EP2809754A1 - Kühl- und/oder schmierflüssigkeiten zur waferherstellung - Google Patents

Kühl- und/oder schmierflüssigkeiten zur waferherstellung

Info

Publication number
EP2809754A1
EP2809754A1 EP13703001.1A EP13703001A EP2809754A1 EP 2809754 A1 EP2809754 A1 EP 2809754A1 EP 13703001 A EP13703001 A EP 13703001A EP 2809754 A1 EP2809754 A1 EP 2809754A1
Authority
EP
European Patent Office
Prior art keywords
cooling
lubricating
atoms
radical
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13703001.1A
Other languages
German (de)
English (en)
French (fr)
Inventor
Hans-Peter Seelmann-Eggebert
Sophie Maitro-Vogel
Eva-Maria REIS-WALTHER
Joachim Bentele
Lena ÄLVEBORN-JANSSON
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BASF SE
Original Assignee
BASF SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BASF SE filed Critical BASF SE
Priority to EP13703001.1A priority Critical patent/EP2809754A1/de
Publication of EP2809754A1 publication Critical patent/EP2809754A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
    • C10M107/20—Lubricating compositions characterised by the base-material being a macromolecular compound containing oxygen
    • C10M107/30—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M107/32—Condensation polymers of aldehydes or ketones; Polyesters; Polyethers
    • C10M107/34—Polyoxyalkylenes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
    • C10M2209/1085—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2040/00—Specified use or application for which the lubricating composition is intended
    • C10N2040/20—Metal working
    • C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Lubricants (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
EP13703001.1A 2012-02-01 2013-02-01 Kühl- und/oder schmierflüssigkeiten zur waferherstellung Withdrawn EP2809754A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP13703001.1A EP2809754A1 (de) 2012-02-01 2013-02-01 Kühl- und/oder schmierflüssigkeiten zur waferherstellung

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12153406 2012-02-01
EP13703001.1A EP2809754A1 (de) 2012-02-01 2013-02-01 Kühl- und/oder schmierflüssigkeiten zur waferherstellung
PCT/EP2013/051992 WO2013113859A1 (de) 2012-02-01 2013-02-01 Kühl- und/oder schmierflüssigkeiten zur waferherstellung

Publications (1)

Publication Number Publication Date
EP2809754A1 true EP2809754A1 (de) 2014-12-10

Family

ID=47678770

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13703001.1A Withdrawn EP2809754A1 (de) 2012-02-01 2013-02-01 Kühl- und/oder schmierflüssigkeiten zur waferherstellung

Country Status (7)

Country Link
EP (1) EP2809754A1 (ko)
JP (1) JP2015505574A (ko)
KR (1) KR20140110107A (ko)
CN (1) CN104204161B (ko)
RU (1) RU2014135277A (ko)
SG (2) SG11201404402YA (ko)
WO (1) WO2013113859A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016211883B4 (de) 2016-06-30 2018-02-08 Siltronic Ag Verfahren und Vorrichtung zur Wiederaufnahme des Drahtsägeprozesses eines Werkstückes nach einer unplanmäßigen Unterbrechung
CN110217367B (zh) * 2019-05-13 2020-08-11 浙江大学 一种基于声表面波驱动的液体中运动的微型推进器及其制备方法

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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD292145A5 (de) * 1988-05-09 1991-07-25 ������@������������k�� Nichtionogenes netzmittel fuer schwernetzbare staeube
DD292147B5 (de) * 1988-05-09 1994-05-05 Buna Ag Netzmittel fuer schwerbenetzbare Staeube
WO2004005230A1 (en) * 2002-07-04 2004-01-15 Akzo Nobel Nv An alkoxylate mixture and its use as a cleaning agent for hard surfaces

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2013113859A1 *

Also Published As

Publication number Publication date
SG10201606190WA (en) 2016-09-29
CN104204161B (zh) 2017-05-17
WO2013113859A1 (de) 2013-08-08
CN104204161A (zh) 2014-12-10
KR20140110107A (ko) 2014-09-16
JP2015505574A (ja) 2015-02-23
RU2014135277A (ru) 2016-03-20
SG11201404402YA (en) 2014-10-30

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