SG11201404402YA - Cooling and/or lubricating fluids for wafer production - Google Patents

Cooling and/or lubricating fluids for wafer production

Info

Publication number
SG11201404402YA
SG11201404402YA SG11201404402YA SG11201404402YA SG11201404402YA SG 11201404402Y A SG11201404402Y A SG 11201404402YA SG 11201404402Y A SG11201404402Y A SG 11201404402YA SG 11201404402Y A SG11201404402Y A SG 11201404402YA SG 11201404402Y A SG11201404402Y A SG 11201404402YA
Authority
SG
Singapore
Prior art keywords
cooling
wafer production
lubricating fluids
lubricating
fluids
Prior art date
Application number
SG11201404402YA
Other languages
English (en)
Inventor
Hans-Peter Seelmann-Eggebert
Sophie Maitro-Vogel
Eva-Maria Reis-Walther
Joachim Bentele
Lena Älveborn-Jansson
Original Assignee
Basf Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Basf Se filed Critical Basf Se
Publication of SG11201404402YA publication Critical patent/SG11201404402YA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
    • C10M107/20—Lubricating compositions characterised by the base-material being a macromolecular compound containing oxygen
    • C10M107/30—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M107/32—Condensation polymers of aldehydes or ketones; Polyesters; Polyethers
    • C10M107/34—Polyoxyalkylenes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
    • C10M2209/1085—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2040/00—Specified use or application for which the lubricating composition is intended
    • C10N2040/20—Metal working
    • C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
SG11201404402YA 2012-02-01 2013-02-01 Cooling and/or lubricating fluids for wafer production SG11201404402YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12153406 2012-02-01
PCT/EP2013/051992 WO2013113859A1 (de) 2012-02-01 2013-02-01 Kühl- und/oder schmierflüssigkeiten zur waferherstellung

Publications (1)

Publication Number Publication Date
SG11201404402YA true SG11201404402YA (en) 2014-10-30

Family

ID=47678770

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201404402YA SG11201404402YA (en) 2012-02-01 2013-02-01 Cooling and/or lubricating fluids for wafer production
SG10201606190WA SG10201606190WA (en) 2012-02-01 2013-02-01 Cooling and/or lubricating fluids for wafer production

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201606190WA SG10201606190WA (en) 2012-02-01 2013-02-01 Cooling and/or lubricating fluids for wafer production

Country Status (7)

Country Link
EP (1) EP2809754A1 (ko)
JP (1) JP2015505574A (ko)
KR (1) KR20140110107A (ko)
CN (1) CN104204161B (ko)
RU (1) RU2014135277A (ko)
SG (2) SG11201404402YA (ko)
WO (1) WO2013113859A1 (ko)

Families Citing this family (2)

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DE102016211883B4 (de) 2016-06-30 2018-02-08 Siltronic Ag Verfahren und Vorrichtung zur Wiederaufnahme des Drahtsägeprozesses eines Werkstückes nach einer unplanmäßigen Unterbrechung
CN110217367B (zh) * 2019-05-13 2020-08-11 浙江大学 一种基于声表面波驱动的液体中运动的微型推进器及其制备方法

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Also Published As

Publication number Publication date
SG10201606190WA (en) 2016-09-29
CN104204161B (zh) 2017-05-17
WO2013113859A1 (de) 2013-08-08
EP2809754A1 (de) 2014-12-10
CN104204161A (zh) 2014-12-10
KR20140110107A (ko) 2014-09-16
JP2015505574A (ja) 2015-02-23
RU2014135277A (ru) 2016-03-20

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