DE69101756T2 - Verfahren zur Diamantenherstellung. - Google Patents

Verfahren zur Diamantenherstellung.

Info

Publication number
DE69101756T2
DE69101756T2 DE69101756T DE69101756T DE69101756T2 DE 69101756 T2 DE69101756 T2 DE 69101756T2 DE 69101756 T DE69101756 T DE 69101756T DE 69101756 T DE69101756 T DE 69101756T DE 69101756 T2 DE69101756 T2 DE 69101756T2
Authority
DE
Germany
Prior art keywords
manufacturing process
diamond manufacturing
diamond
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69101756T
Other languages
English (en)
Other versions
DE69101756D1 (de
Inventor
Nobuhiro Ota
Naoji Fujimori
Takyuki Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP21002190A external-priority patent/JPH0492890A/ja
Priority claimed from JP21309790A external-priority patent/JPH0497986A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69101756D1 publication Critical patent/DE69101756D1/de
Application granted granted Critical
Publication of DE69101756T2 publication Critical patent/DE69101756T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/272—Diamond only using DC, AC or RF discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
DE69101756T 1990-08-07 1991-08-02 Verfahren zur Diamantenherstellung. Expired - Fee Related DE69101756T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP21002190A JPH0492890A (ja) 1990-08-07 1990-08-07 ダイヤモンド合成方法
JP21309790A JPH0497986A (ja) 1990-08-10 1990-08-10 ダイヤモンド合成方法

Publications (2)

Publication Number Publication Date
DE69101756D1 DE69101756D1 (de) 1994-05-26
DE69101756T2 true DE69101756T2 (de) 1994-08-04

Family

ID=26517810

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69101756T Expired - Fee Related DE69101756T2 (de) 1990-08-07 1991-08-02 Verfahren zur Diamantenherstellung.

Country Status (3)

Country Link
US (1) US5201986A (de)
EP (1) EP0470531B1 (de)
DE (1) DE69101756T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH059735A (ja) * 1991-07-09 1993-01-19 Kobe Steel Ltd ダイヤモンドの気相合成方法
US5397428A (en) * 1991-12-20 1995-03-14 The University Of North Carolina At Chapel Hill Nucleation enhancement for chemical vapor deposition of diamond
US5560779A (en) * 1993-07-12 1996-10-01 Olin Corporation Apparatus for synthesizing diamond films utilizing an arc plasma
WO1995012009A1 (de) * 1993-10-29 1995-05-04 Balzers Aktiengesellschaft Beschichteter körper, verfahren zu dessen herstellung sowie dessen verwendung
GB9405029D0 (en) * 1994-03-15 1994-04-27 Franks Joseph Dr Improved catheters and other tubular inserts
US5437891A (en) * 1994-06-23 1995-08-01 General Electric Company Chemical vapor deposition of polycrystalline diamond with <100> orientation and <100> growth facets
JP2001354492A (ja) * 2000-06-07 2001-12-25 Sumitomo Electric Ind Ltd ダイヤモンド膜の形成方法および成膜装置
US10258959B2 (en) 2010-08-11 2019-04-16 Unit Cell Diamond Llc Methods of producing heterodiamond and apparatus therefor
US9061917B2 (en) 2010-08-11 2015-06-23 Unit Cell Diamond Llc Combinatorial synthesis of the diamond unit cell
US8778295B2 (en) 2010-08-11 2014-07-15 Daniel Hodes Combinatorial synthesis of diamond
US9783885B2 (en) 2010-08-11 2017-10-10 Unit Cell Diamond Llc Methods for producing diamond mass and apparatus therefor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3317354A (en) * 1964-05-28 1967-05-02 Gen Electric Process for doping a diamond in a gaseous electrical discharge
US3961103A (en) * 1972-07-12 1976-06-01 Space Sciences, Inc. Film deposition
JPS60122794A (ja) * 1983-12-01 1985-07-01 Mitsubishi Metal Corp ダイヤモンドの低圧気相合成法
DE3690606T (de) * 1985-11-25 1988-08-25
JPS63210099A (ja) * 1987-02-26 1988-08-31 Nissin Electric Co Ltd ダイヤモンド膜の作製方法
US4830702A (en) * 1987-07-02 1989-05-16 General Electric Company Hollow cathode plasma assisted apparatus and method of diamond synthesis
JPS6442393A (en) * 1987-08-05 1989-02-14 Namiki Precision Jewel Co Ltd Method for synthesizing diamond
US4935303A (en) * 1987-10-15 1990-06-19 Canon Kabushiki Kaisha Novel diamond-like carbon film and process for the production thereof
JPH08757B2 (ja) * 1988-12-26 1996-01-10 住友電気工業株式会社 ダイヤモンドおよびその気相合成法
JPH0288497A (ja) * 1988-06-09 1990-03-28 Toshiba Corp 単結晶ダイヤモンド粒子の製造方法
JPH02199099A (ja) * 1988-10-21 1990-08-07 Crystallume 連続ダイヤモンド薄膜およびその製法

Also Published As

Publication number Publication date
DE69101756D1 (de) 1994-05-26
US5201986A (en) 1993-04-13
EP0470531B1 (de) 1994-04-20
EP0470531A1 (de) 1992-02-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8339 Ceased/non-payment of the annual fee