JPS6442313A - Production of carbon - Google Patents

Production of carbon

Info

Publication number
JPS6442313A
JPS6442313A JP62200351A JP20035187A JPS6442313A JP S6442313 A JPS6442313 A JP S6442313A JP 62200351 A JP62200351 A JP 62200351A JP 20035187 A JP20035187 A JP 20035187A JP S6442313 A JPS6442313 A JP S6442313A
Authority
JP
Japan
Prior art keywords
plasma
carbon
gas
diamond
under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62200351A
Other languages
Japanese (ja)
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62200351A priority Critical patent/JPS6442313A/en
Priority to CN88106060A priority patent/CN1020477C/en
Priority to DE3852357T priority patent/DE3852357T2/en
Priority to KR1019880010194A priority patent/KR930001013B1/en
Priority to EP88307417A priority patent/EP0304220B1/en
Publication of JPS6442313A publication Critical patent/JPS6442313A/en
Priority to US07/481,720 priority patent/US5145711A/en
Priority to US07/587,659 priority patent/US5120625A/en
Priority to US07/725,896 priority patent/US5230931A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

PURPOSE:To form diamond in a high rate at lower temp. under higher pressure compared with a conventional method, by supplying carbon hydride and carbon halogenide simultaneously and by reacting them under a condition of high density plasma in the microwave plasma CVD method. CONSTITUTION:In the plasma gas phase reaction method by which a substance having diamond is made from carbide gas, hydrogen or oxide gas and halogenide gas of carbon are introduced to a plasma-generating space to produce a substance contg. carbon as main component. In the method above-mentioned, the magnetic field is impressed in addition of microwave to generate plasma under about 3-800Torr pressure by interaction of the electric and magnetic fields, and, using such plasma condition, a coat having diamond can be produced on a substrate at <=500 deg.C temp. of the substrate.
JP62200351A 1987-08-10 1987-08-10 Production of carbon Pending JPS6442313A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP62200351A JPS6442313A (en) 1987-08-10 1987-08-10 Production of carbon
CN88106060A CN1020477C (en) 1987-08-10 1988-08-10 Carbon material containing halogen and deposition method for same
DE3852357T DE3852357T2 (en) 1987-08-10 1988-08-10 Thin film carbon material and method of application.
KR1019880010194A KR930001013B1 (en) 1987-08-10 1988-08-10 Carbon material containing a halogen and deposition method for same
EP88307417A EP0304220B1 (en) 1987-08-10 1988-08-10 Thin film carbon material and method of depositing the same
US07/481,720 US5145711A (en) 1987-08-10 1990-02-16 Cyclotron resonance chemical vapor deposition method of forming a halogen-containing diamond on a substrate
US07/587,659 US5120625A (en) 1987-08-10 1990-09-26 Carbon material containing a halogen and deposition method for same
US07/725,896 US5230931A (en) 1987-08-10 1991-07-01 Plasma-assisted cvd of carbonaceous films by using a bias voltage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62200351A JPS6442313A (en) 1987-08-10 1987-08-10 Production of carbon

Publications (1)

Publication Number Publication Date
JPS6442313A true JPS6442313A (en) 1989-02-14

Family

ID=16422853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62200351A Pending JPS6442313A (en) 1987-08-10 1987-08-10 Production of carbon

Country Status (1)

Country Link
JP (1) JPS6442313A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103708708A (en) * 2012-09-28 2014-04-09 Hoya株式会社 Moulding die, manufacturing method thereof, and method for manufacturing optical glass element

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930709A (en) * 1982-08-13 1984-02-18 Toa Nenryo Kogyo Kk Method for synthesizing carbon film and carbon granule in vapor phase
JPS6136200A (en) * 1984-07-25 1986-02-20 Sumitomo Electric Ind Ltd Method for vapor-phase synthesis of diamond
JPS61222915A (en) * 1985-03-29 1986-10-03 Asahi Chem Ind Co Ltd Vapor-phase synthesis of diamond
JPS61247696A (en) * 1985-04-25 1986-11-04 Kobe Steel Ltd Device for vapor phase synthesis of diamond
JPS62180073A (en) * 1986-02-03 1987-08-07 Ricoh Co Ltd Amorphous carbon film and its production

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930709A (en) * 1982-08-13 1984-02-18 Toa Nenryo Kogyo Kk Method for synthesizing carbon film and carbon granule in vapor phase
JPS6136200A (en) * 1984-07-25 1986-02-20 Sumitomo Electric Ind Ltd Method for vapor-phase synthesis of diamond
JPS61222915A (en) * 1985-03-29 1986-10-03 Asahi Chem Ind Co Ltd Vapor-phase synthesis of diamond
JPS61247696A (en) * 1985-04-25 1986-11-04 Kobe Steel Ltd Device for vapor phase synthesis of diamond
JPS62180073A (en) * 1986-02-03 1987-08-07 Ricoh Co Ltd Amorphous carbon film and its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103708708A (en) * 2012-09-28 2014-04-09 Hoya株式会社 Moulding die, manufacturing method thereof, and method for manufacturing optical glass element

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