DE3852357T2 - Dünnfilmkohlewerkstoff und Verfahren zum Aufbringen. - Google Patents
Dünnfilmkohlewerkstoff und Verfahren zum Aufbringen.Info
- Publication number
- DE3852357T2 DE3852357T2 DE3852357T DE3852357T DE3852357T2 DE 3852357 T2 DE3852357 T2 DE 3852357T2 DE 3852357 T DE3852357 T DE 3852357T DE 3852357 T DE3852357 T DE 3852357T DE 3852357 T2 DE3852357 T2 DE 3852357T2
- Authority
- DE
- Germany
- Prior art keywords
- application
- thin film
- carbon material
- film carbon
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003575 carbonaceous material Substances 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200351A JPS6442313A (en) | 1987-08-10 | 1987-08-10 | Production of carbon |
JP63177847A JPH0226822A (ja) | 1988-07-17 | 1988-07-17 | 炭素を主成分とする被膜 |
JP63177849A JPH0230761A (ja) | 1988-07-17 | 1988-07-17 | 炭素を主成分とする被膜を有する複合体 |
JP63177848A JPH0230760A (ja) | 1988-07-17 | 1988-07-17 | 炭素を主成分とする被膜を有する複合体 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3852357D1 DE3852357D1 (de) | 1995-01-19 |
DE3852357T2 true DE3852357T2 (de) | 1995-04-27 |
Family
ID=27474789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3852357T Expired - Fee Related DE3852357T2 (de) | 1987-08-10 | 1988-08-10 | Dünnfilmkohlewerkstoff und Verfahren zum Aufbringen. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5120625A (de) |
EP (1) | EP0304220B1 (de) |
KR (1) | KR930001013B1 (de) |
CN (1) | CN1020477C (de) |
DE (1) | DE3852357T2 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5238705A (en) * | 1987-02-24 | 1993-08-24 | Semiconductor Energy Laboratory Co., Ltd. | Carbonaceous protective films and method of depositing the same |
KR930010193B1 (ko) * | 1988-09-13 | 1993-10-15 | 가부시끼가이샤 한도다이 에네르기겐뀨쇼 | 세라믹막 및 탄소막으로 덮인 부품과 그 부품 제작방법 |
US5041201A (en) * | 1988-09-16 | 1991-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing method and apparatus |
KR930011413B1 (ko) * | 1990-09-25 | 1993-12-06 | 가부시키가이샤 한도오따이 에네루기 겐큐쇼 | 펄스형 전자파를 사용한 플라즈마 cvd 법 |
JPH05891A (ja) * | 1991-06-21 | 1993-01-08 | Canon Inc | ダイヤモンド−金属接合体 |
CA2072384A1 (en) * | 1991-08-29 | 1993-03-01 | Clifford L. Spiro | Carbon fluoride compositions |
CA2091665C (en) * | 1992-04-07 | 2003-01-07 | Peter George Tsantrizos | Process for the synthesis of fullerenes |
DE59409915D1 (de) * | 1993-05-21 | 2001-11-29 | Fraunhofer Ges Forschung | Plasmapolymer-Schichtenfolge als Hartstoffschicht mit definiert einstellbarem Adhäsionsverhalten |
JP2788412B2 (ja) * | 1994-08-11 | 1998-08-20 | 麒麟麦酒株式会社 | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
US5705044A (en) | 1995-08-07 | 1998-01-06 | Akashic Memories Corporation | Modular sputtering machine having batch processing and serial thin film sputtering |
US6541786B1 (en) * | 1997-05-12 | 2003-04-01 | Cymer, Inc. | Plasma pinch high energy with debris collector |
US6452199B1 (en) * | 1997-05-12 | 2002-09-17 | Cymer, Inc. | Plasma focus high energy photon source with blast shield |
US5849443A (en) * | 1998-02-13 | 1998-12-15 | Eastman Kodak Company | Method of making multilayer electrophotographic elements |
US5849445A (en) * | 1998-02-13 | 1998-12-15 | Eastman Kodak Company | Multilayer photoconductive elements having low dark decay |
DE10011999C1 (de) * | 2000-03-11 | 2001-06-07 | Hilti Ag | Staubschutz sowie dessen Verwendung bei einem Elektrohandwerkzeuggerät und Werkzeug |
US20040227197A1 (en) * | 2003-02-28 | 2004-11-18 | Shinji Maekawa | Composition of carbon nitride, thin film transistor with the composition of carbon nitride, display device with the thin film transistor, and manufacturing method thereof |
WO2018093985A1 (en) | 2016-11-17 | 2018-05-24 | Cardinal Cg Company | Static-dissipative coating technology |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5557875A (en) * | 1978-06-24 | 1980-04-30 | Mita Ind Co Ltd | Transfer type electrostatic copying machine |
JPS57174467A (en) * | 1981-04-20 | 1982-10-27 | Inoue Japax Res Inc | Ion working device |
US4508781A (en) * | 1982-06-07 | 1985-04-02 | The United States Of America As Represented By The Secretary Of Agriculture | Fluorination by inorganic fluorides in glow discharge |
US4486286A (en) * | 1982-09-28 | 1984-12-04 | Nerken Research Corp. | Method of depositing a carbon film on a substrate and products obtained thereby |
CA1232228A (en) * | 1984-03-13 | 1988-02-02 | Tatsuro Miyasato | Coating film and method and apparatus for producing the same |
US4663183A (en) * | 1984-09-10 | 1987-05-05 | Energy Conversion Devices, Inc. | Glow discharge method of applying a carbon coating onto a substrate |
US4770940A (en) * | 1984-09-10 | 1988-09-13 | Ovonic Synthetic Materials Company | Glow discharge method of applying a carbon coating onto a substrate and coating applied thereby |
US4783361A (en) * | 1984-09-10 | 1988-11-08 | Ovonic Synthetic Materials Company, Inc. | Coated lenses |
US4664999A (en) * | 1984-10-16 | 1987-05-12 | Oki Electric Industry Co., Ltd. | Method of making electrophotographic member with a-Si photoconductive layer |
US4675265A (en) * | 1985-03-26 | 1987-06-23 | Fuji Electric Co., Ltd. | Electrophotographic light-sensitive element with amorphous C overlayer |
US4713309A (en) * | 1985-08-26 | 1987-12-15 | Energy Conversion Devices, Inc. | Enhancement layer for positively charged electrophotographic devices and method for decreasing charge fatigue through the use of said layer |
EP0252442A3 (de) * | 1986-07-08 | 1990-04-18 | Minolta Camera Kabushiki Kaisha | Lichtempfindliches Element mit Überschicht |
DE3751651T2 (de) * | 1986-10-14 | 1996-10-17 | Minolta Camera Kk | Elektrophotographisches lichtempfindliches Element, das einen Überzug enthält |
US4837137A (en) * | 1986-12-05 | 1989-06-06 | Fuji Electric Co., Ltd. | Electrophotographic photoreceptor |
JPH0676666B2 (ja) * | 1987-02-10 | 1994-09-28 | 株式会社半導体エネルギ−研究所 | 炭素膜作製方法 |
US4809876A (en) * | 1987-08-27 | 1989-03-07 | Aluminum Company Of America | Container body having improved gas barrier properties |
JPH01227161A (ja) * | 1988-03-07 | 1989-09-11 | Minolta Camera Co Ltd | 感光体及びその製造方法 |
-
1988
- 1988-08-10 CN CN88106060A patent/CN1020477C/zh not_active Expired - Lifetime
- 1988-08-10 EP EP88307417A patent/EP0304220B1/de not_active Expired - Lifetime
- 1988-08-10 DE DE3852357T patent/DE3852357T2/de not_active Expired - Fee Related
- 1988-08-10 KR KR1019880010194A patent/KR930001013B1/ko not_active IP Right Cessation
-
1990
- 1990-09-26 US US07/587,659 patent/US5120625A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0304220B1 (de) | 1994-12-07 |
CN1031722A (zh) | 1989-03-15 |
US5120625A (en) | 1992-06-09 |
CN1020477C (zh) | 1993-05-05 |
KR890003981A (ko) | 1989-04-19 |
EP0304220A1 (de) | 1989-02-22 |
DE3852357D1 (de) | 1995-01-19 |
KR930001013B1 (ko) | 1993-02-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |