JP2005183661A5 - - Google Patents
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- Publication number
- JP2005183661A5 JP2005183661A5 JP2003422108A JP2003422108A JP2005183661A5 JP 2005183661 A5 JP2005183661 A5 JP 2005183661A5 JP 2003422108 A JP2003422108 A JP 2003422108A JP 2003422108 A JP2003422108 A JP 2003422108A JP 2005183661 A5 JP2005183661 A5 JP 2005183661A5
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- JP
- Japan
- Prior art keywords
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- semiconductor device
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000004065 semiconductor Substances 0.000 claims 34
- 238000009792 diffusion process Methods 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 10
- 238000000926 separation method Methods 0.000 claims 2
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003422108A JP4170210B2 (ja) | 2003-12-19 | 2003-12-19 | 半導体装置 |
| EP04029737A EP1544918A3 (en) | 2003-12-19 | 2004-12-15 | Semiconductor device with ESD element |
| CNB2004101019088A CN100505240C (zh) | 2003-12-19 | 2004-12-20 | 半导体器件 |
| US11/014,702 US7183612B2 (en) | 2003-12-19 | 2004-12-20 | Semiconductor device having an electrostatic discharge protecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003422108A JP4170210B2 (ja) | 2003-12-19 | 2003-12-19 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005183661A JP2005183661A (ja) | 2005-07-07 |
| JP2005183661A5 true JP2005183661A5 (enExample) | 2005-11-24 |
| JP4170210B2 JP4170210B2 (ja) | 2008-10-22 |
Family
ID=34510681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003422108A Expired - Fee Related JP4170210B2 (ja) | 2003-12-19 | 2003-12-19 | 半導体装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7183612B2 (enExample) |
| EP (1) | EP1544918A3 (enExample) |
| JP (1) | JP4170210B2 (enExample) |
| CN (1) | CN100505240C (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8816443B2 (en) * | 2001-10-12 | 2014-08-26 | Quantum Semiconductor Llc | Method of fabricating heterojunction photodiodes with CMOS |
| JP4078482B2 (ja) * | 2002-02-15 | 2008-04-23 | 住友化学株式会社 | プロピレンオキサイドの精製方法 |
| KR100568515B1 (ko) * | 2004-12-06 | 2006-04-07 | 삼성전자주식회사 | 저항 소자를 구비한 반도체소자 및 그 제조방법 |
| US7595245B2 (en) * | 2005-08-12 | 2009-09-29 | Texas Instruments Incorporated | Semiconductor device having a gate electrode material feature located adjacent a gate width side of its gate electrode and a method of manufacture therefor |
| JP4519097B2 (ja) | 2006-03-29 | 2010-08-04 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| TWI496272B (zh) * | 2006-09-29 | 2015-08-11 | 菲爾卻德半導體公司 | 用於功率金氧半導體場效電晶體之雙電壓多晶矽二極體靜電放電電路 |
| US7557413B2 (en) * | 2006-11-10 | 2009-07-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Serpentine ballasting resistors for multi-finger ESD protection device |
| JP4384195B2 (ja) | 2007-03-22 | 2009-12-16 | 株式会社東芝 | 半導体装置の製造方法 |
| JP2008305852A (ja) | 2007-06-05 | 2008-12-18 | Toshiba Corp | 半導体装置 |
| JP5165967B2 (ja) * | 2007-08-22 | 2013-03-21 | セイコーインスツル株式会社 | 半導体装置 |
| US8108817B2 (en) * | 2008-02-14 | 2012-01-31 | International Business Machines Corporation | Semiconductor structure and method of designing semiconductor structure to avoid high voltage initiated latch-up in low voltage sectors |
| US7919830B2 (en) | 2008-04-03 | 2011-04-05 | International Business Machines Corporation | Method and structure for ballast resistor |
| GB2460471B (en) * | 2008-05-31 | 2011-11-23 | Filtronic Compound Semiconductors Ltd | A field effect transistor and a method of manufacture thereof |
| JP5476611B2 (ja) * | 2009-10-29 | 2014-04-23 | パナソニック株式会社 | 半導体装置 |
| US9312260B2 (en) * | 2010-05-26 | 2016-04-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuits and manufacturing methods thereof |
| JP5593160B2 (ja) * | 2010-08-13 | 2014-09-17 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| TWI548057B (zh) * | 2011-04-22 | 2016-09-01 | 半導體能源研究所股份有限公司 | 半導體裝置 |
| US8981484B2 (en) * | 2011-06-27 | 2015-03-17 | Marvell World Trade Ltd. | Ballast resistor for super-high-voltage devices |
| US8648425B2 (en) * | 2011-06-28 | 2014-02-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Resistors formed based on metal-oxide-semiconductor structures |
| JP6022804B2 (ja) * | 2011-07-25 | 2016-11-09 | ルネサスエレクトロニクス株式会社 | 半導体集積回路 |
| CN102437563A (zh) * | 2011-12-20 | 2012-05-02 | 上海丽恒光微电子科技有限公司 | 单电源电路和多电源电路 |
| KR101944935B1 (ko) * | 2012-03-16 | 2019-02-07 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 제조 방법 |
| WO2013179593A1 (ja) * | 2012-05-29 | 2013-12-05 | パナソニック株式会社 | 半導体記憶装置および半導体記憶装置を搭載した半導体装置 |
| US9536790B2 (en) * | 2014-01-14 | 2017-01-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device with self-heat reducing layers |
| JP6333672B2 (ja) * | 2014-08-28 | 2018-05-30 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP6349217B2 (ja) * | 2014-09-29 | 2018-06-27 | 日立オートモティブシステムズ株式会社 | 電子制御装置 |
| US10395035B2 (en) * | 2016-09-27 | 2019-08-27 | Intel Corporation | Photon emission attack resistance driver circuits |
| FR3062236A1 (fr) * | 2017-01-23 | 2018-07-27 | Stmicroelectronics (Rousset) Sas | Barre de connexion |
| EP3428971B1 (en) * | 2017-07-12 | 2020-09-09 | Nxp B.V. | A semiconductor switch device and method |
| EP3553822B1 (en) * | 2018-04-09 | 2021-02-24 | NXP USA, Inc. | Esd protection device, semiconductor device that includes an esd protection device, and method of manufacturing same |
| JP6622352B2 (ja) * | 2018-04-24 | 2019-12-18 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6245161A (ja) * | 1985-08-23 | 1987-02-27 | Hitachi Ltd | 半導体集積回路装置 |
| JP2773221B2 (ja) | 1989-04-13 | 1998-07-09 | セイコーエプソン株式会社 | 半導体装置 |
| JP2638537B2 (ja) * | 1995-01-11 | 1997-08-06 | 日本電気株式会社 | 半導体装置 |
| US5654860A (en) * | 1995-08-16 | 1997-08-05 | Micron Technology, Inc. | Well resistor for ESD protection of CMOS circuits |
| US5811856A (en) * | 1995-11-13 | 1998-09-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Layout of ESD input-protection circuit |
| US6587320B1 (en) * | 2000-01-04 | 2003-07-01 | Sarnoff Corporation | Apparatus for current ballasting ESD sensitive devices |
| US6310380B1 (en) | 2000-03-06 | 2001-10-30 | Chartered Semiconductor Manufacturing, Inc. | Electrostatic discharge protection transistor structure with a trench extending through the source or drain silicide layers |
| TW511268B (en) * | 2000-04-21 | 2002-11-21 | Winbond Electronics Corp | Output buffer with excellent electrostatic discharge protection effect |
| US6583972B2 (en) * | 2000-06-15 | 2003-06-24 | Sarnoff Corporation | Multi-finger current ballasting ESD protection circuit and interleaved ballasting for ESD-sensitive circuits |
| DE10103297A1 (de) * | 2001-01-25 | 2002-08-22 | Infineon Technologies Ag | MOS-Transistor |
| US7005708B2 (en) * | 2001-06-14 | 2006-02-28 | Sarnoff Corporation | Minimum-dimension, fully-silicided MOS driver and ESD protection design for optimized inter-finger coupling |
| JP3879063B2 (ja) * | 2002-06-11 | 2007-02-07 | 富士通株式会社 | 半導体装置およびその製造方法 |
| US20050045952A1 (en) * | 2003-08-27 | 2005-03-03 | International Business Machines Corporation | Pfet-based esd protection strategy for improved external latch-up robustness |
-
2003
- 2003-12-19 JP JP2003422108A patent/JP4170210B2/ja not_active Expired - Fee Related
-
2004
- 2004-12-15 EP EP04029737A patent/EP1544918A3/en not_active Withdrawn
- 2004-12-20 US US11/014,702 patent/US7183612B2/en not_active Expired - Lifetime
- 2004-12-20 CN CNB2004101019088A patent/CN100505240C/zh not_active Expired - Fee Related
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