JP2004152471A - FePtC薄膜を利用した高密度磁気記録媒体及びその製造方法 - Google Patents
FePtC薄膜を利用した高密度磁気記録媒体及びその製造方法 Download PDFInfo
- Publication number
- JP2004152471A JP2004152471A JP2003367342A JP2003367342A JP2004152471A JP 2004152471 A JP2004152471 A JP 2004152471A JP 2003367342 A JP2003367342 A JP 2003367342A JP 2003367342 A JP2003367342 A JP 2003367342A JP 2004152471 A JP2004152471 A JP 2004152471A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- carbon
- recording medium
- thin film
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 52
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000003860 storage Methods 0.000 claims abstract description 11
- 238000000151 deposition Methods 0.000 claims abstract description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 14
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 8
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 7
- 239000000395 magnesium oxide Substances 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 9
- 239000013078 crystal Substances 0.000 abstract description 6
- 230000008021 deposition Effects 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 4
- 239000000956 alloy Substances 0.000 abstract description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 238000009826 distribution Methods 0.000 abstract description 3
- 238000001755 magnetron sputter deposition Methods 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000001704 evaporation Methods 0.000 abstract 1
- 229910005335 FePt Inorganic materials 0.000 description 32
- 230000008859 change Effects 0.000 description 13
- 239000002245 particle Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 230000005415 magnetization Effects 0.000 description 10
- 230000007423 decrease Effects 0.000 description 7
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- 238000010549 co-Evaporation Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/82—Disk carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Abstract
磁気記録に適合した保磁力と微細な結晶粒及び均一な結晶粒径分布を持った最適組成の炭素が添加されたFePtC合金薄膜からなる磁気記録媒体及びその製造方法を提供する。
【解決手段】
FePtC合金薄膜に炭素を25 体積体積%添加することによって、高密度磁気記録媒体として好ましい微視的磁気特性及び構造的特性を持った磁気記録媒体を提供し、また、FePtC薄膜を基板温度400℃でdcマグネトロンスパッタリング装置を利用して同時蒸着する方法で形成して、基板の熱処理及び蒸着時間は1時間にすることを特徴とする磁気記録媒体の製造方法を提供することによって、貯蔵密度を高め、ノイズを減らし、工程温度を下げる効果を持つ。
【選択図】 図2
Description
第一に、FePtに炭素を添加することによってFePt粒子の大きさを炭素の添加が25体積%の場合5nmから50体積%の添加時には4nmまで減らすことができ、均一な分布が得られる。それで磁気記録物質の記録密度を高め、ノイズを減らせる効果を得る。
Claims (8)
- 情報を記録する情報記録手段及び前記情報記録手段により情報が磁気的に記録される情報貯蔵手段からなる磁気記録媒体であって、前記情報貯蔵手段は、鉄(Fe)、白金(Pt)、炭素(C)を同時蒸着したFePtC薄膜を含む、前記磁気記録媒体。
- 炭素の含量が、10〜50体積%である、請求項1に記載の磁気記録媒体。
- 情報を記録する情報記録手段及び前記情報記録手段により情報が磁気的に記録される情報貯蔵手段からなる磁気記録媒体の製造方法であって、前記情報貯蔵手段が、基板上に鉄(Fe)、白金(Pt)、炭素(C)を同時蒸着してFePtC薄膜を形成することによって製造される、磁気記録媒体製造方法。
- FePtC薄膜を、スパッタリング装置を用いて同時蒸着する、請求項3に記載の製造方法。
- 炭素の含量が、25体積%である、請求項3または4に記載の製造方法。
- 基板に酸化マグネシウム(MgO)基板を用い、請求項3〜5のいずれかに記載の製造方法。
- 蒸着と同時に基板を400℃で熱処理する、請求項3〜6のいずれかに記載の製造方法。
- 蒸着及び熱処理を行う時間が、1時間である、請求項7に記載の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0066163A KR100470151B1 (ko) | 2002-10-29 | 2002-10-29 | FePtC 박막을 이용한 고밀도 자기기록매체 및 그제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004152471A true JP2004152471A (ja) | 2004-05-27 |
JP3950838B2 JP3950838B2 (ja) | 2007-08-01 |
Family
ID=32464432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003367342A Expired - Fee Related JP3950838B2 (ja) | 2002-10-29 | 2003-10-28 | FePtC薄膜を利用した高密度磁気記録媒体及びその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US7241520B2 (ja) |
JP (1) | JP3950838B2 (ja) |
KR (1) | KR100470151B1 (ja) |
Cited By (15)
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WO2008026439A1 (fr) * | 2006-08-31 | 2008-03-06 | Ishifuku Metal Industry Co., Ltd. | Film mince magnetique |
CN1891661B (zh) * | 2005-06-27 | 2010-05-12 | Tdk株式会社 | 烧结体、磁头滑块,以及烧结体的制造方法 |
WO2012073879A1 (ja) * | 2010-11-29 | 2012-06-07 | 三井金属鉱業株式会社 | スパッタリングターゲット |
WO2012073882A1 (ja) * | 2010-11-29 | 2012-06-07 | 三井金属鉱業株式会社 | スパッタリングターゲット |
WO2012105205A1 (ja) * | 2011-01-31 | 2012-08-09 | 三菱マテリアル株式会社 | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
WO2012105201A1 (ja) * | 2011-01-31 | 2012-08-09 | 三菱マテリアル株式会社 | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
JP2012252768A (ja) * | 2011-05-09 | 2012-12-20 | Mitsubishi Materials Corp | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
JP2013033581A (ja) * | 2011-07-05 | 2013-02-14 | Mitsubishi Materials Corp | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
WO2013046882A1 (ja) * | 2011-09-26 | 2013-04-04 | Jx日鉱日石金属株式会社 | Fe-Pt-C系スパッタリングターゲット |
WO2013175884A1 (ja) * | 2012-05-22 | 2013-11-28 | Jx日鉱日石金属株式会社 | C粒子が分散したFe-Pt-Ag-C系スパッタリングターゲット及びその製造方法 |
WO2014024519A1 (ja) * | 2012-08-10 | 2014-02-13 | 三井金属鉱業株式会社 | 焼結体およびスパッタリングターゲット |
JP2014041682A (ja) * | 2012-08-24 | 2014-03-06 | Mitsubishi Materials Corp | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
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-
2002
- 2002-10-29 KR KR10-2002-0066163A patent/KR100470151B1/ko not_active IP Right Cessation
-
2003
- 2003-10-06 US US10/679,543 patent/US7241520B2/en not_active Expired - Fee Related
- 2003-10-28 JP JP2003367342A patent/JP3950838B2/ja not_active Expired - Fee Related
-
2005
- 2005-10-21 US US11/255,908 patent/US20060051622A1/en not_active Abandoned
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JP2014041682A (ja) * | 2012-08-24 | 2014-03-06 | Mitsubishi Materials Corp | 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法 |
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Also Published As
Publication number | Publication date |
---|---|
JP3950838B2 (ja) | 2007-08-01 |
KR20040037609A (ko) | 2004-05-07 |
US20060051622A1 (en) | 2006-03-09 |
US20040110035A1 (en) | 2004-06-10 |
US7241520B2 (en) | 2007-07-10 |
KR100470151B1 (ko) | 2005-02-05 |
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