EP0773167A4 - Recipients de plastique a revetement mince de carbone, leur appareil de fabrication et procede associe - Google Patents

Recipients de plastique a revetement mince de carbone, leur appareil de fabrication et procede associe

Info

Publication number
EP0773167A4
EP0773167A4 EP95927997A EP95927997A EP0773167A4 EP 0773167 A4 EP0773167 A4 EP 0773167A4 EP 95927997 A EP95927997 A EP 95927997A EP 95927997 A EP95927997 A EP 95927997A EP 0773167 A4 EP0773167 A4 EP 0773167A4
Authority
EP
European Patent Office
Prior art keywords
hollow
container
outer electrode
housed
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95927997A
Other languages
German (de)
English (en)
Other versions
EP0773167B1 (fr
EP0773167A1 (fr
Inventor
Kazufumi Nagashima
Hideaki Shima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KABUSHIKI KAISHA SAMCO INTERNATIONAL KENKYUSHO
Kirin Brewery Co Ltd
Original Assignee
Kirin Brewery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kirin Brewery Co Ltd filed Critical Kirin Brewery Co Ltd
Publication of EP0773167A1 publication Critical patent/EP0773167A1/fr
Publication of EP0773167A4 publication Critical patent/EP0773167A4/fr
Application granted granted Critical
Publication of EP0773167B1 publication Critical patent/EP0773167B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D1/00—Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B05B5/12—Plant for applying liquids or other fluent materials to objects specially adapted for coating the interior of hollow bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
    • B05D7/227—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes of containers, cans or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D23/00—Details of bottles or jars not otherwise provided for
    • B65D23/02—Linings or internal coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45578—Elongated nozzles, tubes with holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Ceramic Engineering (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Chemical Vapour Deposition (AREA)
  • Containers Having Bodies Formed In One Piece (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
  • Carbon And Carbon Compounds (AREA)
EP95927997A 1994-08-11 1995-08-09 Recipients de plastique a revetement mince de carbone, leur appareil de fabrication et procede associe Expired - Lifetime EP0773167B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP6189224A JP2788412B2 (ja) 1994-08-11 1994-08-11 炭素膜コーティングプラスチック容器の製造装置および製造方法
JP18922494 1994-08-11
JP189224/94 1994-08-11
PCT/JP1995/001583 WO1996005112A1 (fr) 1994-08-11 1995-08-09 Recipients de plastique a revetement mince de carbone, leur appareil de fabrication et procede associe

Publications (3)

Publication Number Publication Date
EP0773167A1 EP0773167A1 (fr) 1997-05-14
EP0773167A4 true EP0773167A4 (fr) 1999-08-18
EP0773167B1 EP0773167B1 (fr) 2002-10-16

Family

ID=16237661

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95927997A Expired - Lifetime EP0773167B1 (fr) 1994-08-11 1995-08-09 Recipients de plastique a revetement mince de carbone, leur appareil de fabrication et procede associe

Country Status (11)

Country Link
US (1) US5798139A (fr)
EP (1) EP0773167B1 (fr)
JP (1) JP2788412B2 (fr)
KR (1) KR100347249B1 (fr)
AT (1) ATE226166T1 (fr)
CA (1) CA2196894C (fr)
DE (1) DE69528588T2 (fr)
DK (1) DK0773167T3 (fr)
MY (1) MY113185A (fr)
TW (1) TW493012B (fr)
WO (1) WO1996005112A1 (fr)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0853116A (ja) * 1994-08-11 1996-02-27 Kirin Brewery Co Ltd 炭素膜コーティングプラスチック容器
US5965217A (en) * 1996-10-08 1999-10-12 Citizen Watch Co., Ltd. Method of forming DLC films over inner surface of cylindrical member
AU776224B2 (en) * 1997-02-19 2004-09-02 Kirin Beer Kabushiki Kaisha Apparatus and method for manufacturing plastic container coated with carbon film
WO1998037259A1 (fr) * 1997-02-19 1998-08-27 Kirin Beer Kabushiki Kaisha Procede et appareil pour produire un recipient plastique presentant un pelliculage en carbone
US5879763A (en) * 1997-09-03 1999-03-09 Citizen Watch Co., Ltd. Method of forming hard carbon film over inner surface of cylindrical member
BR9812701A (pt) * 1997-09-30 2000-08-22 Tetra Laval Holdings & Finance Método e aparelho para o tratamento da superfìcie interna de garrafas plásticas em um processo intensificado por plasma
JP3669138B2 (ja) 1998-03-05 2005-07-06 日新電機株式会社 プラズマｃｖｄ法、プラズマｃｖｄ装置及び電極
US6335086B1 (en) 1999-05-03 2002-01-01 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6261693B1 (en) 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6447891B1 (en) 1999-05-03 2002-09-10 Guardian Industries Corp. Low-E coating system including protective DLC
US6368664B1 (en) 1999-05-03 2002-04-09 Guardian Industries Corp. Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon
US6277480B1 (en) 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
US6461731B1 (en) 1999-05-03 2002-10-08 Guardian Industries Corp. Solar management coating system including protective DLC
US6475573B1 (en) 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
US6312808B1 (en) 1999-05-03 2001-11-06 Guardian Industries Corporation Hydrophobic coating with DLC & FAS on substrate
US6280834B1 (en) 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate
KR100610130B1 (ko) * 1999-05-19 2006-08-09 미쯔비시 쇼지 플라스틱 가부시키가이샤 Ｄｌｃ막, ｄｌｃ막 코팅 플라스틱 용기, 그 제조장치 및그 제조방법
US6475579B1 (en) 1999-08-06 2002-11-05 Plastipak Packaging, Inc. Multi-layer plastic container having a carbon-treated internal surface and method for making the same
MXPA01003219A (es) 1999-08-06 2002-07-02 Plastipak Packaging Inc Recipiente plastico con una superficie interna tratada con carbon.
FR2799994B1 (fr) * 1999-10-25 2002-06-07 Sidel Sa Dispositif pour le traitement d'un recipient a l'aide d'un plasma a basse pression comportant un circuit de vide perfectionne
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US6528947B1 (en) 1999-12-06 2003-03-04 E. I. Du Pont De Nemours And Company Hollow cathode array for plasma generation
US20030087030A1 (en) * 1999-12-27 2003-05-08 Kenichi Hama Pet container for foods and drinks containing recycled resin and having dlc coating film formed on surface thereof
DE10004274A1 (de) * 2000-02-01 2001-08-02 Tetra Laval Holdings & Finance Vorrichtung zum Beschichten der inneren Oberfläche eines Hohlkörpers
JP4492985B2 (ja) 2000-02-24 2010-06-30 三菱商事プラスチック株式会社 液体医薬品用プラスチック容器及び液体医薬品の保存回収方法
JP2001240115A (ja) * 2000-02-24 2001-09-04 Mitsubishi Shoji Plast Kk 乾燥固体食品用プラスチック容器
JP2001322656A (ja) * 2000-05-15 2001-11-20 Hokkai Can Co Ltd 合成樹脂製キャップ
FR2812665B1 (fr) * 2000-08-01 2003-08-08 Sidel Sa Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede
JP3993971B2 (ja) * 2000-08-09 2007-10-17 北海製罐株式会社 ガスバリア被覆層を有するプラスチック製容器及びその製法
FR2814382B1 (fr) * 2000-09-28 2003-05-09 Cebal Procede de depot d'un revetement interne dans un recipient en matiere plastique
US6461699B1 (en) * 2000-10-06 2002-10-08 Plastipak Packaging, Inc. Plastic container having a carbon-treated internal surface for non-carbonated food products
DE10054653A1 (de) * 2000-11-03 2002-05-08 Ver Foerderung Inst Kunststoff Verfahren und Vorrichtung zum Beschichten von Hohlkörper
WO2002049925A1 (fr) * 2000-12-21 2002-06-27 Mitsubishi Shoji Plastics Corporation Appareil de fabrication de recipients de plastique revetus de dlc leur procede de fabrication associe et procede de nettoyage de l'electrode interieure
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BR0204833B1 (pt) 2001-04-19 2012-05-02 máquina que confecciona um recipiente de resina sintética com barreira de gás, e, recipiente de resina sintética com barreira de gás.
JP4659279B2 (ja) * 2001-06-19 2011-03-30 北海製罐株式会社 プラスチック製ボトルの内面被膜検査方法
JPWO2003000558A1 (ja) * 2001-06-20 2004-10-07 三菱商事プラスチック株式会社 間仕切板付き水分・ガスバリア性プラスチック容器、その製造装置及びその製造方法
EP1400456A1 (fr) * 2001-06-26 2004-03-24 Mitsubishi Shoji Plastics Corporation Dispositif de fabrication d'un recipient en plastique revetu d'un film de carbone sous forme de diamant amorphe, recipient ainsi obtenu et procede de fabrication dudit recipient
JP3653035B2 (ja) * 2001-07-31 2005-05-25 三菱重工業株式会社 プラスチック容器内面への炭素膜形成装置および内面炭素膜被覆プラスチック容器の製造方法
DE10138696A1 (de) * 2001-08-07 2003-03-06 Schott Glas Verfahren und Vorrichtung zum gleichzeitigen Beschichten und Formen eines dreidimensionalen Körpers
DE10138697B4 (de) * 2001-08-07 2005-02-24 Schott Ag Verfahren und Vorrichtung zum Beschichten und Spritzblasen eines dreidimensionalen Körpers
DE10139305A1 (de) 2001-08-07 2003-03-06 Schott Glas Verbundmaterial aus einem Substratmaterial und einem Barriereschichtmaterial
DE10204363A1 (de) * 2002-02-02 2003-08-14 Schott Glas Interferenzbeschichtung zur Verbesserung des Energiehaushaltes von HID-Lampen
AU2002249596A1 (en) * 2002-04-15 2003-10-27 Mitsubishi Shoji Plastics Corporation System and method for forming dlc film on inner surface of plastic container
EP1507884B1 (fr) * 2002-05-24 2015-09-23 KHS Corpoplast GmbH Procede et dispositif pour le traitement au plasma de pieces
RU2336365C2 (ru) 2002-05-28 2008-10-20 Кирин Бир Кабусики Кайся Пластмассовая тара, покрытая алмазоподобной углеродной пленкой, устройство для изготовления такой тары и способ изготовления такой тары
JP4132982B2 (ja) * 2002-05-28 2008-08-13 麒麟麦酒株式会社 Ｄｌｃ膜コーティングプラスチック容器の製造装置
CN1659307A (zh) 2002-06-05 2005-08-24 三菱商事塑料株式会社 用于清洁cvd装置所用原料气导入管的方法和装置
JP4149748B2 (ja) 2002-06-24 2008-09-17 三菱商事プラスチック株式会社 ロータリー型量産用ｃｖｄ成膜装置及びプラスチック容器内表面へのｃｖｄ膜成膜方法
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US7513953B1 (en) * 2003-11-25 2009-04-07 Nano Scale Surface Systems, Inc. Continuous system for depositing films onto plastic bottles and method
FR2872718B1 (fr) * 2004-07-08 2006-10-20 Sidel Sa Sa Procede de traitement d'un recipient comportant des phases de pompage a vide et machine pour sa mise en oeuvre
JP4171452B2 (ja) 2004-10-18 2008-10-22 三菱重工食品包装機械株式会社 バリア膜形成用内部電極及び成膜装置
US20060198973A1 (en) * 2005-03-03 2006-09-07 Jester Randy D Packaging with cycloolefin food/beverage contact layer
KR101319809B1 (ko) 2005-05-27 2013-10-17 기린비루 가부시키가이샤 가스 배리어성 플라스틱 용기의 제조 장치, 그 용기의 제조방법 및 그 용기
DE102005040266A1 (de) * 2005-08-24 2007-03-01 Schott Ag Verfahren und Vorrichtung zur innenseitigen Plasmabehandlung von Hohlkörpern
EP1922435A1 (fr) * 2005-09-09 2008-05-21 Sidel Couche barriere
JP5355860B2 (ja) * 2007-03-16 2013-11-27 三菱重工食品包装機械株式会社 バリア膜形成装置、バリア膜形成方法及びバリア膜被覆容器
DE102007041573A1 (de) 2007-09-01 2009-03-05 Khs Corpoplast Gmbh & Co. Kg Verfahren und Vorrichtung zum Sterilisieren sowie Vorrichtung zur Blasformung von Behältern
DE102008037159A1 (de) * 2008-08-08 2010-02-11 Krones Ag Vorrichtung und Verfahren zur Plasmabehandlung von Hohlkörpern
US9260781B2 (en) * 2009-02-18 2016-02-16 Council Of Scientific And Industrial Research Process to deposit diamond like carbon as surface of a shaped object
JP4873037B2 (ja) * 2009-03-31 2012-02-08 東洋製罐株式会社 非耐圧性プラスチック容器
JP4372833B1 (ja) 2009-04-13 2009-11-25 麒麟麦酒株式会社 ガスバリア性薄膜コーティングプラスチック容器の製造方法
US20110001103A1 (en) * 2009-07-01 2011-01-06 Chi-Kuang Chen Elevating mechanism for measuring concentrations of medicines
DE102012201955A1 (de) * 2012-02-09 2013-08-14 Krones Ag Powerlanze und plasmaunterstützte Beschichtung mit Hochfrequenzeinkopplung
DE102012201956A1 (de) * 2012-02-09 2013-08-14 Krones Ag Hohlkathoden-Gaslanze für die Innenbeschichtung von Behältern
JP6047308B2 (ja) 2012-05-28 2016-12-21 日精エー・エス・ビー機械株式会社 樹脂容器用コーティング装置
JP6093552B2 (ja) 2012-11-08 2017-03-08 日精エー・エス・ビー機械株式会社 樹脂容器用コーティング装置
CN103014652B (zh) * 2012-12-07 2016-01-20 中国电子科技集团公司第十一研究所 单晶生长用石英安瓿内壁碳膜制备装置
ITFI20130001A1 (it) * 2013-01-02 2014-07-03 Enomatic S R L Dispositivo erogatore di bevande gassate.
CN104368482B (zh) * 2014-11-11 2016-06-29 深圳格普斯电热技术有限公司 电热膜的内壁喷涂装置及其喷涂方法

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EP0348690A2 (fr) * 1988-07-01 1990-01-03 Becton, Dickinson and Company Dispositif et procédé de traitement par plasma de tuyaux de petit diamètre
JPH0270059A (ja) * 1987-12-02 1990-03-08 Idemitsu Petrochem Co Ltd 器具およびその製造方法
EP0359567A2 (fr) * 1988-09-16 1990-03-21 Semiconductor Energy Laboratory Co., Ltd. Méthode et appareillage de traitement par plasma
EP0372696A2 (fr) * 1988-10-11 1990-06-13 Semiconductor Energy Laboratory Co., Ltd. Procédé de production d'un film à base de carbone
US5007374A (en) * 1988-03-22 1991-04-16 Semiconductor Energy Laboratory Co., Ltd. Apparatus for forming thin films in quantity
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WO1994000247A1 (fr) * 1992-06-26 1994-01-06 Polar Materials, Inc. Procedes et appareils permettant de traiter l'exterieur d'un recipient par son remplissage avec un gaz de polarisation
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EP0773167B1 (fr) 2002-10-16
WO1996005112A1 (fr) 1996-02-22
KR970704607A (ko) 1997-09-06
CA2196894A1 (fr) 1996-02-22
MY113185A (en) 2001-12-31
JP2788412B2 (ja) 1998-08-20
KR100347249B1 (ko) 2003-03-10
DE69528588D1 (de) 2002-11-21
DE69528588T2 (de) 2003-07-10
ATE226166T1 (de) 2002-11-15
US5798139A (en) 1998-08-25
CA2196894C (fr) 2005-12-27
JPH0853117A (ja) 1996-02-27
EP0773167A1 (fr) 1997-05-14
TW493012B (en) 2002-07-01
DK0773167T3 (da) 2003-02-17

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