JPS64266A - Production of diamondlike carbon - Google Patents

Production of diamondlike carbon

Info

Publication number
JPS64266A
JPS64266A JP62156091A JP15609187A JPS64266A JP S64266 A JPS64266 A JP S64266A JP 62156091 A JP62156091 A JP 62156091A JP 15609187 A JP15609187 A JP 15609187A JP S64266 A JPS64266 A JP S64266A
Authority
JP
Japan
Prior art keywords
substrate
gaseous
diamondlike carbon
diamondlike
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62156091A
Other languages
Japanese (ja)
Other versions
JPH01266A (en
Inventor
Osamu Nakamura
Tomio Kazahaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idemitsu Petrochemical Co Ltd
Original Assignee
Idemitsu Petrochemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idemitsu Petrochemical Co Ltd filed Critical Idemitsu Petrochemical Co Ltd
Priority to JP62156091A priority Critical patent/JPS64266A/en
Publication of JPH01266A publication Critical patent/JPH01266A/en
Publication of JPS64266A publication Critical patent/JPS64266A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE: To produce the title dense diamondlike carbon having excellent adhesion to a substrate with a simple operation by using CO and CO2 as the raw gases in the production process wherein the stimulated raw gases are brought into contact with the substrate.
CONSTITUTION: Gaseous CO and /or gaseous CO2 as the raw gases or the gaseous mixture with hydrogen are stimulated by an optional stimulating means among a CVD method such as a plasma CVD method and a chemical transportation method and an ionization vapor deposition method. The stimulated gases are brought into contact with the substrate, and diamondlike carbon or a diamondlike carbon film is formed on the surface of the substrate. By this method, the raw gaseous are easily prepared as compared with the method using hydrocarbons as the raw gases, the operation is simple, the adhesion to the substrate is excellent, and the dense diamondlike carbon or diamondlike film with improved hardness can be obtained.
COPYRIGHT: (C)1989,JPO&Japio
JP62156091A 1987-06-23 1987-06-23 Production of diamondlike carbon Pending JPS64266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156091A JPS64266A (en) 1987-06-23 1987-06-23 Production of diamondlike carbon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156091A JPS64266A (en) 1987-06-23 1987-06-23 Production of diamondlike carbon

Publications (2)

Publication Number Publication Date
JPH01266A JPH01266A (en) 1989-01-05
JPS64266A true JPS64266A (en) 1989-01-05

Family

ID=15620112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156091A Pending JPS64266A (en) 1987-06-23 1987-06-23 Production of diamondlike carbon

Country Status (1)

Country Link
JP (1) JPS64266A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02167892A (en) * 1988-12-21 1990-06-28 Ishizuka Kenkyusho:Kk Synthetic device of diamond by gas-phase reaction
EP0437704A2 (en) * 1989-11-25 1991-07-24 Idemitsu Petrochemical Co. Ltd. Process for synthesizing diamond and diamond synthesis apparatus
US5349922A (en) * 1990-06-13 1994-09-27 General Electric Company Free standing diamond sheet and method and apparatus for making same
US5380516A (en) * 1988-05-28 1995-01-10 Sumitomo Electric Industries, Ltd. Process for synthesizing diamond in a vapor phase
JP2009280876A (en) * 2008-05-23 2009-12-03 Masayoshi Umeno Carbon film deposition method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5380516A (en) * 1988-05-28 1995-01-10 Sumitomo Electric Industries, Ltd. Process for synthesizing diamond in a vapor phase
US5624719A (en) * 1988-05-28 1997-04-29 Sumitomo Electric Industries, Ltd. Process for synthesizing diamond in a vapor phase
JPH02167892A (en) * 1988-12-21 1990-06-28 Ishizuka Kenkyusho:Kk Synthetic device of diamond by gas-phase reaction
EP0437704A2 (en) * 1989-11-25 1991-07-24 Idemitsu Petrochemical Co. Ltd. Process for synthesizing diamond and diamond synthesis apparatus
US5349922A (en) * 1990-06-13 1994-09-27 General Electric Company Free standing diamond sheet and method and apparatus for making same
JP2009280876A (en) * 2008-05-23 2009-12-03 Masayoshi Umeno Carbon film deposition method

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