DE69018178D1 - Verfahren zur Herstellung von Disilan. - Google Patents

Verfahren zur Herstellung von Disilan.

Info

Publication number
DE69018178D1
DE69018178D1 DE69018178T DE69018178T DE69018178D1 DE 69018178 D1 DE69018178 D1 DE 69018178D1 DE 69018178 T DE69018178 T DE 69018178T DE 69018178 T DE69018178 T DE 69018178T DE 69018178 D1 DE69018178 D1 DE 69018178D1
Authority
DE
Germany
Prior art keywords
disilane
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69018178T
Other languages
English (en)
Other versions
DE69018178T2 (de
Inventor
Jean-Claude Parent
Marie-Helene Renaudin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of DE69018178D1 publication Critical patent/DE69018178D1/de
Publication of DE69018178T2 publication Critical patent/DE69018178T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/046—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE69018178T 1989-09-22 1990-09-20 Verfahren zur Herstellung von Disilan. Expired - Fee Related DE69018178T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8912478A FR2652346B1 (fr) 1989-09-22 1989-09-22 Procede de preparation de disilane.

Publications (2)

Publication Number Publication Date
DE69018178D1 true DE69018178D1 (de) 1995-05-04
DE69018178T2 DE69018178T2 (de) 1995-09-14

Family

ID=9385767

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69018178T Expired - Fee Related DE69018178T2 (de) 1989-09-22 1990-09-20 Verfahren zur Herstellung von Disilan.

Country Status (7)

Country Link
US (1) US5089244A (de)
EP (1) EP0419358B1 (de)
JP (1) JPH03112804A (de)
KR (1) KR910006144A (de)
CA (1) CA2025823A1 (de)
DE (1) DE69018178T2 (de)
FR (1) FR2652346B1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5211931A (en) * 1992-03-27 1993-05-18 Ethyl Corporation Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve
FR2710044B1 (fr) * 1993-09-17 1995-10-13 Air Liquide Procédé de séparation d'un hydrure gazeux ou d'un mélange d'hydrures gazeux à l'aide d'une membrane.
US6204180B1 (en) 1997-05-16 2001-03-20 Advanced Technology Materials, Inc. Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US5707424A (en) * 1994-10-13 1998-01-13 Advanced Technology Materials, Inc. Process system with integrated gas storage and delivery unit
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US5916245A (en) * 1996-05-20 1999-06-29 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
US6019823A (en) * 1997-05-16 2000-02-01 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members
US6027547A (en) * 1997-05-16 2000-02-22 Advanced Technology Materials, Inc. Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium
US5985008A (en) * 1997-05-20 1999-11-16 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium
US5851270A (en) * 1997-05-20 1998-12-22 Advanced Technology Materials, Inc. Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means
US6099619A (en) * 1997-10-09 2000-08-08 Uop Llc Purification of carbon dioxide
US5858068A (en) * 1997-10-09 1999-01-12 Uop Llc Purification of carbon dioxide
US5980608A (en) * 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US6027705A (en) * 1998-01-08 2000-02-22 Showa Denko K.K. Method for producing a higher silane
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6660063B2 (en) 1998-03-27 2003-12-09 Advanced Technology Materials, Inc Sorbent-based gas storage and delivery system
US6070576A (en) * 1998-06-02 2000-06-06 Advanced Technology Materials, Inc. Adsorbent-based storage and dispensing system
US6511528B1 (en) 1999-03-26 2003-01-28 Uop Llc Purification of carbon dioxide
WO2002085514A2 (en) * 2001-04-20 2002-10-31 University Of Southern California Ship-in-a-bottle catalysts
US7105037B2 (en) * 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US7494530B2 (en) * 2002-12-10 2009-02-24 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6743278B1 (en) 2002-12-10 2004-06-01 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6843830B2 (en) * 2003-04-15 2005-01-18 Advanced Technology Materials, Inc. Abatement system targeting a by-pass effluent stream of a semiconductor process tool
US7306652B2 (en) * 2005-03-30 2007-12-11 Parker-Hannifin Corporation Siloxane removal process
US8268046B2 (en) * 2008-05-16 2012-09-18 Matheson Tri-Gas Removal of impurities from hydrogen-containing materials
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
WO2013181295A1 (en) 2012-05-29 2013-12-05 Advanced Technology Materials, Inc. Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE150599C (de) *
US3982912A (en) * 1971-03-31 1976-09-28 Yoshifumi Yatsurugi Method for preparation of an improved K-A type zeolite and for separation by adsorption polar and non-polar molecules
JPS5869715A (ja) * 1981-10-21 1983-04-26 Mitsui Toatsu Chem Inc モノシランの精製方法
JPS5930711A (ja) * 1982-08-12 1984-02-18 Showa Denko Kk モノシランの精製法
US4554141A (en) * 1984-05-14 1985-11-19 Ethyl Corporation Gas stream purification
JPS6153106A (ja) * 1984-08-20 1986-03-17 Showa Denko Kk シランの精製方法
JPH0692246B2 (ja) * 1986-03-11 1994-11-16 三井東圧化学株式会社 ジシランの精製方法
JPH0753571B2 (ja) * 1986-12-11 1995-06-07 三井東圧化学株式会社 ジシランの精製方法
JP2576875B2 (ja) * 1987-10-14 1997-01-29 株式会社ソキア 水準儀のマイクロ装置
FR2622564B1 (fr) * 1987-10-28 1990-02-02 Rhone Poulenc Chimie Procede de purification de silane
JPH0336835A (ja) * 1989-07-03 1991-02-18 Nippon Telegr & Teleph Corp <Ntt> 論理番号付与型マルチアクセス制御方式
JPH0636774B2 (ja) * 1989-10-30 1994-05-18 トーイン株式会社 商品陳列ケース

Also Published As

Publication number Publication date
US5089244A (en) 1992-02-18
DE69018178T2 (de) 1995-09-14
KR910006144A (ko) 1991-04-27
CA2025823A1 (fr) 1991-03-23
JPH03112804A (ja) 1991-05-14
EP0419358A1 (de) 1991-03-27
FR2652346A1 (fr) 1991-03-29
FR2652346B1 (fr) 1991-11-29
EP0419358B1 (de) 1995-03-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee