ATE389237T1 - Armgreiforgan für probehalteroboter - Google Patents
Armgreiforgan für probehalteroboterInfo
- Publication number
- ATE389237T1 ATE389237T1 AT99964097T AT99964097T ATE389237T1 AT E389237 T1 ATE389237 T1 AT E389237T1 AT 99964097 T AT99964097 T AT 99964097T AT 99964097 T AT99964097 T AT 99964097T AT E389237 T1 ATE389237 T1 AT E389237T1
- Authority
- AT
- Austria
- Prior art keywords
- robots
- end effector
- sample holder
- supination
- specimen
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S700/00—Data processing: generic control systems or specific applications
- Y10S700/90—Special robot structural element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20305—Robotic arm
- Y10T74/20317—Robotic arm including electric motor
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Fishing Rods (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/204,747 US6256555B1 (en) | 1998-12-02 | 1998-12-02 | Robot arm with specimen edge gripping end effector |
US09/312,343 US6275748B1 (en) | 1998-12-02 | 1999-05-14 | Robot arm with specimen sensing and edge gripping end effector |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE389237T1 true ATE389237T1 (de) | 2008-03-15 |
Family
ID=26899770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT99964097T ATE389237T1 (de) | 1998-12-02 | 1999-12-02 | Armgreiforgan für probehalteroboter |
Country Status (9)
Country | Link |
---|---|
US (5) | US6453214B1 (de) |
EP (1) | EP1135795B1 (de) |
JP (1) | JP2002531942A (de) |
CN (1) | CN1238882C (de) |
AT (1) | ATE389237T1 (de) |
AU (1) | AU2041000A (de) |
HK (1) | HK1041104B (de) |
IL (3) | IL143467A (de) |
WO (1) | WO2000033359A2 (de) |
Families Citing this family (164)
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- 1999-12-02 CN CNB998140325A patent/CN1238882C/zh not_active Expired - Lifetime
- 1999-12-02 AT AT99964097T patent/ATE389237T1/de not_active IP Right Cessation
- 1999-12-02 WO PCT/US1999/028737 patent/WO2000033359A2/en not_active Application Discontinuation
- 1999-12-02 AU AU20410/00A patent/AU2041000A/en not_active Abandoned
- 1999-12-02 IL IL14346799A patent/IL143467A/xx not_active IP Right Cessation
- 1999-12-02 US US09/890,839 patent/US6453214B1/en not_active Expired - Lifetime
- 1999-12-02 EP EP99964097A patent/EP1135795B1/de not_active Expired - Lifetime
- 1999-12-02 JP JP2000585915A patent/JP2002531942A/ja active Pending
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2001
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HK1041104B (zh) | 2006-07-07 |
CN1238882C (zh) | 2006-01-25 |
JP2002531942A (ja) | 2002-09-24 |
US20040039486A1 (en) | 2004-02-26 |
IL166019A0 (en) | 2006-01-15 |
IL166018A0 (en) | 2006-01-15 |
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IL166019A (en) | 2010-04-29 |
US20060045719A1 (en) | 2006-03-02 |
US6438460B1 (en) | 2002-08-20 |
EP1135795A2 (de) | 2001-09-26 |
EP1135795B1 (de) | 2008-03-12 |
US6898487B2 (en) | 2005-05-24 |
WO2000033359B1 (en) | 2001-01-04 |
IL143467A (en) | 2005-05-17 |
AU2041000A (en) | 2000-06-19 |
HK1041104A1 (en) | 2002-06-28 |
CN1336008A (zh) | 2002-02-13 |
WO2000033359A2 (en) | 2000-06-08 |
US6453214B1 (en) | 2002-09-17 |
US20030055533A1 (en) | 2003-03-20 |
US7233842B2 (en) | 2007-06-19 |
WO2000033359A3 (en) | 2000-11-16 |
IL143467A0 (en) | 2002-04-21 |
IL166018A (en) | 2012-04-30 |
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