JP2003518440A5 - - Google Patents

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Publication number
JP2003518440A5
JP2003518440A5 JP2001548238A JP2001548238A JP2003518440A5 JP 2003518440 A5 JP2003518440 A5 JP 2003518440A5 JP 2001548238 A JP2001548238 A JP 2001548238A JP 2001548238 A JP2001548238 A JP 2001548238A JP 2003518440 A5 JP2003518440 A5 JP 2003518440A5
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Japan
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laser
pulse
wavelength
processing
energy
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JP2001548238A
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JP5175416B2 (ja
JP2003518440A (ja
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Priority claimed from US09/473,926 external-priority patent/US6281471B1/en
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Publication of JP5175416B2 publication Critical patent/JP5175416B2/ja
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JP2001548238A 1999-12-28 2000-12-19 標的材を処理するエネルギー効率に優れたレーザーベースの方法およびシステム Expired - Fee Related JP5175416B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/473,926 1999-12-28
US09/473,926 US6281471B1 (en) 1999-12-28 1999-12-28 Energy-efficient, laser-based method and system for processing target material
PCT/US2000/034470 WO2001047659A1 (en) 1999-12-28 2000-12-19 Energy-efficient, laser-based method and system for processing target material

Publications (3)

Publication Number Publication Date
JP2003518440A JP2003518440A (ja) 2003-06-10
JP2003518440A5 true JP2003518440A5 (enExample) 2011-06-02
JP5175416B2 JP5175416B2 (ja) 2013-04-03

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JP2001548238A Expired - Fee Related JP5175416B2 (ja) 1999-12-28 2000-12-19 標的材を処理するエネルギー効率に優れたレーザーベースの方法およびシステム

Country Status (7)

Country Link
US (8) US6281471B1 (enExample)
EP (1) EP1244534B1 (enExample)
JP (1) JP5175416B2 (enExample)
KR (1) KR100829008B1 (enExample)
DE (1) DE60009348T2 (enExample)
TW (1) TW478025B (enExample)
WO (1) WO2001047659A1 (enExample)

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