JPS55154563A - Manufacture of covered tool material - Google Patents
Manufacture of covered tool materialInfo
- Publication number
- JPS55154563A JPS55154563A JP6165179A JP6165179A JPS55154563A JP S55154563 A JPS55154563 A JP S55154563A JP 6165179 A JP6165179 A JP 6165179A JP 6165179 A JP6165179 A JP 6165179A JP S55154563 A JPS55154563 A JP S55154563A
- Authority
- JP
- Japan
- Prior art keywords
- covered
- thin layer
- layer
- plasmatic
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Powder Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To plan mass production without raising the temp. of a base material by applying electric energy to a mixed gas forming a covered thin layer from the outside to generate plasma and depositing the layer on the material surface in the plasmatic atmosphere. CONSTITUTION:When a base material is covered with a thin layer by chemical vapor deposition or other method, a mixed gas of one or more among halide, hydride, carbonyl compound and organometallic compound of ametallic element forming the layer, nonmetallic element-contg. boron halide, boron hydride, hydrocarbon, nitrogen and/or ammonia, CO and/or CO2, and a carrier gas is fed into an evacuated reactor or the like. By applying electric energy from the outside, plasma is generated, and in this plasmatic atmosphere the covered thin layer is deposited on the material surface. By this method a tool material covered with a wear resistant thin layer is obtd. at a low cost of equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6165179A JPS55154563A (en) | 1979-05-18 | 1979-05-18 | Manufacture of covered tool material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6165179A JPS55154563A (en) | 1979-05-18 | 1979-05-18 | Manufacture of covered tool material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55154563A true JPS55154563A (en) | 1980-12-02 |
Family
ID=13177337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6165179A Pending JPS55154563A (en) | 1979-05-18 | 1979-05-18 | Manufacture of covered tool material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55154563A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58104015A (en) * | 1981-12-11 | 1983-06-21 | Canon Inc | Apparatus for preparation of deposited film |
| JPS59122870U (en) * | 1983-02-07 | 1984-08-18 | 手嶋 立男 | Ceramic tools |
| JPS59170263A (en) * | 1983-03-15 | 1984-09-26 | Mitsubishi Metal Corp | Surface-coated sintered hard alloy member for cutting tool |
| JPS59170264A (en) * | 1983-03-15 | 1984-09-26 | Mitsubishi Metal Corp | Surface coated sintered hard alloy member for cutting tool |
| US4670172A (en) * | 1985-03-29 | 1987-06-02 | Borg-Warner Corporation | Process and kit for working metals |
-
1979
- 1979-05-18 JP JP6165179A patent/JPS55154563A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58104015A (en) * | 1981-12-11 | 1983-06-21 | Canon Inc | Apparatus for preparation of deposited film |
| JPS59122870U (en) * | 1983-02-07 | 1984-08-18 | 手嶋 立男 | Ceramic tools |
| JPS59170263A (en) * | 1983-03-15 | 1984-09-26 | Mitsubishi Metal Corp | Surface-coated sintered hard alloy member for cutting tool |
| JPS59170264A (en) * | 1983-03-15 | 1984-09-26 | Mitsubishi Metal Corp | Surface coated sintered hard alloy member for cutting tool |
| JPS6151031B2 (en) * | 1983-03-15 | 1986-11-07 | Mitsubishi Metal Corp | |
| JPS6151030B2 (en) * | 1983-03-15 | 1986-11-07 | Mitsubishi Metal Corp | |
| US4670172A (en) * | 1985-03-29 | 1987-06-02 | Borg-Warner Corporation | Process and kit for working metals |
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