JP2004527126A5 - - Google Patents

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Publication number
JP2004527126A5
JP2004527126A5 JP2002584381A JP2002584381A JP2004527126A5 JP 2004527126 A5 JP2004527126 A5 JP 2004527126A5 JP 2002584381 A JP2002584381 A JP 2002584381A JP 2002584381 A JP2002584381 A JP 2002584381A JP 2004527126 A5 JP2004527126 A5 JP 2004527126A5
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JP
Japan
Prior art keywords
dielectric layer
forming
metal layer
dummy
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002584381A
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English (en)
Japanese (ja)
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JP2004527126A (ja
Filing date
Publication date
Priority claimed from US10/108,614 external-priority patent/US6638863B2/en
Application filed filed Critical
Publication of JP2004527126A publication Critical patent/JP2004527126A/ja
Publication of JP2004527126A5 publication Critical patent/JP2004527126A5/ja
Pending legal-status Critical Current

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JP2002584381A 2001-04-24 2002-04-04 ダミー構造を備えたトレンチもしくはバイアを有するウェハ上の金属層を電解研磨する方法 Pending JP2004527126A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US28627301P 2001-04-24 2001-04-24
US10/108,614 US6638863B2 (en) 2001-04-24 2002-03-27 Electropolishing metal layers on wafers having trenches or vias with dummy structures
PCT/US2002/010500 WO2002086961A1 (en) 2001-04-24 2002-04-04 Electropolishing metal layers on wafers having trenches or vias with dummy structures

Publications (2)

Publication Number Publication Date
JP2004527126A JP2004527126A (ja) 2004-09-02
JP2004527126A5 true JP2004527126A5 (enExample) 2005-12-22

Family

ID=26806086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002584381A Pending JP2004527126A (ja) 2001-04-24 2002-04-04 ダミー構造を備えたトレンチもしくはバイアを有するウェハ上の金属層を電解研磨する方法

Country Status (7)

Country Link
US (2) US6638863B2 (enExample)
EP (1) EP1382065A4 (enExample)
JP (1) JP2004527126A (enExample)
KR (1) KR101018187B1 (enExample)
CN (1) CN100541746C (enExample)
TW (1) TWI258814B (enExample)
WO (1) WO2002086961A1 (enExample)

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