JP2005191172A - 半導体集積回路装置 - Google Patents
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Abstract
【解決手段】 複数のDRAMチップが積層されたCOC DRAM6を、インタポーザ7を用いてマザーボード5に実装する。インタポーザは、Si部10とPCB部11とを含む。Si部はSi基板と配線が形成された絶縁層部とを有し、PCB部はSi部に形成された信号配線のためのレファレンスプレーンを有する。チップセットとCOC DRAM6との間の配線トポロジーは、全信号に関して同一とする。
【選択図】 図1
Description
残りの行に属する組は、各列毎に、互いに隣り合う組とポイント・トゥ・ポイント接続されていることを特徴とする半導体集積回路装置が得られる。
2a,2b,92,94−1,94−2 バッファ
3a,3b,6−1,6−2,70,91−1,91−2 DRAMチップ
4,102,103,143,230,240 チップセット
5,142,233 マザーボード
6,6a,6b,140,140a,140b,231,241d COC DRAM
7a,7b,141,141a,141b,264 インタポーザ
8,8a,8b Si基板部
9,9a,9b,31 絶縁層部
10,10a,10b、30 Si(シリコン)部
11,11a,11b,191a,191b PCB部
12,12a,12b,90,256 I/F LSI
14a,14b,100a,100b,144a,144a1,144a8,144b,144b1,144b8,193a,193a1,193a8,193b,193b1,193b8,234a,234a1,234a2,234b,234c,234d,234d1,234d2,244a,244a1,244a2,244b,244c,244d,244d1,244d2 DRAM積層体
15a,15b,34,42,45,150,151 配線
16,16a,16b,38 GNDレファレンスプレーン
17,17a,17b,17−1,17−1a,17−2,17−2a,22,26,33,35,37,43,48,52,53,56,76,85,86,246a,252,258,259,262,263 貫通電極
20,24,40,44,46,50,54,59,75,77,160,161,162,163 半田ボール
21,25,41,47,51,55,60 ビア
23 論理回路
32,36 フリップチップ電極
49 GNDレファレンス線
57 VDDプレーン
58 VDD線
71 メモリセルアレイ
72 周辺回路領域
73 チップ周辺領域
78 カップリングコンデンサ
80 小型高周波コネクタ
85、86 信号群
93−1,93−2 CLK分配回路
95−1,95−2 フリップフロップ群
130 端子
190,190a,190b,232,242 Siインタポーザ兼I/F LSI
250 支持体
251 接着物
253−1,253−2,253−3,253−4 DRAMコア
254 貫通電極端子
257 フリップチップ接続端子
260 貫通電極端子
Claims (21)
- チップセットが搭載されたマザーボードと、当該マザーボードに実装され、かつ前記チップセットに接続されるメモリ部とを備える半導体集積回路装置において、
前記メモリ部として複数のDRAMチップを互いに積層した積層DRAMを用い、
前記積層DRAMを前記マザーボードに実装するためにインタポーザを用いる、
ことを特徴とする半導体集積回路装置。 - 請求項1に記載の半導体集積回路装置において、
前記インタポーザが前記積層DRAMと前記チップセットとを電気的に接続する配線を含むシリコン部を有し、
前記配線に対して電位基準を与えるレファレンスプレーンが、前記シリコン部よりも前記マザーボード寄りに形成されていることを特徴とする半導体集積回路装置。 - 請求項2に記載の半導体集積回路装置において、
前記積層DRAMと前記インタポーザとの間に前記積層DRAMと前記チップセットとの間の信号授受を仲介するインタフェースLSIをさらに備え、
該インタフェースLSIと前記チップセットとが、前記インタポーザ及び前記マザーボードを介してポイント・トゥ・ポイント接続されていることを特徴とする半導体集積回路装置。 - 請求項3に記載の半導体集積回路装置において、
前記積層DRAM、前記インタフェースLSI及び前記インタポーザからなる組を複数備え、
互いに隣接する組同士が前記マザーボードを介してポイント・トゥ・ポイント接続されていることを特徴とする半導体集積回路装置。 - 請求項2に記載の半導体集積回路装置において、
前記インタポーザが前記シリコン部の下側に設けられた当該シリコン部と実質上同じサイズの印刷回路基板を有し、当該印刷回路基板に前記レファレンスプレーンが設けられていることを特徴とする半導体集積回路装置。 - 請求項5に記載の半導体集積回路装置において、
前記印刷回路基板と前記マザーボードとが同軸タイプのコネクタで接続されていることを特徴とする半導体集積回路装置。 - 請求項3に記載の半導体集積回路装置において、
前記インタフェースLSIが貫通電極を有し、かつフェースアップであることを特徴とする半導体集積回路装置。 - 請求項3記載の半導体集積回路装置において、
前記積層DRAMに必要とされる共通論理回路を前記インタフェースLSIに設けたことを特徴とする半導体集積回路装置。 - 請求項2に記載の半導体集積回路装置において、
前記積層DRAMと前記インタポーザとの組を複数備え、
これら複数の組が前記チップセットにポイント・トゥ・ポイント接続又は共通接続されていることを特徴とする半導体集積回路装置。 - 請求項9に記載の半導体集積回路装置において、
前記積層DRAMと前記チップセットとの間で授受される信号の前記インタポーザが備える入出力端子への割り振りを、同一属性の信号毎に、前記積層DRAMの中心軸を中心とする同心円状に行うようにしたことを特徴とする半導体集積回路装置。 - 請求項2に記載の半導体集積回路装置において、
前記積層DRAM及び前記インタポーザからなる組を複数備え、
これら複数の組が前記チップセットにフライ・バイ接続されるように、コマンドアドレス信号用メインバスとデータ信号用メインバスとが、各組の直下で直交するよう前記マザーボードに設けられ、
前記コマンドアドレス信号用メインバス及びデータ信号用メインバスのそれぞれから各組の前記積層DRAMまでのスタブ長が2mm以下にされている、
ことを特徴とする半導体集積回路装置。 - 請求項1に記載の半導体集積回路装置において、
前記インタポーザが、前記集積DRAMと前記チップセットとの間の信号の授受を仲介するSiインタポーザ兼インタフェースLSIであることを特徴とする半導体集積回路装置。 - 請求項12に記載の半導体集積回路装置において、
前記積層DRAM及び前記Siインタポーザ兼インタフェースLSIからなる組を複数備え、
これら複数の組が行列配置され、前記チップセットにフライ・バイ接続されるように、コマンドアドレス信号用メインバスとデータ信号用メインバスとが、各組が搭載される領域において直交するよう前記マザーボードに格子状に設けられている、
ことを特徴とする半導体集積回路装置。 - 請求項12に記載の半導体集積回路装置において、
前記積層DRAM及び前記Siインタポーザ兼インタフェースLSIからなる組を複数備え、
これら複数の組が行列配置され、前記チップセットにフライ・バイ接続されるように、コマンドアドレス信号用メインバスとデータ信号用メインバスとが、各組の直下で平行となるよう前記マザーボードに平行に設けられている、
ことを特徴とする半導体集積回路装置。 - 請求項12に記載の半導体集積回路装置において、
前記積層DRAM及び前記Siインタポーザ兼インタフェースLSIからなる組を複数備え、
これら複数の組が行列配置され、前記チップセットにもっとも近い行に属する組はそれぞれ前記チップセットにポイント・トゥ・ポイント接続され、
残りの行に属する組は、各列毎に、互いに隣り合う組とポイント・トゥ・ポイント接続されている、
ことを特徴とする半導体集積回路装置。 - 請求項12乃至15のいずれか一つに記載の半導体集積回路装置において、
積層DRAMとSiインタポーザ兼インタフェースLSIの平面サイズが実質上同一である、
ことを特徴とする半導体集積回路装置。 - 請求項12から16のいずれか一つに記載の半導体集積回路装置において、
Siインタポーザ兼インタフェースLSIが貫通電極を備えていない、
ことを特徴とする半導体集積回路装置。 - 請求項17に記載の半導体集積回路装置において、
複数のDRAMチップを積層して前記積層DRAMを作成する際に、前記Siインタポーザ兼インタフェースLSIを支持体として利用するようにした、
ことを特徴とする半導体集積回路装置。 - 請求項1乃至18のいずれかに記載の半導体集積回路装置において、
前記積層DRAMが貫通電極を有し、当該貫通電極が前記複数のDRAMチップにおける周辺回路領域に設けられていることを特徴とする半導体集積回路装置。 - 請求項3,4,7,8,及び12乃至18のいずれかに記載の半導体集積回路装置において、
前記インタフェースLSI又は前記Siインタポーザ兼インタフェースLSIと前記積層DRAMとの間の接続が無終端接続により行われている、
ことを特徴とする半導体集積回路装置。 - 請求項1乃至16のいずれか一つに記載の半導体集積回路装置において、前記インタポーザの上面に電源線と接地線との間に接続されたデカップリングコンデンサを備える、
ことを特徴とする半導体集積回路装置。
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JP2003428888A JP3896112B2 (ja) | 2003-12-25 | 2003-12-25 | 半導体集積回路装置 |
US11/019,553 US7385281B2 (en) | 2003-12-25 | 2004-12-23 | Semiconductor integrated circuit device |
DE102004062194A DE102004062194A1 (de) | 2003-12-25 | 2004-12-23 | Integrierte Halbleiterschaltungs-Vorrichtung |
CN200810170330.XA CN101419966A (zh) | 2003-12-25 | 2004-12-24 | 半导体集成电路装置 |
CNB2004100615407A CN100442503C (zh) | 2003-12-25 | 2004-12-24 | 半导体集成电路装置 |
US12/113,414 US8064222B2 (en) | 2003-12-25 | 2008-05-01 | Semiconductor integrated circuit device |
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US8064222B2 (en) | 2011-11-22 |
US7385281B2 (en) | 2008-06-10 |
JP3896112B2 (ja) | 2007-03-22 |
US20080203554A1 (en) | 2008-08-28 |
US20050139977A1 (en) | 2005-06-30 |
CN101419966A (zh) | 2009-04-29 |
DE102004062194A1 (de) | 2005-08-11 |
CN100442503C (zh) | 2008-12-10 |
CN1638121A (zh) | 2005-07-13 |
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