ES2182226T3 - Metodo y aparato para el corte de un substrato compuesto por utilizacion de un fluido. - Google Patents

Metodo y aparato para el corte de un substrato compuesto por utilizacion de un fluido.

Info

Publication number
ES2182226T3
ES2182226T3 ES98302313T ES98302313T ES2182226T3 ES 2182226 T3 ES2182226 T3 ES 2182226T3 ES 98302313 T ES98302313 T ES 98302313T ES 98302313 T ES98302313 T ES 98302313T ES 2182226 T3 ES2182226 T3 ES 2182226T3
Authority
ES
Spain
Prior art keywords
fluid
composite member
cutting
composite substrate
separate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98302313T
Other languages
English (en)
Inventor
Kazuaki Ohmi
Takao Yonehara
Kiyofumi Sakaguchi
Kazutaka Yanagita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of ES2182226T3 publication Critical patent/ES2182226T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1126—Using direct fluid current against work during delaminating
    • Y10T156/1137—Using air blast directly against work during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
    • Y10T156/1374—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing with means projecting fluid against work
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1922—Vibrating delaminating means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1928—Differential fluid pressure delaminating means
    • Y10T156/1933—Spraying delaminating means [e.g., atomizer, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1928—Differential fluid pressure delaminating means
    • Y10T156/1933—Spraying delaminating means [e.g., atomizer, etc.
    • Y10T156/1939—Air blasting delaminating means]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49815—Disassembling
    • Y10T29/49821—Disassembling by altering or destroying work part or connector
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/364—By fluid blast and/or suction

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Element Separation (AREA)
  • Separation Of Solids By Using Liquids Or Pneumatic Power (AREA)
  • Separation, Recovery Or Treatment Of Waste Materials Containing Plastics (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Processing Of Solid Wastes (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Centrifugal Separators (AREA)

Abstract

PARA SEPARAR UN MIEMBRO COMPUESTO, QUE CONSTA DE UNA PLURALIDAD DE MIEMBROS UNIDOS (1 Y 2), SIN DESTRUIRLO NI DAÑARLO, UN FLUIDO (7) ES PROYECTADO A CHORRO CONTRA EL MIEMBRO COMPUESTO DESDE UNA BOQUILLA (8) PARA SEPARARLO EN UNA PLURALIDAD DE MIEMBROS (11 Y 12) EN UNA POSICION (3) DIFERENTE DE LA POSICION DE UNION (14).
ES98302313T 1997-03-27 1998-03-26 Metodo y aparato para el corte de un substrato compuesto por utilizacion de un fluido. Expired - Lifetime ES2182226T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7549897 1997-03-27
JP13847797 1997-05-28

Publications (1)

Publication Number Publication Date
ES2182226T3 true ES2182226T3 (es) 2003-03-01

Family

ID=26416627

Family Applications (2)

Application Number Title Priority Date Filing Date
ES98302313T Expired - Lifetime ES2182226T3 (es) 1997-03-27 1998-03-26 Metodo y aparato para el corte de un substrato compuesto por utilizacion de un fluido.
ES01202222T Expired - Lifetime ES2206379T3 (es) 1997-03-27 1998-03-26 Aparato para separar un elemento compuesto utilizando un chorro de fluido.

Family Applications After (1)

Application Number Title Priority Date Filing Date
ES01202222T Expired - Lifetime ES2206379T3 (es) 1997-03-27 1998-03-26 Aparato para separar un elemento compuesto utilizando un chorro de fluido.

Country Status (11)

Country Link
US (5) US6382292B1 (es)
EP (2) EP0867917B1 (es)
KR (2) KR100397607B1 (es)
CN (2) CN100477072C (es)
AT (2) ATE254802T1 (es)
AU (1) AU747567B2 (es)
CA (1) CA2233127C (es)
DE (2) DE69819940T2 (es)
ES (2) ES2182226T3 (es)
SG (1) SG68035A1 (es)
TW (1) TW463229B (es)

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US20040171233A1 (en) 2004-09-02
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EP0867917B1 (en) 2002-09-11
ATE224098T1 (de) 2002-09-15
AU747567B2 (en) 2002-05-16
DE69807767D1 (de) 2002-10-17
KR100397607B1 (ko) 2003-10-17
DE69819940T2 (de) 2004-08-19
CN100477072C (zh) 2009-04-08
SG68035A1 (en) 1999-10-19
US20020179243A1 (en) 2002-12-05
ATE254802T1 (de) 2003-12-15
EP1134790A3 (en) 2001-12-19
US6746559B2 (en) 2004-06-08
TW463229B (en) 2001-11-11
EP1134790A2 (en) 2001-09-19
US20020088558A1 (en) 2002-07-11
CN1208246A (zh) 1999-02-17
DE69819940D1 (de) 2003-12-24
KR19980080777A (ko) 1998-11-25
AU5966298A (en) 1998-10-01
CA2233127C (en) 2004-07-06
CN1157762C (zh) 2004-07-14
EP0867917A2 (en) 1998-09-30
KR100401448B1 (ko) 2003-10-17
EP0867917A3 (en) 2000-05-17
CN1444252A (zh) 2003-09-24
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CA2233127A1 (en) 1998-09-27
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