JP5811672B2 - 垂直磁気記録媒体およびその製造方法 - Google Patents
垂直磁気記録媒体およびその製造方法 Download PDFInfo
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- JP5811672B2 JP5811672B2 JP2011171012A JP2011171012A JP5811672B2 JP 5811672 B2 JP5811672 B2 JP 5811672B2 JP 2011171012 A JP2011171012 A JP 2011171012A JP 2011171012 A JP2011171012 A JP 2011171012A JP 5811672 B2 JP5811672 B2 JP 5811672B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000010410 layer Substances 0.000 claims description 86
- 239000011241 protective layer Substances 0.000 claims description 64
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 53
- 229910052799 carbon Inorganic materials 0.000 claims description 48
- 239000000956 alloy Substances 0.000 claims description 45
- 239000004215 Carbon black (E152) Substances 0.000 claims description 43
- 229910045601 alloy Inorganic materials 0.000 claims description 43
- 229930195733 hydrocarbon Natural products 0.000 claims description 43
- 239000002243 precursor Substances 0.000 claims description 40
- 229910005335 FePt Inorganic materials 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 16
- 150000002430 hydrocarbons Chemical class 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- -1 hydrocarbon ions Chemical class 0.000 description 28
- 150000002500 ions Chemical class 0.000 description 14
- 239000002245 particle Substances 0.000 description 14
- 238000001069 Raman spectroscopy Methods 0.000 description 10
- 238000001228 spectrum Methods 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 229910052697 platinum Inorganic materials 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 229910052742 iron Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 6
- 239000010439 graphite Substances 0.000 description 6
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 4
- 239000010952 cobalt-chrome Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
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- 230000006378 damage Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
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- 230000003247 decreasing effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005211 surface analysis Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910019222 CoCrPt Inorganic materials 0.000 description 1
- 229910018979 CoPt Inorganic materials 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229910000943 NiAl Inorganic materials 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
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- 238000011088 calibration curve Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 239000002180 crystalline carbon material Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000007885 magnetic separation Methods 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/727—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/726—Two or more protective coatings
- G11B5/7262—Inorganic protective coating
- G11B5/7264—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
- G11B5/7268—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon comprising elemental nitrogen in the inorganic carbon coating
Description
非磁性基板10としてガラス製基板を準備した。非磁性基板10を超高真空(UHV)DC/RFマグネトロンスパッタ装置(ANELVA,E8001)内に配置した。Fe、Ptおよび炭素を混合したターゲットを用い、基板を350℃に加熱し、圧力3.0PaのAr雰囲気中、1kWの高周波(RF)電力を供給して、FePtのL10型規則合金の結晶粒子51、および結晶粒子51の粒界に存在し炭素からなる粒界層52を含む磁気記録層50、ならびに結晶粒子51の表面に存在し、炭素(グラファイト)からなる保護層前駆体60aを形成した。ターゲット中の炭素の含有量は、FeおよびPtの合計を基準として30at%とした。得られた磁気記録層50および保護層前駆体60aの合計膜厚は5nmであり、保護層前駆体60aの膜厚は2nmであった。
20 軟磁性層
30 非磁性シード層
40 非磁性下地層
50 磁気記録層
51 規則化合金粒子
52 粒界層
60 保護層
60a 保護層前駆体
70 潤滑剤層
Claims (6)
- 非磁性基板、磁気記録層および保護層を少なくとも含む垂直磁気記録媒体の製造方法であって、
(1) 規則合金を構成する金属および炭素を含むターゲットを用いるスパッタ法によって、非磁性基板上に、規則合金の結晶粒子および炭素からなる粒界層を含む磁気記録層と、前記磁気記録層上に存在し、炭素からなる保護層前駆体とを形成する工程と、
(2) 前記保護層前駆体に、炭化水素系ガスに対するプラズマ放電により生成した炭化水素系イオンを照射して、保護層前駆体を保護層に変化させる工程と
を含み、前記炭化水素系イオンは前記保護層前駆体に到達する際に300eV以上のエネルギーを有することを特徴とする垂直磁気記録媒体の製造方法。 - 前記規則合金はL10型規則構造を有することを特徴とする請求項1に記載の垂直磁気記録媒体の製造方法。
- 前記規則合金はFePt合金であることを特徴とする請求項2に記載の垂直磁気記録媒体の製造方法。
- 前記工程(2)は、前記工程(1)の直後に実施されることを特徴とする請求項1に記載の垂直磁気記録媒体の製造方法。
- 前記保護層はダイヤモンドライクカーボンからなることを特徴とする請求項1に記載の垂直磁気記録媒体の製造方法。
- 前記炭化水素系ガスは、C2H4またはC2H2であることを特徴とする請求項1に記載の垂直磁気記録媒体の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011171012A JP5811672B2 (ja) | 2011-08-04 | 2011-08-04 | 垂直磁気記録媒体およびその製造方法 |
US13/566,838 US20130034747A1 (en) | 2011-08-04 | 2012-08-03 | Perpendicular magnetic recording medium and method for manufacturing same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011171012A JP5811672B2 (ja) | 2011-08-04 | 2011-08-04 | 垂直磁気記録媒体およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2013037730A JP2013037730A (ja) | 2013-02-21 |
JP5811672B2 true JP5811672B2 (ja) | 2015-11-11 |
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JP2011171012A Expired - Fee Related JP5811672B2 (ja) | 2011-08-04 | 2011-08-04 | 垂直磁気記録媒体およびその製造方法 |
Country Status (2)
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US (1) | US20130034747A1 (ja) |
JP (1) | JP5811672B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9540724B2 (en) | 2012-06-18 | 2017-01-10 | Jx Nippon Mining & Metals Corporation | Sputtering target for magnetic recording film |
JP5578215B2 (ja) * | 2012-09-14 | 2014-08-27 | 富士電機株式会社 | 磁気記録媒体の製造方法 |
US10115428B1 (en) * | 2013-02-15 | 2018-10-30 | Wd Media, Inc. | HAMR media structure having an anisotropic thermal barrier layer |
JP6375719B2 (ja) * | 2014-06-24 | 2018-08-22 | 富士電機株式会社 | 磁性薄膜および磁性薄膜を含む応用デバイス |
CN105671552B (zh) * | 2016-04-18 | 2018-04-10 | 上海应用技术学院 | 一种汽轮机转子轮槽量规表面耐磨涂层的制备方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH101305A (ja) * | 1996-06-11 | 1998-01-06 | Denki Kagaku Kogyo Kk | 炭素膜および炭素膜製造方法 |
JP2001056931A (ja) * | 1999-06-11 | 2001-02-27 | Fujitsu Ltd | 磁気ディスク媒体の製造方法 |
JP2001043530A (ja) * | 1999-07-28 | 2001-02-16 | Anelva Corp | 情報記録ディスク用保護膜作成方法及び情報記録ディスク用薄膜作成装置 |
US6638608B1 (en) * | 2001-03-16 | 2003-10-28 | Seagate Technology Llc | Protection overcoat for recording media |
US6875492B1 (en) * | 2001-11-15 | 2005-04-05 | Maxtor Corporation | Carbon overcoat for magnetic recording medium |
KR100470151B1 (ko) * | 2002-10-29 | 2005-02-05 | 한국과학기술원 | FePtC 박막을 이용한 고밀도 자기기록매체 및 그제조방법 |
JP4247535B2 (ja) * | 2003-11-11 | 2009-04-02 | Hoya株式会社 | ロードアンロード方式用磁気ディスク、ロードアンロード方式用磁気ディスクの製造方法及びロードアンロード方式用磁気ディスクの評価方法 |
US20070087227A1 (en) * | 2005-10-14 | 2007-04-19 | Seagate Technology Llc | Granular magnetic recording media with improved corrosion resistance by cap layer + pre-covercoat etching |
JP2008091024A (ja) * | 2007-12-25 | 2008-04-17 | Toshiba Corp | 垂直磁気記録媒体 |
JP5550007B2 (ja) * | 2008-12-05 | 2014-07-16 | 国立大学法人東北大学 | 磁性薄膜及びその製造方法、並びにこのような磁性薄膜を用いた各種応用デバイス |
CN102473420B (zh) * | 2009-08-20 | 2015-01-07 | 昭和电工株式会社 | 热辅助磁记录介质和磁存储装置 |
-
2011
- 2011-08-04 JP JP2011171012A patent/JP5811672B2/ja not_active Expired - Fee Related
-
2012
- 2012-08-03 US US13/566,838 patent/US20130034747A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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US20130034747A1 (en) | 2013-02-07 |
JP2013037730A (ja) | 2013-02-21 |
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