JP2005203672A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
- H01L21/76811—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving multiple stacked pre-patterned masks
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- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04C—STRUCTURAL ELEMENTS; BUILDING MATERIALS
- E04C5/00—Reinforcing elements, e.g. for concrete; Auxiliary elements therefor
- E04C5/16—Auxiliary parts for reinforcements, e.g. connectors, spacers, stirrups
- E04C5/162—Connectors or means for connecting parts for reinforcements
- E04C5/163—Connectors or means for connecting parts for reinforcements the reinforcements running in one single direction
- E04C5/165—Coaxial connection by means of sleeves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76804—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics by forming tapered via holes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
- H01L21/76813—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving a partial via etch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76835—Combinations of two or more different dielectric layers having a low dielectric constant
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
Abstract
【解決手段】第1配線16が形成された基板上に第1、第2絶縁膜18、19を形成する工程と、その上に第1〜第3マスク層21〜23を順に形成する工程と、第3マスク層23に配線溝パターン24を形成する工程と、配線溝パターン24の内側にはみ出して形成される第3マスク層23を選択的にテーパー形状に加工する工程と、第2、第1マスク層22、21に接続孔パターン26を形成するとともに、第3マスク層23のテーパー形状部分を除去する工程と、第3マスク層23を用いたエッチングにより第2絶縁膜19に配線溝33を形成するとともに、第2、第1マスク層22、21を用いたエッチングにより絶縁膜に接続孔31を形成する工程とを備えている。
【選択図】図1
Description
Claims (12)
- 第1配線が形成された基板上に第1絶縁膜と第2絶縁膜とを積層して絶縁膜を形成する工程と、
前記絶縁膜上に第1マスク層、第2マスク層および第3マスク層を順に積層して形成する工程と、
前記第3マスク層に配線溝を加工するための配線溝パターンを形成する工程と、
前記配線溝パターンの内側にはみ出して形成される前記第3マスク層を選択的にテーパー形状に加工する工程と、
前記第2マスク層および第1マスク層に接続孔を形成するための接続孔パターンを形成するとともに、前記第3マスク層のテーパー形状部分を除去する工程と、
前記第3マスク層をエッチングマスクに用いたエッチングにより前記第2マスク層および前記第1マスク層に配線溝パターンを形成し、前記第2絶縁膜に配線溝を形成するとともに、前記第2マスク層および前記第1マスク層をエッチングマスクに用いたエッチングにより前記絶縁膜に接続孔を形成する工程と
を備えたことを特徴とした半導体装置の製造方法。 - 前記第1、第2、第3マスク層は、上層のマスク層を用いて前記上層のマスク層直下のマスク層を選択的にエッチング加工できる材料から成る
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記第3マスク層をテーパー形状に加工する工程は、
加工テーパー角が30°以上80°以下となるように加工する
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 前記第1絶縁膜は炭素含有酸化シリコン膜で形成し、
前記第2絶縁膜は有機膜で形成する
ことを特徴とする請求項1記載の半導体装置の製造方法。 - 第1配線が形成された基板上に第1絶縁膜と第2絶縁膜とを積層して絶縁膜を形成する工程と、
前記絶縁膜上に第1マスク層、第2マスク層および第3マスク層を順に積層して形成する工程と、
前記第3マスク層に配線溝を加工するための配線溝パターンを形成する工程と、
前記第2マスク層および第1マスク層に接続孔を形成するための接続孔パターンを形成するとともに、前記配線溝の内側にはみ出して形成される前記第2マスク層を選択的にテーパー形状に加工する工程と、
前記第3マスク層をエッチングマスクに用いたエッチングにより前記第2マスク層および前記第1マスク層に配線溝パターンを形成し、前記第2絶縁膜に配線溝を形成するとともに、前記第2マスク層および前記第1マスク層をエッチングマスクに用いたエッチングにより前記絶縁膜に接続孔を形成する工程と
を備えたことを特徴とした半導体装置の製造方法。 - 前記第1、第2、第3マスク層は、上層のマスク層を用いて前記上層のマスク層直下のマスク層を選択的にエッチング加工できる材料から成る
ことを特徴とする請求項5記載の半導体装置の製造方法。 - 前記第2マスク層をテーパー形状に加工する工程は、
加工テーパー角が30°以上80°以下となるように加工する
ことを特徴とする請求項5記載の半導体装置の製造方法。 - 前記第1絶縁膜は炭素含有酸化シリコン膜で形成し、
前記第2絶縁膜は有機膜で形成する
ことを特徴とする請求項5記載の半導体装置の製造方法。 - 第1配線が形成された基板上に第1絶縁膜と第2絶縁膜とを積層して絶縁膜を形成する工程と、
前記絶縁膜上に第1マスク層および第2マスク層を順に積層して形成する工程と、
前記第2マスク層に配線溝を加工するための配線溝パターンを形成する工程と、
接続孔を形成するための接続孔パターンを形成したレジストマスクを用いて前記第2マスク層および第1マスク層に接続孔パターンを形成するとともに、前記レジストマスクの接続孔パターンの内側にはみ出して形成されている前記第2マスク層を選択的にテーパー形状に加工する工程と、
前記第2マスク層をエッチングマスクに用いたエッチングにより前記第1マスク層に配線溝パターンを形成し、前記第2絶縁膜に配線溝を形成するとともに、前記第1マスク層をエッチングマスクに用いたエッチングにより前記絶縁膜に接続孔を形成する工程と
を備えたことを特徴とした半導体装置の製造方法。 - 前記第1、第2マスク層は、前記第2マスク層を用いて前記第1マスク層を選択的にエッチング加工できる材料から成る
ことを特徴とする請求項9記載の半導体装置の製造方法。 - 前記第2マスク層をテーパー形状に加工する工程は、
加工テーパー角が30°以上80°以下となるように加工する
ことを特徴とする請求項9記載の半導体装置の製造方法。 - 前記第1絶縁膜は炭素含有酸化シリコン膜で形成し、
前記第2絶縁膜は有機膜で形成する
ことを特徴とする請求項9記載の半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004010362A JP2005203672A (ja) | 2004-01-19 | 2004-01-19 | 半導体装置の製造方法 |
TW093141171A TWI253145B (en) | 2004-01-19 | 2004-12-29 | Semiconductor device manufacturing method |
US11/032,015 US7259089B2 (en) | 2004-01-19 | 2005-01-11 | Semiconductor device manufacturing method that includes forming a wiring pattern with a mask layer that has a tapered shape |
KR1020050002971A KR20050076614A (ko) | 2004-01-19 | 2005-01-12 | 반도체 장치 제조 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004010362A JP2005203672A (ja) | 2004-01-19 | 2004-01-19 | 半導体装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
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JP2005203672A true JP2005203672A (ja) | 2005-07-28 |
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Application Number | Title | Priority Date | Filing Date |
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JP2004010362A Pending JP2005203672A (ja) | 2004-01-19 | 2004-01-19 | 半導体装置の製造方法 |
Country Status (4)
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US (1) | US7259089B2 (ja) |
JP (1) | JP2005203672A (ja) |
KR (1) | KR20050076614A (ja) |
TW (1) | TWI253145B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007078011A1 (ja) * | 2006-01-06 | 2007-07-12 | Nec Corporation | 多層配線の製造方法と多層配線構造 |
WO2011018857A1 (ja) * | 2009-08-14 | 2011-02-17 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
JP2014056991A (ja) * | 2012-09-13 | 2014-03-27 | Fujitsu Semiconductor Ltd | 半導体装置の製造方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6965165B2 (en) | 1998-12-21 | 2005-11-15 | Mou-Shiung Lin | Top layers of metal for high performance IC's |
JP4237216B2 (ja) * | 2006-10-05 | 2009-03-11 | Necエレクトロニクス株式会社 | 半導体装置の製造方法 |
US7846849B2 (en) * | 2007-06-01 | 2010-12-07 | Applied Materials, Inc. | Frequency tripling using spacer mask having interposed regions |
JP4815519B2 (ja) * | 2009-09-14 | 2011-11-16 | 東京エレクトロン株式会社 | マスクパターンの形成方法及び半導体装置の製造方法 |
JP5142236B1 (ja) * | 2011-11-15 | 2013-02-13 | エルシード株式会社 | エッチング方法 |
JP2018049920A (ja) * | 2016-09-21 | 2018-03-29 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
KR102440139B1 (ko) | 2017-12-15 | 2022-09-06 | 삼성전자주식회사 | 반도체 소자 |
US10699943B2 (en) * | 2018-04-30 | 2020-06-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming contacts in a semiconductor device |
US10867842B2 (en) * | 2018-10-31 | 2020-12-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for shrinking openings in forming integrated circuits |
CN116469831A (zh) * | 2022-01-12 | 2023-07-21 | 长鑫存储技术有限公司 | 半导体结构及其制备方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6069068A (en) | 1997-05-30 | 2000-05-30 | International Business Machines Corporation | Sub-quarter-micron copper interconnections with improved electromigration resistance and reduced defect sensitivity |
JP3501280B2 (ja) | 1998-08-31 | 2004-03-02 | 富士通株式会社 | 半導体装置の製造方法 |
JP3436221B2 (ja) | 1999-03-15 | 2003-08-11 | ソニー株式会社 | 半導体装置の製造方法 |
JP2001077196A (ja) | 1999-09-08 | 2001-03-23 | Sony Corp | 半導体装置の製造方法 |
JP2001156170A (ja) | 1999-11-30 | 2001-06-08 | Sony Corp | 多層配線の製造方法 |
JP3669681B2 (ja) * | 2000-03-31 | 2005-07-13 | 株式会社東芝 | 半導体装置の製造方法 |
JP2001338978A (ja) * | 2000-05-25 | 2001-12-07 | Hitachi Ltd | 半導体装置及びその製造方法 |
JP4850332B2 (ja) | 2000-10-18 | 2012-01-11 | 東京エレクトロン株式会社 | デュアルダマシン構造のエッチング方法 |
US6514867B1 (en) * | 2001-03-26 | 2003-02-04 | Advanced Micro Devices, Inc. | Method of creating narrow trench lines using hard mask |
JP2003297920A (ja) | 2002-04-03 | 2003-10-17 | Nec Corp | 半導体装置の製造方法 |
JP2003303824A (ja) | 2002-04-12 | 2003-10-24 | Sony Corp | 半導体装置の製造方法 |
US6743712B2 (en) * | 2002-07-12 | 2004-06-01 | Intel Corporation | Method of making a semiconductor device by forming a masking layer with a tapered etch profile |
JP4193438B2 (ja) * | 2002-07-30 | 2008-12-10 | ソニー株式会社 | 半導体装置の製造方法 |
-
2004
- 2004-01-19 JP JP2004010362A patent/JP2005203672A/ja active Pending
- 2004-12-29 TW TW093141171A patent/TWI253145B/zh not_active IP Right Cessation
-
2005
- 2005-01-11 US US11/032,015 patent/US7259089B2/en not_active Expired - Fee Related
- 2005-01-12 KR KR1020050002971A patent/KR20050076614A/ko not_active Application Discontinuation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007078011A1 (ja) * | 2006-01-06 | 2007-07-12 | Nec Corporation | 多層配線の製造方法と多層配線構造 |
WO2011018857A1 (ja) * | 2009-08-14 | 2011-02-17 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
US8703606B2 (en) | 2009-08-14 | 2014-04-22 | Fujitsu Semiconductor Limited | Method for manufacturing semiconductor device having a wiring structure |
JP5488603B2 (ja) * | 2009-08-14 | 2014-05-14 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
JP2014056991A (ja) * | 2012-09-13 | 2014-03-27 | Fujitsu Semiconductor Ltd | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US7259089B2 (en) | 2007-08-21 |
US20050158982A1 (en) | 2005-07-21 |
KR20050076614A (ko) | 2005-07-26 |
TW200529366A (en) | 2005-09-01 |
TWI253145B (en) | 2006-04-11 |
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