JP2002198529A5 - - Google Patents

Download PDF

Info

Publication number
JP2002198529A5
JP2002198529A5 JP2001219666A JP2001219666A JP2002198529A5 JP 2002198529 A5 JP2002198529 A5 JP 2002198529A5 JP 2001219666 A JP2001219666 A JP 2001219666A JP 2001219666 A JP2001219666 A JP 2001219666A JP 2002198529 A5 JP2002198529 A5 JP 2002198529A5
Authority
JP
Japan
Prior art keywords
semiconductor device
conductive type
manufacturing
impurity layer
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001219666A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002198529A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001219666A priority Critical patent/JP2002198529A/ja
Priority claimed from JP2001219666A external-priority patent/JP2002198529A/ja
Priority to US09/965,479 priority patent/US6524903B2/en
Priority to TW090124304A priority patent/TW522548B/zh
Priority to KR1020010063328A priority patent/KR100828790B1/ko
Publication of JP2002198529A publication Critical patent/JP2002198529A/ja
Priority to US10/298,597 priority patent/US7042051B2/en
Publication of JP2002198529A5 publication Critical patent/JP2002198529A5/ja
Pending legal-status Critical Current

Links

JP2001219666A 2000-10-18 2001-07-19 半導体装置およびその製造方法 Pending JP2002198529A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001219666A JP2002198529A (ja) 2000-10-18 2001-07-19 半導体装置およびその製造方法
US09/965,479 US6524903B2 (en) 2000-10-18 2001-09-28 Method of manufacturing a semiconductor device having two peaks in an impurity concentration distribution
TW090124304A TW522548B (en) 2000-10-18 2001-10-02 Semiconductor device and its manufacturing method
KR1020010063328A KR100828790B1 (ko) 2000-10-18 2001-10-15 반도체장치 및 그 제조방법
US10/298,597 US7042051B2 (en) 2000-10-18 2002-11-19 Semiconductor device including impurity layer having a plurality of impurity peaks formed beneath the channel region

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-317345 2000-10-18
JP2000317345 2000-10-18
JP2001219666A JP2002198529A (ja) 2000-10-18 2001-07-19 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JP2002198529A JP2002198529A (ja) 2002-07-12
JP2002198529A5 true JP2002198529A5 (enExample) 2006-11-16

Family

ID=26602282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001219666A Pending JP2002198529A (ja) 2000-10-18 2001-07-19 半導体装置およびその製造方法

Country Status (4)

Country Link
US (2) US6524903B2 (enExample)
JP (1) JP2002198529A (enExample)
KR (1) KR100828790B1 (enExample)
TW (1) TW522548B (enExample)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030064550A1 (en) * 2001-09-28 2003-04-03 Layman Paul Arthur Method of ion implantation for achieving desired dopant concentration
US20030082892A1 (en) * 2001-10-31 2003-05-01 Macronix International Co., Ltd. Method for reducing the drain coupling ratio of floating gate device
US6887758B2 (en) * 2002-10-09 2005-05-03 Freescale Semiconductor, Inc. Non-volatile memory device and method for forming
US6815355B2 (en) * 2002-10-09 2004-11-09 Chartered Semiconductor Manufacturing Ltd. Method of integrating L-shaped spacers in a high performance CMOS process via use of an oxide-nitride-doped oxide spacer
KR100496551B1 (ko) * 2002-11-20 2005-06-22 주식회사 하이닉스반도체 반도체 소자의 제조 방법
JP2004221246A (ja) * 2003-01-14 2004-08-05 Seiko Epson Corp 半導体装置及びその製造方法
CN100472001C (zh) * 2003-02-25 2009-03-25 株式会社上睦可 硅晶片、soi衬底、硅单晶生长方法，硅晶片制造方法及soi衬底制造方法
TWI235411B (en) * 2003-07-23 2005-07-01 Samsung Electronics Co Ltd Self-aligned inner gate recess channel transistor and method of forming the same
US7205185B2 (en) * 2003-09-15 2007-04-17 International Busniess Machines Corporation Self-aligned planar double-gate process by self-aligned oxidation
DE10345345A1 (de) * 2003-09-19 2005-04-14 Atmel Germany Gmbh Verfahren zur Herstellung von Halbleiterbauelementen in einem Halbleitersubstrat
DE10345346B4 (de) * 2003-09-19 2010-09-16 Atmel Automotive Gmbh Verfahren zur Herstellung eines Halbleiterbauelements mit aktiven Bereichen, die durch Isolationsstrukturen voneinander getrennt sind
JP4469677B2 (ja) 2004-08-04 2010-05-26 パナソニック株式会社 半導体装置およびその製造方法
US20060068556A1 (en) * 2004-09-27 2006-03-30 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for fabricating the same
JP4540438B2 (ja) * 2004-09-27 2010-09-08 富士通セミコンダクター株式会社 半導体装置及びその製造方法
JP4854955B2 (ja) * 2004-12-10 2012-01-18 ルネサスエレクトロニクス株式会社 半導体装置及びその製造方法
JP5114829B2 (ja) * 2005-05-13 2013-01-09 ソニー株式会社 半導体装置およびその製造方法
KR100764737B1 (ko) * 2006-02-09 2007-10-08 삼성전자주식회사 에스램 셀 및 그 형성 방법
JP2008027976A (ja) * 2006-07-18 2008-02-07 Mitsubishi Electric Corp 薄膜トランジスタアレイ基板、その製造方法、及び表示装置
JP5486781B2 (ja) * 2007-07-19 2014-05-07 株式会社半導体エネルギー研究所 半導体装置の作製方法
EP2042560A1 (de) * 2007-09-19 2009-04-01 Basf Se Leichte Holzwerkstoffe mit guten mechanischen Eigenschaften und geringer Formaldehyd-Emission
JP2009278053A (ja) * 2008-05-19 2009-11-26 Renesas Technology Corp 半導体装置およびその製造方法
JP5434158B2 (ja) * 2009-03-11 2014-03-05 セイコーエプソン株式会社 半導体装置の製造方法及び半導体装置
US8304835B2 (en) * 2009-03-27 2012-11-06 National Semiconductor Corporation Configuration and fabrication of semiconductor structure using empty and filled wells
JP5829611B2 (ja) * 2009-09-30 2015-12-09 三重富士通セミコンダクター株式会社 電界効果トランジスタ及びその製造方法
US8273617B2 (en) 2009-09-30 2012-09-25 Suvolta, Inc. Electronic devices and systems, and methods for making and using the same
US8421162B2 (en) * 2009-09-30 2013-04-16 Suvolta, Inc. Advanced transistors with punch through suppression
JP2011151120A (ja) 2010-01-20 2011-08-04 Toshiba Corp 半導体装置および半導体装置の製造方法
JP2011159853A (ja) * 2010-02-02 2011-08-18 Toshiba Corp 半導体装置およびその製造方法
US8759872B2 (en) * 2010-06-22 2014-06-24 Suvolta, Inc. Transistor with threshold voltage set notch and method of fabrication thereof
US9299698B2 (en) 2012-06-27 2016-03-29 Mie Fujitsu Semiconductor Limited Semiconductor structure with multiple transistors having various threshold voltages
CN111048509B (zh) * 2014-03-28 2023-12-01 株式会社半导体能源研究所 半导体装置
US9437500B1 (en) * 2015-03-13 2016-09-06 Freescale Semiconductor, Inc. Method of forming supra low threshold devices
US9653164B2 (en) 2015-03-13 2017-05-16 Nxp Usa, Inc. Method for integrating non-volatile memory cells with static random access memory cells and logic transistors
US9761525B1 (en) * 2016-04-29 2017-09-12 Globalfoundries Inc. Multiple back gate transistor
CN115548126A (zh) * 2022-12-02 2022-12-30 绍兴中芯集成电路制造股份有限公司 Mos器件及其制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0734475B2 (ja) * 1989-03-10 1995-04-12 株式会社東芝 半導体装置
JP2668141B2 (ja) * 1989-11-29 1997-10-27 三菱電機株式会社 Ｍｉｓ型ｆｅｔ
JPH0458562A (ja) 1990-06-28 1992-02-25 Nec Corp Ｍｏｓ型トランジスタ及びその製造方法
JPH05259449A (ja) * 1992-03-11 1993-10-08 Toshiba Corp Ｍｉｓ型電界効果トランジスタ及びその製造方法
JPH09121049A (ja) * 1995-10-25 1997-05-06 Sony Corp 半導体装置
US5719081A (en) * 1995-11-03 1998-02-17 Motorola, Inc. Fabrication method for a semiconductor device on a semiconductor on insulator substrate using a two stage threshold adjust implant
JP3543508B2 (ja) * 1996-01-22 2004-07-14 株式会社デンソー 半導体装置
JP3575908B2 (ja) * 1996-03-28 2004-10-13 株式会社東芝 半導体装置
JPH10189978A (ja) * 1996-12-20 1998-07-21 Hitachi Ltd 半導体集積回路装置
US5827763A (en) * 1997-01-30 1998-10-27 Advanced Micro Devices, Inc. Method of forming a multiple transistor channel doping using a dual resist fabrication sequence
US6153454A (en) * 1997-07-09 2000-11-28 Advanced Micro Devices, Inc. Convex device with selectively doped channel
CN1219328C (zh) * 1998-02-19 2005-09-14 国际商业机器公司 具有改善了注入剂的场效应晶体管及其制造方法
KR100332107B1 (ko) * 1999-06-29 2002-04-10 박종섭 반도체 소자의 트랜지스터 제조 방법
US6342429B1 (en) * 1999-12-22 2002-01-29 Lsi Logic Corporation Method of fabricating an indium field implant for punchthrough protection in semiconductor devices

Similar Documents

Publication Publication Date Title
JP2002198529A5 (enExample)
TWI256692B (en) Semiconductor device and manufacturing method thereof
EP1253634A3 (en) Semiconductor device
JP2006513572A5 (enExample)
JP2004241755A5 (enExample)
WO2002043117A3 (en) Trench gate fermi-threshold field effect transistors and methods of fabricating the same
JP5184831B2 (ja) フィン型トランジスタの形成方法
TW200509374A (en) Semiconductor device and manufacturing method thereof
JP2005521264A5 (enExample)
WO2004023533A3 (en) Semiconductor component and method of manufacture
JPH1187240A5 (enExample)
EP1229576A3 (en) Method of producing SOI MOSFET
KR960026463A (ko) 모스 전계 효과 트랜지스터(mosfet) 제조 방법
EP1403930A3 (en) Semiconductor device and method of manufacturing the same
KR970013411A (ko) 일방향, 경사형 채널 반도체 디바이스 형성 방법
JP4763118B2 (ja) 増加したソース接触面積を有する縦形半導体装置の形成方法
TW200614387A (en) Method of fabricating mos transistor by millisecond anneal
JP2005514772A5 (enExample)
CN115458604A (zh) Mosfet器件及其制造方法
JPH1070198A5 (enExample)
KR980006438A (ko) 실리사이드를 이용한 폴리 실리콘 박막트랜지스터 및 제조 방법
JP2000077549A5 (enExample)
JP2004063918A (ja) 横型ｍｏｓトランジスタ
WO2003075345A3 (en) Raised extension structure for high performance cmos
JPS63227059A (ja) 半導体装置およびその製造方法