JPS6442313A - Production of carbon - Google Patents
Production of carbonInfo
- Publication number
- JPS6442313A JPS6442313A JP62200351A JP20035187A JPS6442313A JP S6442313 A JPS6442313 A JP S6442313A JP 62200351 A JP62200351 A JP 62200351A JP 20035187 A JP20035187 A JP 20035187A JP S6442313 A JPS6442313 A JP S6442313A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- carbon
- gas
- diamond
- under
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
PURPOSE:To form diamond in a high rate at lower temp. under higher pressure compared with a conventional method, by supplying carbon hydride and carbon halogenide simultaneously and by reacting them under a condition of high density plasma in the microwave plasma CVD method. CONSTITUTION:In the plasma gas phase reaction method by which a substance having diamond is made from carbide gas, hydrogen or oxide gas and halogenide gas of carbon are introduced to a plasma-generating space to produce a substance contg. carbon as main component. In the method above-mentioned, the magnetic field is impressed in addition of microwave to generate plasma under about 3-800Torr pressure by interaction of the electric and magnetic fields, and, using such plasma condition, a coat having diamond can be produced on a substrate at <=500 deg.C temp. of the substrate.
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200351A JPS6442313A (en) | 1987-08-10 | 1987-08-10 | Production of carbon |
CN88106060A CN1020477C (en) | 1987-08-10 | 1988-08-10 | Carbon material containing halogen and deposition method for same |
DE3852357T DE3852357T2 (en) | 1987-08-10 | 1988-08-10 | Thin film carbon material and method of application. |
KR1019880010194A KR930001013B1 (en) | 1987-08-10 | 1988-08-10 | Carbon material containing a halogen and deposition method for same |
EP88307417A EP0304220B1 (en) | 1987-08-10 | 1988-08-10 | Thin film carbon material and method of depositing the same |
US07/481,720 US5145711A (en) | 1987-08-10 | 1990-02-16 | Cyclotron resonance chemical vapor deposition method of forming a halogen-containing diamond on a substrate |
US07/587,659 US5120625A (en) | 1987-08-10 | 1990-09-26 | Carbon material containing a halogen and deposition method for same |
US07/725,896 US5230931A (en) | 1987-08-10 | 1991-07-01 | Plasma-assisted cvd of carbonaceous films by using a bias voltage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200351A JPS6442313A (en) | 1987-08-10 | 1987-08-10 | Production of carbon |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6442313A true JPS6442313A (en) | 1989-02-14 |
Family
ID=16422853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62200351A Pending JPS6442313A (en) | 1987-08-10 | 1987-08-10 | Production of carbon |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6442313A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103708708A (en) * | 2012-09-28 | 2014-04-09 | Hoya株式会社 | Moulding die, manufacturing method thereof, and method for manufacturing optical glass element |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930709A (en) * | 1982-08-13 | 1984-02-18 | Toa Nenryo Kogyo Kk | Method for synthesizing carbon film and carbon granule in vapor phase |
JPS6136200A (en) * | 1984-07-25 | 1986-02-20 | Sumitomo Electric Ind Ltd | Method for vapor-phase synthesis of diamond |
JPS61222915A (en) * | 1985-03-29 | 1986-10-03 | Asahi Chem Ind Co Ltd | Vapor-phase synthesis of diamond |
JPS61247696A (en) * | 1985-04-25 | 1986-11-04 | Kobe Steel Ltd | Device for vapor phase synthesis of diamond |
JPS62180073A (en) * | 1986-02-03 | 1987-08-07 | Ricoh Co Ltd | Amorphous carbon film and its production |
-
1987
- 1987-08-10 JP JP62200351A patent/JPS6442313A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930709A (en) * | 1982-08-13 | 1984-02-18 | Toa Nenryo Kogyo Kk | Method for synthesizing carbon film and carbon granule in vapor phase |
JPS6136200A (en) * | 1984-07-25 | 1986-02-20 | Sumitomo Electric Ind Ltd | Method for vapor-phase synthesis of diamond |
JPS61222915A (en) * | 1985-03-29 | 1986-10-03 | Asahi Chem Ind Co Ltd | Vapor-phase synthesis of diamond |
JPS61247696A (en) * | 1985-04-25 | 1986-11-04 | Kobe Steel Ltd | Device for vapor phase synthesis of diamond |
JPS62180073A (en) * | 1986-02-03 | 1987-08-07 | Ricoh Co Ltd | Amorphous carbon film and its production |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103708708A (en) * | 2012-09-28 | 2014-04-09 | Hoya株式会社 | Moulding die, manufacturing method thereof, and method for manufacturing optical glass element |
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