ATE226166T1 - Verfahren und vorrichtung zur herstellung eines mit kohlenstoffilm beschichteten kunststoffbehälters - Google Patents

Verfahren und vorrichtung zur herstellung eines mit kohlenstoffilm beschichteten kunststoffbehälters

Info

Publication number
ATE226166T1
ATE226166T1 AT95927997T AT95927997T ATE226166T1 AT E226166 T1 ATE226166 T1 AT E226166T1 AT 95927997 T AT95927997 T AT 95927997T AT 95927997 T AT95927997 T AT 95927997T AT E226166 T1 ATE226166 T1 AT E226166T1
Authority
AT
Austria
Prior art keywords
hollow
container
outer electrode
housed
electrode
Prior art date
Application number
AT95927997T
Other languages
English (en)
Inventor
Kazufumi Nagashima
Hideaki Shima
Fushimi-Ku Takeda
Original Assignee
Kirin Brewery
Samco Internat Kenkyusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kirin Brewery, Samco Internat Kenkyusho Kk filed Critical Kirin Brewery
Application granted granted Critical
Publication of ATE226166T1 publication Critical patent/ATE226166T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D1/00—Rigid or semi-rigid containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material or by deep-drawing operations performed on sheet material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B05B5/12—Plant for applying liquids or other fluent materials to objects specially adapted for coating the interior of hollow bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
    • B05D7/227—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes of containers, cans or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D23/00—Details of bottles or jars not otherwise provided for
    • B65D23/02—Linings or internal coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45578—Elongated nozzles, tubes with holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Ceramic Engineering (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Chemical Vapour Deposition (AREA)
  • Containers Having Bodies Formed In One Piece (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
AT95927997T 1994-08-11 1995-08-09 Verfahren und vorrichtung zur herstellung eines mit kohlenstoffilm beschichteten kunststoffbehälters ATE226166T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6189224A JP2788412B2 (ja) 1994-08-11 1994-08-11 炭素膜コーティングプラスチック容器の製造装置および製造方法
PCT/JP1995/001583 WO1996005112A1 (en) 1994-08-11 1995-08-09 Carbon film-coated plastic container manufacturing apparatus and method

Publications (1)

Publication Number Publication Date
ATE226166T1 true ATE226166T1 (de) 2002-11-15

Family

ID=16237661

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95927997T ATE226166T1 (de) 1994-08-11 1995-08-09 Verfahren und vorrichtung zur herstellung eines mit kohlenstoffilm beschichteten kunststoffbehälters

Country Status (11)

Country Link
US (1) US5798139A (de)
EP (1) EP0773167B1 (de)
JP (1) JP2788412B2 (de)
KR (1) KR100347249B1 (de)
AT (1) ATE226166T1 (de)
CA (1) CA2196894C (de)
DE (1) DE69528588T2 (de)
DK (1) DK0773167T3 (de)
MY (1) MY113185A (de)
TW (1) TW493012B (de)
WO (1) WO1996005112A1 (de)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0853116A (ja) * 1994-08-11 1996-02-27 Kirin Brewery Co Ltd 炭素膜コーティングプラスチック容器
US5965217A (en) * 1996-10-08 1999-10-12 Citizen Watch Co., Ltd. Method of forming DLC films over inner surface of cylindrical member
AU776224B2 (en) * 1997-02-19 2004-09-02 Kirin Beer Kabushiki Kaisha Apparatus and method for manufacturing plastic container coated with carbon film
AU744162B2 (en) * 1997-02-19 2002-02-14 Kirin Beer Kabushiki Kaisha Method and apparatus for producing plastic container having carbon film coating
US5879763A (en) * 1997-09-03 1999-03-09 Citizen Watch Co., Ltd. Method of forming hard carbon film over inner surface of cylindrical member
PL339616A1 (en) 1997-09-30 2001-01-02 Tetra Laval Holdings & Finance Method of and apparatus for treating internal surface of a plastic bottle in a plasma-assisted process
JP3669138B2 (ja) 1998-03-05 2005-07-06 日新電機株式会社 プラズマｃｖｄ法、プラズマｃｖｄ装置及び電極
US6335086B1 (en) 1999-05-03 2002-01-01 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6461731B1 (en) 1999-05-03 2002-10-08 Guardian Industries Corp. Solar management coating system including protective DLC
US6280834B1 (en) 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate
US6277480B1 (en) 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
US6368664B1 (en) 1999-05-03 2002-04-09 Guardian Industries Corp. Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon
US6312808B1 (en) 1999-05-03 2001-11-06 Guardian Industries Corporation Hydrophobic coating with DLC & FAS on substrate
US6261693B1 (en) 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6447891B1 (en) 1999-05-03 2002-09-10 Guardian Industries Corp. Low-E coating system including protective DLC
US6475573B1 (en) 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
ATE343661T1 (de) * 1999-05-19 2006-11-15 Mitsubishi Shoji Plastics Corp Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter
CN1263654C (zh) 1999-08-06 2006-07-12 普拉斯蒂派克包装公司 具有碳处理内表面的塑料容器
US6475579B1 (en) 1999-08-06 2002-11-05 Plastipak Packaging, Inc. Multi-layer plastic container having a carbon-treated internal surface and method for making the same
FR2799994B1 (fr) * 1999-10-25 2002-06-07 Sidel Sa Dispositif pour le traitement d'un recipient a l'aide d'un plasma a basse pression comportant un circuit de vide perfectionne
DE19957744A1 (de) * 1999-12-01 2001-06-07 Tetra Laval Holdings & Finance Vorrichtung zum Abdichten des Stirnrandes eines Behälterhalses
US6528947B1 (en) 1999-12-06 2003-03-04 E. I. Du Pont De Nemours And Company Hollow cathode array for plasma generation
AU2403001A (en) * 1999-12-27 2001-07-09 Mitsubishi Shoji Plastics Corporation Pet container for foods and drinks containing recycled resin and having dlc coating film formed on surface thereof
DE10004274A1 (de) * 2000-02-01 2001-08-02 Tetra Laval Holdings & Finance Vorrichtung zum Beschichten der inneren Oberfläche eines Hohlkörpers
JP4492985B2 (ja) 2000-02-24 2010-06-30 三菱商事プラスチック株式会社 液体医薬品用プラスチック容器及び液体医薬品の保存回収方法
JP2001240115A (ja) * 2000-02-24 2001-09-04 Mitsubishi Shoji Plast Kk 乾燥固体食品用プラスチック容器
JP2001322656A (ja) * 2000-05-15 2001-11-20 Hokkai Can Co Ltd 合成樹脂製キャップ
FR2812665B1 (fr) * 2000-08-01 2003-08-08 Sidel Sa Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede
JP3993971B2 (ja) * 2000-08-09 2007-10-17 北海製罐株式会社 ガスバリア被覆層を有するプラスチック製容器及びその製法
FR2814382B1 (fr) * 2000-09-28 2003-05-09 Cebal Procede de depot d'un revetement interne dans un recipient en matiere plastique
US6461699B1 (en) * 2000-10-06 2002-10-08 Plastipak Packaging, Inc. Plastic container having a carbon-treated internal surface for non-carbonated food products
DE10054653A1 (de) * 2000-11-03 2002-05-08 Ver Foerderung Inst Kunststoff Verfahren und Vorrichtung zum Beschichten von Hohlkörper
WO2002049925A1 (fr) * 2000-12-21 2002-06-27 Mitsubishi Shoji Plastics Corporation Appareil de fabrication de recipients de plastique revetus de dlc leur procede de fabrication associe et procede de nettoyage de l'electrode interieure
JP4850385B2 (ja) 2000-12-25 2012-01-11 三菱商事プラスチック株式会社 Ｄｌｃ膜コーティングプラスチック容器の製造装置及びその製造方法
JP4678959B2 (ja) * 2001-02-05 2011-04-27 サムコ株式会社 プラスチック容器の壁面への成膜方法、成膜装置及びプラスチック容器
BR0204833B1 (pt) 2001-04-19 2012-05-02 máquina que confecciona um recipiente de resina sintética com barreira de gás, e, recipiente de resina sintética com barreira de gás.
JP4659279B2 (ja) * 2001-06-19 2011-03-30 北海製罐株式会社 プラスチック製ボトルの内面被膜検査方法
WO2003000558A1 (en) * 2001-06-20 2003-01-03 Mitsubishi Shoji Plastics Corporation Moisture and gas barrier plastic container with partition plates, and device and method for manufacturing the plastic container
US20040146667A1 (en) * 2001-06-26 2004-07-29 Kenichi Hama Manufacturing device for dlc film coated plastic container, dlc film coated plastic container, and method of manufacturing the dlc film coated plastic container
JP3653035B2 (ja) * 2001-07-31 2005-05-25 三菱重工業株式会社 プラスチック容器内面への炭素膜形成装置および内面炭素膜被覆プラスチック容器の製造方法
DE10139305A1 (de) * 2001-08-07 2003-03-06 Schott Glas Verbundmaterial aus einem Substratmaterial und einem Barriereschichtmaterial
DE10138697B4 (de) * 2001-08-07 2005-02-24 Schott Ag Verfahren und Vorrichtung zum Beschichten und Spritzblasen eines dreidimensionalen Körpers
DE10138696A1 (de) 2001-08-07 2003-03-06 Schott Glas Verfahren und Vorrichtung zum gleichzeitigen Beschichten und Formen eines dreidimensionalen Körpers
DE10204363A1 (de) * 2002-02-02 2003-08-14 Schott Glas Interferenzbeschichtung zur Verbesserung des Energiehaushaltes von HID-Lampen
WO2003086878A1 (fr) * 2002-04-15 2003-10-23 Mitsubishi Shoji Plastics Corporation Systeme et procede de formation d'un film dlc sur une surface interieure d'un contenant en plastique
JP4654027B2 (ja) * 2002-05-24 2011-03-16 カーハーエス コーポプラスト ゲーエムベーハー ウント コンパニー カーゲー 工作物のプラズマ処理方法および装置
JP4132982B2 (ja) * 2002-05-28 2008-08-13 麒麟麦酒株式会社 Ｄｌｃ膜コーティングプラスチック容器の製造装置
CN100337881C (zh) 2002-05-28 2007-09-19 麒麟麦酒株式会社 包覆有dlc薄膜的塑料容器及其制造设备和制造方法
US7189290B2 (en) 2002-06-05 2007-03-13 Mitsubishi Shoji Plastics Corporation Method and device for cleaning raw material gas introduction tube used in CVD film forming apparatus
JP4149748B2 (ja) 2002-06-24 2008-09-17 三菱商事プラスチック株式会社 ロータリー型量産用ｃｖｄ成膜装置及びプラスチック容器内表面へのｃｖｄ膜成膜方法
DE10242086A1 (de) * 2002-09-11 2004-04-15 Sig Technology Ltd. Behälter zur Verpackung von Produkten, Vorrichtung zur Verarbeitung von Kunstoff sowie Verfahren zur Behälterherstellung
US8062716B2 (en) 2002-09-30 2011-11-22 Toppan Printing Co., Ltd. Method for forming thin film, apparatus for forming thin film, and method for monitoring thin film forming process
US7513953B1 (en) * 2003-11-25 2009-04-07 Nano Scale Surface Systems, Inc. Continuous system for depositing films onto plastic bottles and method
FR2872718B1 (fr) * 2004-07-08 2006-10-20 Sidel Sa Sa Procede de traitement d'un recipient comportant des phases de pompage a vide et machine pour sa mise en oeuvre
JP4171452B2 (ja) 2004-10-18 2008-10-22 三菱重工食品包装機械株式会社 バリア膜形成用内部電極及び成膜装置
US20060198973A1 (en) * 2005-03-03 2006-09-07 Jester Randy D Packaging with cycloolefin food/beverage contact layer
EP1884472B1 (de) 2005-05-27 2014-08-13 Kirin Beer Kabushiki Kaisha Vorrichtung und verfahren zur herstellung eines kunststoffbehälters mit gassperre
DE102005040266A1 (de) * 2005-08-24 2007-03-01 Schott Ag Verfahren und Vorrichtung zur innenseitigen Plasmabehandlung von Hohlkörpern
WO2007029050A1 (en) * 2005-09-09 2007-03-15 Sidel Barrier layer
JP5355860B2 (ja) 2007-03-16 2013-11-27 三菱重工食品包装機械株式会社 バリア膜形成装置、バリア膜形成方法及びバリア膜被覆容器
DE102007041573A1 (de) 2007-09-01 2009-03-05 Khs Corpoplast Gmbh & Co. Kg Verfahren und Vorrichtung zum Sterilisieren sowie Vorrichtung zur Blasformung von Behältern
DE102008037159A1 (de) * 2008-08-08 2010-02-11 Krones Ag Vorrichtung und Verfahren zur Plasmabehandlung von Hohlkörpern
JP5795266B2 (ja) 2009-02-18 2015-10-14 カウンシル オブ サイエンティフィック アンド インダストリアル リサーチ 成形された物体の内側表面上に、保護被膜としてダイヤモンド状炭素を堆積する方法
JP4873037B2 (ja) * 2009-03-31 2012-02-08 東洋製罐株式会社 非耐圧性プラスチック容器
JP4372833B1 (ja) 2009-04-13 2009-11-25 麒麟麦酒株式会社 ガスバリア性薄膜コーティングプラスチック容器の製造方法
US20110001103A1 (en) * 2009-07-01 2011-01-06 Chi-Kuang Chen Elevating mechanism for measuring concentrations of medicines
DE102012201956A1 (de) * 2012-02-09 2013-08-14 Krones Ag Hohlkathoden-Gaslanze für die Innenbeschichtung von Behältern
DE102012201955A1 (de) * 2012-02-09 2013-08-14 Krones Ag Powerlanze und plasmaunterstützte Beschichtung mit Hochfrequenzeinkopplung
JP6047308B2 (ja) 2012-05-28 2016-12-21 日精エー・エス・ビー機械株式会社 樹脂容器用コーティング装置
JP6093552B2 (ja) 2012-11-08 2017-03-08 日精エー・エス・ビー機械株式会社 樹脂容器用コーティング装置
CN103014652B (zh) * 2012-12-07 2016-01-20 中国电子科技集团公司第十一研究所 单晶生长用石英安瓿内壁碳膜制备装置
ITFI20130001A1 (it) * 2013-01-02 2014-07-03 Enomatic S R L Dispositivo erogatore di bevande gassate.
CN104368482B (zh) * 2014-11-11 2016-06-29 深圳格普斯电热技术有限公司 电热膜的内壁喷涂装置及其喷涂方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60228250A (ja) * 1984-04-24 1985-11-13 テルモ株式会社 合成樹脂製容器の製造方法
FR2592874B1 (fr) * 1986-01-14 1990-08-03 Centre Nat Rech Scient Procede pour tremper un objet en verre ou vitreux et objet ainsi trempe
DE3852357T2 (de) * 1987-08-10 1995-04-27 Semiconductor Energy Lab Dünnfilmkohlewerkstoff und Verfahren zum Aufbringen.
JPH01100277A (ja) * 1987-10-12 1989-04-18 Idemitsu Petrochem Co Ltd 硬質炭素膜付着湾曲板、硬質炭素膜付着湾曲板の製造方法および硬質炭素膜付着湾曲板の製造装置
JPH0270059A (ja) * 1987-12-02 1990-03-08 Idemitsu Petrochem Co Ltd 器具およびその製造方法
JPH0627342B2 (ja) * 1988-02-05 1994-04-13 株式会社半導体エネルギー研究所 炭素膜形成方法
JPH01239919A (ja) * 1988-03-22 1989-09-25 Semiconductor Energy Lab Co Ltd プラズマ処理方法およびプラズマ処理装置
US4846101A (en) * 1988-07-01 1989-07-11 Becton, Dickinson And Company Apparatus for plasma treatment of small diameter tubes
US4859489A (en) * 1988-07-18 1989-08-22 Vapor Technologies Inc. Method of coating a metal gas-pressure bottle or tank
US5041201A (en) * 1988-09-16 1991-08-20 Semiconductor Energy Laboratory Co., Ltd. Plasma processing method and apparatus
US5185179A (en) * 1988-10-11 1993-02-09 Semiconductor Energy Laboratory Co., Ltd. Plasma processing method and products thereof
JPH02138469A (ja) * 1988-11-16 1990-05-28 Hitachi Ltd ダイアモンド表面を有する真空用材料、この真空用材料の表面処理法、ダイアモンド膜表面の作製法、真空用材料を用いた真空容器とその部品，真空内駆動機構，電子放出源，真空内ヒータおよび蒸着源容器
JPH03130363A (ja) * 1989-10-16 1991-06-04 Nikon Corp ダイヤモンド状炭素膜被覆プラスチツック物品
US5112025A (en) * 1990-02-22 1992-05-12 Tdk Corporation Molds having wear resistant release coatings
US5169452A (en) * 1990-05-14 1992-12-08 Tdk Corporation Apparatus for the synthesis of diamond-like thin films
US5190807A (en) * 1990-10-18 1993-03-02 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
JPH04304373A (ja) * 1991-03-29 1992-10-27 Shimadzu Corp 硬質カーボン膜形成方法
MX9303141A (es) * 1992-05-28 1994-04-29 Polar Materials Inc Metodos y aparatos para depositar recubrimientos de barrera.
US5308649A (en) * 1992-06-26 1994-05-03 Polar Materials, Inc. Methods for externally treating a container with application of internal bias gas
US5470661A (en) * 1993-01-07 1995-11-28 International Business Machines Corporation Diamond-like carbon films from a hydrocarbon helium plasma
US5565248A (en) * 1994-02-09 1996-10-15 The Coca-Cola Company Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance

Also Published As

Publication number Publication date
KR970704607A (ko) 1997-09-06
EP0773167B1 (de) 2002-10-16
JP2788412B2 (ja) 1998-08-20
DE69528588T2 (de) 2003-07-10
DE69528588D1 (de) 2002-11-21
DK0773167T3 (da) 2003-02-17
WO1996005112A1 (en) 1996-02-22
CA2196894C (en) 2005-12-27
TW493012B (en) 2002-07-01
JPH0853117A (ja) 1996-02-27
EP0773167A4 (de) 1999-08-18
CA2196894A1 (en) 1996-02-22
US5798139A (en) 1998-08-25
EP0773167A1 (de) 1997-05-14
MY113185A (en) 2001-12-31
KR100347249B1 (ko) 2003-03-10

Similar Documents

Publication Publication Date Title
DE69528588D1 (de) Verfahren und vorrichtung zur herstellung eines mit kohlenstoffilm beschichteten kunststoffbehälters
AU3205897A (en) Aerosol and a method and apparatus for generating an aerosol
DE68917563D1 (de) Verfahren zur Herstellung von Pigmentschuppen.
CA2221624A1 (en) Microwave-driven plasma spraying apparatus and method for spraying
KR100219873B1 (ko) 플라즈마 가공을 위한 장치 및 방법
EP0761415A3 (de) Verfahren und Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken
DE60101747D1 (de) Verfahren und vorrichtung zur herstellung einer beschichtung
ATE164503T1 (de) Vorrichtung zur endometrialen ablation
TW341530B (en) Method and apparatus for removing particles from surface of article
CA2356268A1 (en) Method and apparatus for dispersing a volatile composition
AU5128099A (en) Process and apparatus for the production of activated carbon
AU5881598A (en) Method and apparatus for producing plastic container having carbon film coating
GB2281878B (en) Production of laminate pipes
ATE343661T1 (de) Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter
DE69927210D1 (de) Verfahren zur EZR-Plasma Beschichtung mit Kohlenstoff-Filmen welche unter Einwirkung eines elektrischen Feldes Elektronenemission aufweisen.
AU2001248811A1 (en) Polyimide film and process for producing the same
MY108813A (en) Apparatus for recapping a tire and an improved curing envelope for use therein
ATE1514T1 (de) Vorrichtung und verfahren zur abfuellung kleinster pulvermengen.
ATE252271T1 (de) Verfahren und apparat zur herstellung eines elektrischen isolators
DE59703700D1 (de) VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON STABILEN ENDOHEDRALEN FULLERENEN DER STRUKTUR Z-at-Cx MIT x GRÖSSER GLEICH 60
EP0941972A3 (de) Verfahren und Vorrichtung zum Herstellen einer Glasvorform für optische Fasern
GB2312639B (en) Method of producing finely structured moulded components and an apparatus for carrying out the said method
JPS5456257A (en) Tube wiping apparatus
JPS5447769A (en) Inner surface treatment of conduit already constructed
JPS649890A (en) Apparatus for molecular beam growth

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 0773167

Country of ref document: EP

EEIH Change in the person of patent owner