FR2812665B1 - Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede - Google Patents
Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procedeInfo
- Publication number
- FR2812665B1 FR2812665B1 FR0010101A FR0010101A FR2812665B1 FR 2812665 B1 FR2812665 B1 FR 2812665B1 FR 0010101 A FR0010101 A FR 0010101A FR 0010101 A FR0010101 A FR 0010101A FR 2812665 B1 FR2812665 B1 FR 2812665B1
- Authority
- FR
- France
- Prior art keywords
- implementing
- coating
- deposition method
- plasma
- coating obtained
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
Priority Applications (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0010101A FR2812665B1 (fr) | 2000-08-01 | 2000-08-01 | Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede |
KR10-2003-7001179A KR20030033003A (ko) | 2000-08-01 | 2001-07-24 | 플라스마 코팅방법 |
BR0112873-6A BR0112873A (pt) | 2000-08-01 | 2001-07-24 | Processo de depósito de revestimento por plasma, dispositivo de execução do processo e revestimento obtido através de um tal processo |
AU2001279897A AU2001279897A1 (en) | 2000-08-01 | 2001-07-24 | Plasma coating method |
CN01813728A CN1446269A (zh) | 2000-08-01 | 2001-07-24 | 等离子涂层方法 |
CA002416521A CA2416521A1 (fr) | 2000-08-01 | 2001-07-24 | Procede de revetement par plasma |
JP2002516387A JP2004505177A (ja) | 2000-08-01 | 2001-07-24 | プラズマによるコーティング堆積方法、この方法の実施装置、およびこのような方法により得られるコーティング |
MXPA03000910A MXPA03000910A (es) | 2000-08-01 | 2001-07-24 | Metodo de revestimiento con plasma. |
PCT/FR2001/002406 WO2002010474A1 (fr) | 2000-08-01 | 2001-07-24 | Procede de revetement par plasma |
EP01958165A EP1309737A1 (fr) | 2000-08-01 | 2001-07-24 | Procede de revetement par plasma |
US10/333,824 US20030150858A1 (en) | 2000-08-01 | 2001-07-24 | Plasma coating method |
US10/918,373 US20050019481A1 (en) | 2000-08-01 | 2004-08-16 | Method of depositing coating by plasma; device for implementing the method and coating obtained by said method |
US10/918,372 US20050016459A1 (en) | 2000-08-01 | 2004-08-16 | Method of depositing coating by plasma; device for implementing the method and coating obtained by said method |
US10/918,374 US20050019577A1 (en) | 2000-08-01 | 2004-08-16 | Method of depositing coating by plasma; device for implementing the method and coating obtained by said method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0010101A FR2812665B1 (fr) | 2000-08-01 | 2000-08-01 | Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2812665A1 FR2812665A1 (fr) | 2002-02-08 |
FR2812665B1 true FR2812665B1 (fr) | 2003-08-08 |
Family
ID=8853164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0010101A Expired - Fee Related FR2812665B1 (fr) | 2000-08-01 | 2000-08-01 | Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede |
Country Status (11)
Country | Link |
---|---|
US (4) | US20030150858A1 (fr) |
EP (1) | EP1309737A1 (fr) |
JP (1) | JP2004505177A (fr) |
KR (1) | KR20030033003A (fr) |
CN (1) | CN1446269A (fr) |
AU (1) | AU2001279897A1 (fr) |
BR (1) | BR0112873A (fr) |
CA (1) | CA2416521A1 (fr) |
FR (1) | FR2812665B1 (fr) |
MX (1) | MXPA03000910A (fr) |
WO (1) | WO2002010474A1 (fr) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7166336B1 (en) * | 1999-05-19 | 2007-01-23 | Mitsubishi Shoji Plastics Corporation | DLC film, DLC-coated plastic container, and method and apparatus for manufacturing DLC-coated plastic container |
DE10224546A1 (de) * | 2002-05-24 | 2003-12-04 | Sig Technology Ltd | Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken |
US7513953B1 (en) * | 2003-11-25 | 2009-04-07 | Nano Scale Surface Systems, Inc. | Continuous system for depositing films onto plastic bottles and method |
WO2006058547A1 (fr) * | 2004-12-01 | 2006-06-08 | Sidel Participations | Procédé de fabrication d’un article polymère enduit de carbone par pecvd et article obtenu par un tel procédé |
JP2006261217A (ja) * | 2005-03-15 | 2006-09-28 | Canon Anelva Corp | 薄膜形成方法 |
JP2006315697A (ja) * | 2005-05-11 | 2006-11-24 | Hokkai Can Co Ltd | 炭酸飲料用プラスチックボトル |
US20090142525A1 (en) * | 2005-09-09 | 2009-06-04 | Sidel Participations | Barrier layer |
US20070172612A1 (en) * | 2006-01-23 | 2007-07-26 | Plastipak Packaging, Inc. | Plastic container |
DE102007062977B4 (de) * | 2007-12-21 | 2018-07-19 | Schott Ag | Verfahren zur Herstellung von Prozessgasen für die Dampfphasenabscheidung |
US8062470B2 (en) * | 2008-05-12 | 2011-11-22 | Yuri Glukhoy | Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers |
DE102009020385A1 (de) * | 2008-12-19 | 2010-07-01 | Erhard & Söhne GmbH | Druckluftbehälter für Nutzfahrzeuge und Verfahren zu dessen Herstellung |
DE102014106129A1 (de) | 2014-04-30 | 2015-11-05 | Thyssenkrupp Ag | Verfahren und Vorrichtung zur kontinuierlichen Präkursorzuführung |
GB201717996D0 (en) * | 2017-10-31 | 2017-12-13 | Portal Medical Ltd | Medicament dispenser device |
CN115366321A (zh) * | 2022-09-20 | 2022-11-22 | 湖南千山制药机械股份有限公司 | 塑料杯注镀一体机及注镀灌封一体机 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4698256A (en) * | 1984-04-02 | 1987-10-06 | American Cyanamid Company | Articles coated with adherent diamondlike carbon films |
US4877677A (en) * | 1985-02-19 | 1989-10-31 | Matsushita Electric Industrial Co., Ltd. | Wear-protected device |
US4725345A (en) * | 1985-04-22 | 1988-02-16 | Kabushiki Kaisha Kenwood | Method for forming a hard carbon thin film on article and applications thereof |
FR2592874B1 (fr) * | 1986-01-14 | 1990-08-03 | Centre Nat Rech Scient | Procede pour tremper un objet en verre ou vitreux et objet ainsi trempe |
US4809876A (en) * | 1987-08-27 | 1989-03-07 | Aluminum Company Of America | Container body having improved gas barrier properties |
JP2679067B2 (ja) * | 1987-12-15 | 1997-11-19 | 株式会社日本自動車部品総合研究所 | ダイヤモンド膜付基板の製造方法 |
US5190824A (en) * | 1988-03-07 | 1993-03-02 | Semiconductor Energy Laboratory Co., Ltd. | Electrostatic-erasing abrasion-proof coating |
DE3830249A1 (de) * | 1988-09-06 | 1990-03-15 | Schott Glaswerke | Plasmaverfahren zum beschichten ebener substrate |
US5266409A (en) * | 1989-04-28 | 1993-11-30 | Digital Equipment Corporation | Hydrogenated carbon compositions |
DE69112465T2 (de) * | 1990-03-30 | 1996-03-28 | Sumitomo Electric Industries | Polykristallines Diamantwerkzeug und Verfahren für seine Herstellung. |
CA2044543C (fr) * | 1990-08-10 | 1999-12-14 | Louis Kimball Bigelow | Pellicule multicouche ultra-dure |
CA2089288A1 (fr) * | 1992-03-20 | 1993-09-21 | David E. Slutz | Films multicouches de diamant obtenus par d.c.p.v. |
DE4236324C1 (fr) * | 1992-10-28 | 1993-09-02 | Schott Glaswerke, 55122 Mainz, De | |
US5470661A (en) * | 1993-01-07 | 1995-11-28 | International Business Machines Corporation | Diamond-like carbon films from a hydrocarbon helium plasma |
EP0643385A3 (fr) * | 1993-09-12 | 1996-01-17 | Fujitsu Ltd | Milieu d'enregistrement magnétique, tête magnétique et dispositif d'enregistrement magnétique. |
JP2788412B2 (ja) * | 1994-08-11 | 1998-08-20 | 麒麟麦酒株式会社 | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
JPH0853116A (ja) * | 1994-08-11 | 1996-02-27 | Kirin Brewery Co Ltd | 炭素膜コーティングプラスチック容器 |
US6063149A (en) * | 1995-02-24 | 2000-05-16 | Zimmer; Jerry W. | Graded grain size diamond layer |
US5824387A (en) * | 1996-02-05 | 1998-10-20 | Seagate Technology, Inc. | Magnetic disc with carbon protective layer having regions differing in hardness |
JP3256459B2 (ja) * | 1996-05-20 | 2002-02-12 | 株式会社大協精工 | 衛生品用容器及びその製造方法 |
DE19634795C2 (de) * | 1996-08-29 | 1999-11-04 | Schott Glas | Plasma-CVD-Anlage mit einem Array von Mikrowellen-Plasmaelektroden und Plasma-CVD-Verfahren |
US5942317A (en) * | 1997-01-31 | 1999-08-24 | International Business Machines Corporation | Hydrogenated carbon thin films |
JPH10217522A (ja) * | 1997-02-07 | 1998-08-18 | Fuji Photo Film Co Ltd | サーマルヘッドおよびサーマルヘッドの製造方法 |
AU744162B2 (en) * | 1997-02-19 | 2002-02-14 | Kirin Beer Kabushiki Kaisha | Method and apparatus for producing plastic container having carbon film coating |
US5879459A (en) * | 1997-08-29 | 1999-03-09 | Genus, Inc. | Vertically-stacked process reactor and cluster tool system for atomic layer deposition |
JPH10306377A (ja) * | 1997-05-02 | 1998-11-17 | Tokyo Electron Ltd | 微量ガス供給方法及びその装置 |
US6110544A (en) * | 1997-06-26 | 2000-08-29 | General Electric Company | Protective coating by high rate arc plasma deposition |
JPH11111644A (ja) * | 1997-09-30 | 1999-04-23 | Japan Pionics Co Ltd | 気化供給装置 |
US6194038B1 (en) * | 1998-03-20 | 2001-02-27 | Applied Materials, Inc. | Method for deposition of a conformal layer on a substrate |
US6475579B1 (en) * | 1999-08-06 | 2002-11-05 | Plastipak Packaging, Inc. | Multi-layer plastic container having a carbon-treated internal surface and method for making the same |
US6461699B1 (en) * | 2000-10-06 | 2002-10-08 | Plastipak Packaging, Inc. | Plastic container having a carbon-treated internal surface for non-carbonated food products |
-
2000
- 2000-08-01 FR FR0010101A patent/FR2812665B1/fr not_active Expired - Fee Related
-
2001
- 2001-07-24 CA CA002416521A patent/CA2416521A1/fr not_active Abandoned
- 2001-07-24 US US10/333,824 patent/US20030150858A1/en not_active Abandoned
- 2001-07-24 AU AU2001279897A patent/AU2001279897A1/en not_active Abandoned
- 2001-07-24 JP JP2002516387A patent/JP2004505177A/ja active Pending
- 2001-07-24 EP EP01958165A patent/EP1309737A1/fr not_active Withdrawn
- 2001-07-24 MX MXPA03000910A patent/MXPA03000910A/es unknown
- 2001-07-24 CN CN01813728A patent/CN1446269A/zh active Pending
- 2001-07-24 WO PCT/FR2001/002406 patent/WO2002010474A1/fr not_active Application Discontinuation
- 2001-07-24 BR BR0112873-6A patent/BR0112873A/pt not_active Application Discontinuation
- 2001-07-24 KR KR10-2003-7001179A patent/KR20030033003A/ko not_active Application Discontinuation
-
2004
- 2004-08-16 US US10/918,374 patent/US20050019577A1/en not_active Abandoned
- 2004-08-16 US US10/918,373 patent/US20050019481A1/en not_active Abandoned
- 2004-08-16 US US10/918,372 patent/US20050016459A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
AU2001279897A1 (en) | 2002-02-13 |
US20030150858A1 (en) | 2003-08-14 |
CN1446269A (zh) | 2003-10-01 |
US20050019577A1 (en) | 2005-01-27 |
EP1309737A1 (fr) | 2003-05-14 |
CA2416521A1 (fr) | 2002-02-07 |
US20050019481A1 (en) | 2005-01-27 |
JP2004505177A (ja) | 2004-02-19 |
MXPA03000910A (es) | 2003-10-06 |
BR0112873A (pt) | 2003-07-01 |
WO2002010474A1 (fr) | 2002-02-07 |
FR2812665A1 (fr) | 2002-02-08 |
US20050016459A1 (en) | 2005-01-27 |
KR20030033003A (ko) | 2003-04-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20120430 |