EP2879164A4 - Dispositif et procédé de découpage en dés - Google Patents
Dispositif et procédé de découpage en désInfo
- Publication number
- EP2879164A4 EP2879164A4 EP13803775.9A EP13803775A EP2879164A4 EP 2879164 A4 EP2879164 A4 EP 2879164A4 EP 13803775 A EP13803775 A EP 13803775A EP 2879164 A4 EP2879164 A4 EP 2879164A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- dicing
- dicing method
- dicing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
- B28D5/0029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rotating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Dicing (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012136060 | 2012-06-15 | ||
PCT/JP2013/066501 WO2013187510A1 (fr) | 2012-06-15 | 2013-06-14 | Dispositif et procédé de découpage en dés |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2879164A1 EP2879164A1 (fr) | 2015-06-03 |
EP2879164A4 true EP2879164A4 (fr) | 2015-11-25 |
EP2879164B1 EP2879164B1 (fr) | 2017-09-13 |
Family
ID=49758328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP13803775.9A Not-in-force EP2879164B1 (fr) | 2012-06-15 | 2013-06-14 | Dispositif et procédé de découpage en dés |
Country Status (6)
Country | Link |
---|---|
US (1) | US20150099428A1 (fr) |
EP (1) | EP2879164B1 (fr) |
JP (2) | JP5748914B2 (fr) |
KR (2) | KR20150004931A (fr) |
CN (1) | CN104364884B (fr) |
WO (1) | WO2013187510A1 (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6077799B2 (ja) * | 2012-08-31 | 2017-02-08 | 三星ダイヤモンド工業株式会社 | カッターホイール並びにその製造方法 |
JP6287774B2 (ja) * | 2014-11-19 | 2018-03-07 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
JP6600267B2 (ja) * | 2016-03-15 | 2019-10-30 | 株式会社ディスコ | 被加工物の切削方法 |
JP6440903B2 (ja) * | 2016-04-21 | 2018-12-19 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
WO2018066508A1 (fr) * | 2016-10-05 | 2018-04-12 | 日本電気硝子株式会社 | Procédé de production de stratifié de résine de verre, et stratifié de résine de verre |
CN110769975B (zh) * | 2018-03-16 | 2022-04-08 | 安达满纳米奇精密宝石有限公司 | 金刚石晶体的研磨方法和金刚石晶体 |
JP7009306B2 (ja) * | 2018-05-21 | 2022-01-25 | 株式会社ディスコ | 切削装置 |
JP2021040097A (ja) * | 2019-09-05 | 2021-03-11 | 株式会社ディスコ | 被加工物の切削方法 |
CN112318337A (zh) * | 2019-12-20 | 2021-02-05 | 沈阳和研科技有限公司 | 一种砂轮划片机切割有翘曲变形玻璃的方法 |
US11348798B2 (en) * | 2020-02-07 | 2022-05-31 | Akoustis, Inc. | Methods of forming integrated circuit devices using cutting tools to expose metallization pads through a cap structure and related cutting devices |
JP7394712B2 (ja) * | 2020-06-24 | 2023-12-08 | Towa株式会社 | 切断装置及び切断品の製造方法 |
TWI832179B (zh) * | 2022-03-22 | 2024-02-11 | 盛新材料科技股份有限公司 | 晶圓定位治具及使用其的晶圓加工方法 |
CN117300844B (zh) * | 2023-11-28 | 2024-02-02 | 中铁工程装备集团(天津)有限公司 | 一种具有圆跳动检测功能的磨削设备 |
Citations (6)
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---|---|---|---|---|
JPH05144937A (ja) * | 1991-11-18 | 1993-06-11 | Fujitsu Miyagi Electron:Kk | ダイシングブレード |
JPH06151586A (ja) * | 1992-11-12 | 1994-05-31 | Sony Corp | ダイシング方法および装置 |
JP2003282490A (ja) * | 2002-03-27 | 2003-10-03 | Hitachi Ltd | 半導体装置及びその製造方法 |
WO2008004365A1 (fr) * | 2006-07-07 | 2008-01-10 | Tokyo Seimitsu Co., Ltd. | Appareil et procédé de découpage en dés |
US20110132954A1 (en) * | 2008-06-05 | 2011-06-09 | Maoko Tomei | Scribing wheel and method for scribing brittle material substrate |
JP2012030992A (ja) * | 2010-07-29 | 2012-02-16 | Mitsuboshi Diamond Industrial Co Ltd | スクライビングホイール、スクライブ装置、およびスクライブ方法 |
Family Cites Families (61)
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US3156077A (en) * | 1963-02-06 | 1964-11-10 | Continental Machines | Diamond edge saw blade |
US3371452A (en) * | 1965-02-08 | 1968-03-05 | Christensen Diamond Prod Co | Diamond saw or milling blades |
US3574580A (en) * | 1968-11-08 | 1971-04-13 | Atomic Energy Commission | Process for producing sintered diamond compact and products |
US3912500A (en) * | 1972-12-27 | 1975-10-14 | Leonid Fedorovich Vereschagin | Process for producing diamond-metallic materials |
US4151686A (en) * | 1978-01-09 | 1979-05-01 | General Electric Company | Silicon carbide and silicon bonded polycrystalline diamond body and method of making it |
US4180048A (en) * | 1978-06-12 | 1979-12-25 | Regan Barrie F | Cutting wheel |
AU583299B1 (en) * | 1984-08-24 | 1989-04-27 | Australian National University, The | Diamond compacts and process for making same |
EP0174546B1 (fr) * | 1984-09-08 | 1991-07-24 | Sumitomo Electric Industries, Ltd. | Corps de diamant fritté pour outils et son procédé de fabrication |
JPS61104045A (ja) | 1984-10-26 | 1986-05-22 | Sumitomo Electric Ind Ltd | 工具用ダイヤモンド焼結体 |
EP0308440B1 (fr) * | 1987-03-23 | 1991-06-05 | The Australian National University | Agglomeres de diamant |
JP3209818B2 (ja) * | 1993-03-08 | 2001-09-17 | 株式会社東京精密 | ダイシング装置の切削刃取付構造 |
JPH07276137A (ja) | 1994-03-31 | 1995-10-24 | Osaka Diamond Ind Co Ltd | 切削・研削用工具 |
US5479911A (en) * | 1994-05-13 | 1996-01-02 | Kulicke And Soffa Investments Inc | Diamond impregnated resinoid cutting blade |
US5888129A (en) * | 1996-05-15 | 1999-03-30 | Neff; Charles E. | Grinding wheel |
JP3610716B2 (ja) * | 1997-01-23 | 2005-01-19 | トヨタ自動車株式会社 | 鋳物のシール面の加工方法 |
US20040112359A1 (en) * | 1997-04-04 | 2004-06-17 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
JP4274588B2 (ja) * | 1997-07-16 | 2009-06-10 | 株式会社石塚研究所 | 複合材料の製造方法 |
US20040112360A1 (en) * | 1998-02-12 | 2004-06-17 | Boucher John N. | Substrate dicing method |
WO2000006340A1 (fr) * | 1998-07-31 | 2000-02-10 | Norton Company | Outil de dressage rotatif contenant une couche de diamant brasee |
JP2001038636A (ja) * | 1999-07-26 | 2001-02-13 | Kimiko Sueda | ホイールカッターの薄刃ブレード |
JP3308246B2 (ja) | 1999-08-18 | 2002-07-29 | 株式会社リード | 希土類磁石切断用ダイヤモンドブレードの芯金 |
JP3892204B2 (ja) | 2000-03-29 | 2007-03-14 | 株式会社リード | 希土類磁石切断用ブレード及びその製造方法 |
JP2002192469A (ja) * | 2000-12-27 | 2002-07-10 | Allied Material Corp | 超砥粒薄刃切断砥石 |
WO2002055264A1 (fr) * | 2001-01-16 | 2002-07-18 | Nikon Corporation | Pastille de meule, meule, et leurs procedes de production, procede de production d'elements optiques a l'aide la meule et procede de production d'aligneurs de projection |
US6706319B2 (en) * | 2001-12-05 | 2004-03-16 | Siemens Westinghouse Power Corporation | Mixed powder deposition of components for wear, erosion and abrasion resistant applications |
JP4189156B2 (ja) * | 2002-02-22 | 2008-12-03 | 株式会社トクヤマ | チップ貼設シート |
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JP2003326466A (ja) | 2002-05-09 | 2003-11-18 | Read Co Ltd | 高剛性切断用ブレード及びその製造方法 |
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JP2005082414A (ja) * | 2003-09-04 | 2005-03-31 | Tokyo Metropolis | セラミック材の切削方法及び切削装置 |
US20050210755A1 (en) * | 2003-09-05 | 2005-09-29 | Cho Hyun S | Doubled-sided and multi-layered PCBN and PCD abrasive articles |
JP2005129741A (ja) | 2003-10-24 | 2005-05-19 | Tokyo Seimitsu Co Ltd | ダイシングブレード及びダイシング方法 |
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JP2006082197A (ja) * | 2004-09-17 | 2006-03-30 | Toyoda Mach Works Ltd | 砥石車 |
JP4714453B2 (ja) | 2004-10-25 | 2011-06-29 | 株式会社リード | ダイヤモンドまたはcBN工具及びその製造方法 |
JP2006253441A (ja) * | 2005-03-11 | 2006-09-21 | Kumamoto Univ | ブレード加工方法 |
KR100639778B1 (ko) * | 2005-05-03 | 2006-10-31 | 조창신 | 절삭부 구조 및 상기 절삭부구조를 갖는 톱날 |
US20080251061A1 (en) * | 2005-06-27 | 2008-10-16 | Anthony Baratta | Tools and Methods for Making and Using Tools, Blades and Methods of Making and Using Blades |
US20070023026A1 (en) * | 2005-07-28 | 2007-02-01 | Broyles Michelle | Dicing blade |
JP2007118581A (ja) * | 2005-09-28 | 2007-05-17 | Hiroshi Ishizuka | 硬脆性材料の薄板及びその製造方法 |
JP2007216377A (ja) * | 2006-01-20 | 2007-08-30 | Tokyo Seimitsu Co Ltd | ダイシング装置及びダイシング方法 |
EP2049306B1 (fr) * | 2006-07-31 | 2013-07-03 | Element Six Abrasives S.A. | Pastilles abrasives |
KR100804049B1 (ko) * | 2006-11-16 | 2008-02-18 | 신한다이아몬드공업 주식회사 | 다이아몬드 공구 및 다이아몬드 공구의 세그먼트 제조방법 |
DE202007013306U1 (de) * | 2007-09-22 | 2008-04-24 | Bohle Ag | Schneidrädchen |
JP2010005778A (ja) | 2008-06-30 | 2010-01-14 | Mitsubishi Materials Corp | 電鋳ブレード |
GB0902230D0 (en) * | 2009-02-11 | 2009-03-25 | Element Six Production Pty Ltd | Polycrystalline super-hard element |
JP5357580B2 (ja) * | 2009-03-09 | 2013-12-04 | 三星ダイヤモンド工業株式会社 | 溝加工ツールおよびこれを用いた薄膜太陽電池の溝加工方法 |
JP2010234597A (ja) | 2009-03-31 | 2010-10-21 | Mitsubishi Materials Corp | 切断ブレード、切断ブレードの製造方法及び切断加工装置 |
US20110073094A1 (en) * | 2009-09-28 | 2011-03-31 | 3M Innovative Properties Company | Abrasive article with solid core and methods of making the same |
JP5534181B2 (ja) * | 2010-03-12 | 2014-06-25 | 住友電気工業株式会社 | ダイヤモンド多結晶体 |
US9238290B2 (en) * | 2010-05-21 | 2016-01-19 | Honda Motor Co., Ltd. | Grindstone, grindstone manufacturing method, boring tool, abrasive grain positioning jig, and relief surface forming method |
CN101870008B (zh) * | 2010-06-11 | 2012-01-11 | 西安点石超硬材料发展有限公司 | 基于锯式切割qfn封装基板的烧结金属基金刚石锯刀 |
JP5195981B2 (ja) * | 2010-10-26 | 2013-05-15 | 三星ダイヤモンド工業株式会社 | スクライブヘッドおよびスクライブ装置 |
JP4852178B1 (ja) * | 2011-04-26 | 2012-01-11 | 株式会社テクノホロン | ダイシング装置 |
WO2013027243A1 (fr) * | 2011-08-24 | 2013-02-28 | 新日鉄マテリアルズ株式会社 | Meule de biseautage |
KR101252406B1 (ko) * | 2011-09-07 | 2013-04-08 | 이화다이아몬드공업 주식회사 | 절삭성이 우수한 브레이징 본드 타입 다이아몬드 공구 제조 방법 |
US9316059B1 (en) * | 2012-08-21 | 2016-04-19 | Us Synthetic Corporation | Polycrystalline diamond compact and applications therefor |
-
2013
- 2013-06-14 KR KR20147034629A patent/KR20150004931A/ko active Application Filing
- 2013-06-14 WO PCT/JP2013/066501 patent/WO2013187510A1/fr active Application Filing
- 2013-06-14 CN CN201380031514.7A patent/CN104364884B/zh not_active Expired - Fee Related
- 2013-06-14 KR KR1020167003252A patent/KR102022754B1/ko active IP Right Grant
- 2013-06-14 JP JP2014521434A patent/JP5748914B2/ja not_active Expired - Fee Related
- 2013-06-14 EP EP13803775.9A patent/EP2879164B1/fr not_active Not-in-force
-
2014
- 2014-12-12 US US14/569,061 patent/US20150099428A1/en not_active Abandoned
-
2015
- 2015-05-11 JP JP2015096460A patent/JP5888827B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05144937A (ja) * | 1991-11-18 | 1993-06-11 | Fujitsu Miyagi Electron:Kk | ダイシングブレード |
JPH06151586A (ja) * | 1992-11-12 | 1994-05-31 | Sony Corp | ダイシング方法および装置 |
JP2003282490A (ja) * | 2002-03-27 | 2003-10-03 | Hitachi Ltd | 半導体装置及びその製造方法 |
WO2008004365A1 (fr) * | 2006-07-07 | 2008-01-10 | Tokyo Seimitsu Co., Ltd. | Appareil et procédé de découpage en dés |
US20110132954A1 (en) * | 2008-06-05 | 2011-06-09 | Maoko Tomei | Scribing wheel and method for scribing brittle material substrate |
JP2012030992A (ja) * | 2010-07-29 | 2012-02-16 | Mitsuboshi Diamond Industrial Co Ltd | スクライビングホイール、スクライブ装置、およびスクライブ方法 |
Non-Patent Citations (1)
Title |
---|
See also references of WO2013187510A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP2015164215A (ja) | 2015-09-10 |
CN104364884A (zh) | 2015-02-18 |
JP5888827B2 (ja) | 2016-03-22 |
EP2879164A1 (fr) | 2015-06-03 |
KR102022754B1 (ko) | 2019-09-18 |
KR20160021904A (ko) | 2016-02-26 |
KR20150004931A (ko) | 2015-01-13 |
JPWO2013187510A1 (ja) | 2016-02-08 |
CN104364884B (zh) | 2017-06-23 |
EP2879164B1 (fr) | 2017-09-13 |
US20150099428A1 (en) | 2015-04-09 |
WO2013187510A1 (fr) | 2013-12-19 |
JP5748914B2 (ja) | 2015-07-15 |
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