-10-09 Discreet Industries Corporation Wafer latch with a ball bearing assembly
US6764272B1 (en) * 1999-05-27 2004-07-20 Micron Technology, Inc. Adjustable coarse alignment tooling for packaged semiconductor devices
WO2002005331A2 (en) * 2000-07-08 2002-01-17 Applied Materilas, Inc. Removable gripper pads
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US6682295B2 (en) * 2001-06-21 2004-01-27 Novellus Systems, Inc. Flatted object passive aligner
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JP4271138B2 (ja) * 2004-12-28 2009-06-03 本田技研工業株式会社 エンジンの振動除去装置
KR100583522B1 (ko) * 2005-01-05 2006-05-25 삼성에스디아이 주식회사 기판 고정 트레이, 이를 이용한 기판 정렬 시스템 및 그방법
JP2006191039A (ja) 2005-01-05 2006-07-20 Samsung Sdi Co Ltd トレイ移送装置
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04271138A (ja) * 1990-11-28 1992-09-28 Mitsubishi Electric Corp 半導体ウエハ搬送体
JPH07231035A (ja) * 1994-02-15 1995-08-29 Yodogawa Kasei Kk 板体の支承部材およびそれを用いた板体支承用ホルダー
JPH11121596A (ja) * 1997-10-17 1999-04-30 Dainippon Screen Mfg Co Ltd 基板回転保持装置および回転式基板処理装置
JPH11238783A (ja) * 1998-02-20 1999-08-31 Dainippon Screen Mfg Co Ltd 基板処理装置および方法
JP2004315146A (ja) * 2003-04-15 2004-11-11 Wakomu Denso:Kk 基板搬送方法
JP2006114675A (ja) * 2004-10-14 2006-04-27 Ulvac Japan Ltd 真空処理装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010189093A (ja) * 2009-02-16 2010-09-02 Okamura Corp 吊り下げ搬送装置
JP2011108822A (ja) * 2009-11-17 2011-06-02 Nippon Electric Glass Co Ltd 基板フォルダ
WO2018225826A1 (ja) * 2017-06-08 2018-12-13 株式会社アルバック 基板ガイド、キャリア
US11505861B2 (en) 2017-06-08 2022-11-22 Ulvac, Inc. Substrate guide and carrier
WO2019146544A1 (ja) * 2018-01-25 2019-08-01 株式会社ブイ・テクノロジー 基板保持装置及び基板検査装置
TWI803557B (zh) * 2018-01-25 2023-06-01 日商Ｖ科技股份有限公司 基板保持裝置及基板檢查裝置

Also Published As

Publication number Publication date
JP2012256894A (ja) 2012-12-27
CN101663744B (zh) 2012-08-15
US20100117280A1 (en) 2010-05-13
CN101663744A (zh) 2010-03-03
KR101246310B1 (ko) 2013-03-21
JP5572674B2 (ja) 2014-08-13
JP5186491B2 (ja) 2013-04-17
TW200906692A (en) 2009-02-16
TWI422520B (zh) 2014-01-11
US8550441B2 (en) 2013-10-08
KR20090133118A (ko) 2009-12-31
JPWO2008133149A1 (ja) 2010-07-22

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