JP2006165214A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
- Publication number
- JP2006165214A JP2006165214A JP2004353533A JP2004353533A JP2006165214A JP 2006165214 A JP2006165214 A JP 2006165214A JP 2004353533 A JP2004353533 A JP 2004353533A JP 2004353533 A JP2004353533 A JP 2004353533A JP 2006165214 A JP2006165214 A JP 2006165214A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- mask
- film
- wiring
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title claims description 51
- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 230000008569 process Effects 0.000 title description 20
- 238000005530 etching Methods 0.000 claims abstract description 116
- 239000010410 layer Substances 0.000 claims description 150
- 238000005498 polishing Methods 0.000 claims description 78
- 239000011229 interlayer Substances 0.000 claims description 66
- 239000000463 material Substances 0.000 claims description 63
- 230000015572 biosynthetic process Effects 0.000 claims description 56
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 41
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 34
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 11
- 238000000059 patterning Methods 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims 1
- 238000009413 insulation Methods 0.000 abstract description 12
- 238000001465 metallisation Methods 0.000 abstract 1
- 230000004888 barrier function Effects 0.000 description 35
- 239000010949 copper Substances 0.000 description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 24
- 229910052802 copper Inorganic materials 0.000 description 24
- 239000007789 gas Substances 0.000 description 24
- 229920000090 poly(aryl ether) Polymers 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 239000007788 liquid Substances 0.000 description 12
- 239000000126 substance Substances 0.000 description 11
- 230000009977 dual effect Effects 0.000 description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 8
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000002243 precursor Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 239000007800 oxidant agent Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910052715 tantalum Inorganic materials 0.000 description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 5
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 4
- 229910003481 amorphous carbon Inorganic materials 0.000 description 4
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 230000001771 impaired effect Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 229910002090 carbon oxide Inorganic materials 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000001029 thermal curing Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 2
- 239000004341 Octafluorocyclobutane Substances 0.000 description 2
- 229920005830 Polyurethane Foam Polymers 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 235000013842 nitrous oxide Nutrition 0.000 description 2
- 229960001730 nitrous oxide Drugs 0.000 description 2
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 2
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920003209 poly(hydridosilsesquioxane) Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000011496 polyurethane foam Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
- H01L21/76811—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving multiple stacked pre-patterned masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
- H01L21/76813—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving a partial via etch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76832—Multiple layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76835—Combinations of two or more different dielectric layers having a low dielectric constant
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
- H01L23/53238—Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
【解決手段】第1絶縁膜11と、第2絶縁膜12と、第3絶縁膜13とが積層され、前記積層された絶縁膜に形成された第1配線溝17内に第1配線21が形成される半導体装置であって、前記第1絶縁膜11は前記積層した絶縁膜中で最も誘電率の低い膜からなり、前記第3絶縁膜13は研磨ストッパーであり、前記第2絶縁膜12はエッチングストッパである。
【選択図】図1
Description
Claims (12)
- 第1絶縁膜と、第2絶縁膜と、第3絶縁膜とが積層され、前記積層された絶縁膜に形成された配線溝内に配線が形成される半導体装置であって、
前記第1絶縁膜は前記積層した絶縁膜中で最も誘電率の低い膜からなり、
前記第3絶縁膜は研磨ストッパーであり、
前記第2絶縁膜はエッチングストッパである
ことを特徴とする半導体装置。 - 前記第3絶縁膜は、3nm以上20nm以下の膜厚を有する
ことを特徴とする請求項1記載の半導体装置。 - 前記第3絶縁膜は、酸化シリコンの研磨に対して研磨選択比が取れる材料からなる
ことを特徴とする請求項1記載の半導体装置。 - 前記第3絶縁膜は、炭化シリコン系材料からなる
ことを特徴とする請求項2記載の半導体装置。 - 前記第2絶縁膜は、前記第3絶縁膜のエッチングに対してエッチング選択比が採れる材料からなり、かつ前記第3絶縁膜より誘電率が低い材料からなる
ことを特徴とする請求項1記載の半導体装置。 - 第1絶縁膜と、第2絶縁膜と、第3絶縁膜とを積層し、前記積層した絶縁膜に形成された配線溝内に配線を形成する半導体装置の製造方法であって、
前記第1絶縁膜は前記積層した絶縁膜中で最も誘電率の低い膜で形成し、
前記第3絶縁膜は前記配線を形成する際の研磨ストッパーとなり、
前記第2絶縁膜は前記配線上に接続される接続孔を形成する際のエッチングストッパとなる
ことを特徴とする半導体装置の製造方法。 - 前記第3絶縁膜は、3nm以上20nm以下の膜厚を有する
ことを特徴とする請求項6記載の半導体装置の製造方法。 - 前記第3絶縁膜は、酸化シリコンの研磨に対して研磨選択比が取れる材料からなる
ことを特徴とする請求項6記載の半導体装置の製造方法。 - 前記第3絶縁膜は、炭化シリコン系材料からなる
ことを特徴とする請求項8記載の半導体装置の製造方法。 - 前記第2絶縁膜は、前記第3絶縁膜のエッチングに対してエッチング選択比が採れる材料からなり、
前記第3絶縁膜より誘電率が低い材料からなる
ことを特徴とする請求項6記載の半導体装置の製造方法。 - 有機絶縁膜を含む層間絶縁膜を備えた半導体装置の製造方法において、
基板上に、第1配線層間の絶縁膜となるもので有機系絶縁材料からなる第1絶縁膜と、SiOC系材料からなる第2絶縁膜と、SiC系材料からなる第3絶縁膜と、SiO2系材料からなる第4絶縁膜とを順次成膜する工程と、
前記第4絶縁膜上に第1配線溝パターンを有するレジストマスクを形成する工程と、
前記レジストマスクをエッチングマスクとして前記第4絶縁膜、前記第3絶縁膜、前記第2絶縁膜、および前記第1絶縁膜をエッチングする工程と
を有することを特徴とする請求項6記載の半導体装置の製造方法。 - 有機絶縁膜を含む層間絶縁膜を備えた半導体装置の製造方法において、
基板上に、接続孔を貫通させる絶縁膜となるものでSiOC系材料からなる第1絶縁膜と、配線が形成される絶縁膜となるもので有機系絶縁材料からなる第2絶縁膜とを順次成膜する工程と、
前記第2絶縁膜上に、SiOC系材料からなる第1マスク形成層と、前記第1マスク層とは異なるSiC系材料からなる第2マスク形成層と、前記第2マスク形成層とは異なるSiO2系材料からなる第3マスク形成層と、前記第3マスク形成層とは異なるSiN系材料からなる第4マスク形成層と、前記第4マスク形成層とは異なるSiO2系材料からなる第5マスク形成層とを順次成膜する工程と、
前記第5マスク形成層をパターニングして配線溝パターンを形成することで第5マスクを形成する工程と、
前記第5マスク上を含む前記第4マスク形成層上に接続孔パターンを有するレジストマスクを形成する工程と、
前記レジストマスクをエッチングマスクとして前記第5マスク形成層から前記第1マスク形成層までと前記第2絶縁膜とをエッチングして接続孔を開口する工程と、
前記第5マスクをエッチングマスクとして前記第4マスク形成層をエッチングして配線溝パターンを有する第4マスクを形成するとともに、前記第1絶縁膜を途中までエッチングして接続孔を延長形成する工程と、
前記第4マスクをエッチングマスクとして、前記第3マスク形成層から前記第1マスク形成層までをエッチングして配線溝パターンを有する第3マスクと第2マスクと第1マスクとを形成するとともに、前記接続孔の底部に残存する前記第1絶縁膜をエッチングして前記基板に達する接続孔を開口する工程と、
前記第3マスクをエッチングマスクとして前記第2絶縁膜をエッチングして前記第2絶縁膜に配線溝を形成する工程と、
前記配線溝を形成した後に残存する前記第3マスクを除去する工程と
を有することを特徴とする半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004353533A JP2006165214A (ja) | 2004-12-07 | 2004-12-07 | 半導体装置およびその製造方法 |
US11/287,136 US20060157851A1 (en) | 2004-12-07 | 2005-11-22 | Semiconductor device and method for manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004353533A JP2006165214A (ja) | 2004-12-07 | 2004-12-07 | 半導体装置およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006165214A true JP2006165214A (ja) | 2006-06-22 |
Family
ID=36666889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004353533A Pending JP2006165214A (ja) | 2004-12-07 | 2004-12-07 | 半導体装置およびその製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20060157851A1 (ja) |
JP (1) | JP2006165214A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070139855A1 (en) * | 2005-12-21 | 2007-06-21 | Asml Netherlands B.V. | Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus |
KR20130107628A (ko) * | 2012-03-22 | 2013-10-02 | 삼성디스플레이 주식회사 | 트렌치 형성 방법, 금속 배선 형성 방법, 및 박막 트랜지스터 표시판의 제조 방법 |
US9659857B2 (en) | 2013-12-13 | 2017-05-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and method making the same |
US9793169B1 (en) * | 2016-06-07 | 2017-10-17 | Globalfoundries Inc. | Methods for forming mask layers using a flowable carbon-containing silicon dioxide material |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4076131B2 (ja) * | 2002-06-07 | 2008-04-16 | 富士通株式会社 | 半導体装置の製造方法 |
-
2004
- 2004-12-07 JP JP2004353533A patent/JP2006165214A/ja active Pending
-
2005
- 2005-11-22 US US11/287,136 patent/US20060157851A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20060157851A1 (en) | 2006-07-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7304386B2 (en) | Semiconductor device having a multilayer wiring structure | |
KR101093915B1 (ko) | 반도체 장치의 제조 방법 | |
US7871923B2 (en) | Self-aligned air-gap in interconnect structures | |
US7259089B2 (en) | Semiconductor device manufacturing method that includes forming a wiring pattern with a mask layer that has a tapered shape | |
JP4193438B2 (ja) | 半導体装置の製造方法 | |
JP2012235124A (ja) | 半導体装置の製造方法 | |
US20140239501A1 (en) | Integrated circuit interconnects and methods of making same | |
WO2007091574A1 (ja) | 多層配線構造および多層配線の製造方法 | |
JP2006253645A (ja) | 半導体装置の製造方法および半導体装置 | |
JP2004055781A (ja) | 半導体装置の製造方法 | |
US6900123B2 (en) | BARC etch comprising a selective etch chemistry and a high polymerizing gas for CD control | |
JP5047504B2 (ja) | ビアキャッピング保護膜を使用する半導体素子のデュアルダマシン配線の製造方法 | |
JP4523351B2 (ja) | 半導体装置の製造方法 | |
US20020142582A1 (en) | Method for forming copper lines for semiconductor devices | |
US20060157851A1 (en) | Semiconductor device and method for manufacturing the same | |
JP2004165434A (ja) | 半導体装置の製造方法 | |
JP2005340601A (ja) | 半導体装置の製造方法及び半導体装置 | |
JP2005353633A (ja) | 半導体装置の製造方法および半導体装置 | |
JP2005217223A (ja) | 半導体装置の製造方法 | |
KR101138082B1 (ko) | 반도체 소자의 듀얼 다마신 패턴 형성방법 | |
KR100512051B1 (ko) | 반도체 소자의 금속 배선 형성 방법 | |
JP2006332408A (ja) | 半導体装置の製造方法 | |
JP2005203429A (ja) | 半導体装置の製造方法 | |
JP2006294965A (ja) | 半導体装置の製造方法 | |
JP2006073907A (ja) | 半導体装置の製造方法および半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080229 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080318 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080516 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080610 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20081014 |