JP2001291720A5 - - Google Patents

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Publication number
JP2001291720A5
JP2001291720A5 JP2000104015A JP2000104015A JP2001291720A5 JP 2001291720 A5 JP2001291720 A5 JP 2001291720A5 JP 2000104015 A JP2000104015 A JP 2000104015A JP 2000104015 A JP2000104015 A JP 2000104015A JP 2001291720 A5 JP2001291720 A5 JP 2001291720A5
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JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
manufacturing
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000104015A
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English (en)
Japanese (ja)
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JP2001291720A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000104015A priority Critical patent/JP2001291720A/ja
Priority claimed from JP2000104015A external-priority patent/JP2001291720A/ja
Priority to TW090107703A priority patent/TW531892B/zh
Priority to KR1020010018003A priority patent/KR100698987B1/ko
Priority to US09/825,946 priority patent/US6764950B2/en
Publication of JP2001291720A publication Critical patent/JP2001291720A/ja
Priority to US10/811,927 priority patent/US7232757B2/en
Publication of JP2001291720A5 publication Critical patent/JP2001291720A5/ja
Priority to US11/790,760 priority patent/US20080132059A1/en
Pending legal-status Critical Current

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JP2000104015A 2000-04-05 2000-04-05 半導体集積回路装置および半導体集積回路装置の製造方法 Pending JP2001291720A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2000104015A JP2001291720A (ja) 2000-04-05 2000-04-05 半導体集積回路装置および半導体集積回路装置の製造方法
TW090107703A TW531892B (en) 2000-04-05 2001-03-30 Semiconductor integrated circuit device and fabrication method for semiconductor integrated circuit device
KR1020010018003A KR100698987B1 (ko) 2000-04-05 2001-04-04 반도체 집적 회로 장치의 제조 방법
US09/825,946 US6764950B2 (en) 2000-04-05 2001-04-05 Fabrication method for semiconductor integrated circuit device
US10/811,927 US7232757B2 (en) 2000-04-05 2004-03-30 Semiconductor integrated circuit device and fabrication method for semiconductor integrated circuit device
US11/790,760 US20080132059A1 (en) 2000-04-05 2007-04-27 Semiconductor integrated circuit device and fabrication method for semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000104015A JP2001291720A (ja) 2000-04-05 2000-04-05 半導体集積回路装置および半導体集積回路装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007310344A Division JP2008141204A (ja) 2007-11-30 2007-11-30 半導体集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JP2001291720A JP2001291720A (ja) 2001-10-19
JP2001291720A5 true JP2001291720A5 (enExample) 2006-03-23

Family

ID=18617635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000104015A Pending JP2001291720A (ja) 2000-04-05 2000-04-05 半導体集積回路装置および半導体集積回路装置の製造方法

Country Status (4)

Country Link
US (3) US6764950B2 (enExample)
JP (1) JP2001291720A (enExample)
KR (1) KR100698987B1 (enExample)
TW (1) TW531892B (enExample)

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