IL143467A - Specimen holding robotic arm and effector - Google Patents

Specimen holding robotic arm and effector

Info

Publication number
IL143467A
IL143467A IL14346799A IL14346799A IL143467A IL 143467 A IL143467 A IL 143467A IL 14346799 A IL14346799 A IL 14346799A IL 14346799 A IL14346799 A IL 14346799A IL 143467 A IL143467 A IL 143467A
Authority
IL
Israel
Prior art keywords
specimen
effector
end effector
robotic arm
supination
Prior art date
Application number
IL14346799A
Other languages
English (en)
Other versions
IL143467A0 (en
Original Assignee
Newport Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/204,747 external-priority patent/US6256555B1/en
Application filed by Newport Corp filed Critical Newport Corp
Publication of IL143467A0 publication Critical patent/IL143467A0/xx
Publication of IL143467A publication Critical patent/IL143467A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S700/00—Data processing: generic control systems or specific applications
    • Y10S700/90—Special robot structural element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20317—Robotic arm including electric motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Fishing Rods (AREA)
  • Sampling And Sample Adjustment (AREA)
IL14346799A 1998-12-02 1999-12-02 Specimen holding robotic arm and effector IL143467A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/204,747 US6256555B1 (en) 1998-12-02 1998-12-02 Robot arm with specimen edge gripping end effector
US09/312,343 US6275748B1 (en) 1998-12-02 1999-05-14 Robot arm with specimen sensing and edge gripping end effector
PCT/US1999/028737 WO2000033359A2 (en) 1998-12-02 1999-12-02 Specimen holding robotic arm end effector

Publications (2)

Publication Number Publication Date
IL143467A0 IL143467A0 (en) 2002-04-21
IL143467A true IL143467A (en) 2005-05-17

Family

ID=26899770

Family Applications (3)

Application Number Title Priority Date Filing Date
IL14346799A IL143467A (en) 1998-12-02 1999-12-02 Specimen holding robotic arm and effector
IL166019A IL166019A (en) 1998-12-02 2004-12-21 Method of removing a specimen from a specimen holder
IL166018A IL166018A (en) 1998-12-02 2004-12-28 Specimen peripheral edge-gripping device that is adapted for operative coupling to a mechanism and gripping a specimen

Family Applications After (2)

Application Number Title Priority Date Filing Date
IL166019A IL166019A (en) 1998-12-02 2004-12-21 Method of removing a specimen from a specimen holder
IL166018A IL166018A (en) 1998-12-02 2004-12-28 Specimen peripheral edge-gripping device that is adapted for operative coupling to a mechanism and gripping a specimen

Country Status (9)

Country Link
US (5) US6453214B1 (zh)
EP (1) EP1135795B1 (zh)
JP (1) JP2002531942A (zh)
CN (1) CN1238882C (zh)
AT (1) ATE389237T1 (zh)
AU (1) AU2041000A (zh)
HK (1) HK1041104B (zh)
IL (3) IL143467A (zh)
WO (1) WO2000033359A2 (zh)

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US7233842B2 (en) 2007-06-19
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