DE69528743T2 - Verfahren und Vorrichtung zur Plasmabehandlung - Google Patents
Verfahren und Vorrichtung zur PlasmabehandlungInfo
- Publication number
- DE69528743T2 DE69528743T2 DE69528743T DE69528743T DE69528743T2 DE 69528743 T2 DE69528743 T2 DE 69528743T2 DE 69528743 T DE69528743 T DE 69528743T DE 69528743 T DE69528743 T DE 69528743T DE 69528743 T2 DE69528743 T2 DE 69528743T2
- Authority
- DE
- Germany
- Prior art keywords
- plasma treatment
- plasma
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5093—Coaxial electrodes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08214—Silicon-based
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08214—Silicon-based
- G03G5/08278—Depositing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32697—Electrostatic control
- H01J37/32706—Polarising the substrate
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31339194 | 1994-12-16 | ||
JP7312345A JPH08225947A (ja) | 1994-12-16 | 1995-11-30 | プラズマ処理方法及びプラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69528743D1 DE69528743D1 (de) | 2002-12-12 |
DE69528743T2 true DE69528743T2 (de) | 2003-03-13 |
Family
ID=26567128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69528743T Expired - Fee Related DE69528743T2 (de) | 1994-12-16 | 1995-12-15 | Verfahren und Vorrichtung zur Plasmabehandlung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5849455A (de) |
EP (1) | EP0717127B1 (de) |
JP (1) | JPH08225947A (de) |
KR (1) | KR100256197B1 (de) |
CN (1) | CN1057349C (de) |
DE (1) | DE69528743T2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6156472A (en) * | 1997-11-06 | 2000-12-05 | Canon Kabushiki Kaisha | Method of manufacturing electrophotographic photosensitive member |
US6197471B1 (en) * | 1998-03-25 | 2001-03-06 | Coulter International Corp. | Amorphous silicon photoreceptor and method for making same |
US6073577A (en) * | 1998-06-30 | 2000-06-13 | Lam Research Corporation | Electrode for plasma processes and method for manufacture and use thereof |
US6596653B2 (en) | 2001-05-11 | 2003-07-22 | Applied Materials, Inc. | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD |
US6740601B2 (en) | 2001-05-11 | 2004-05-25 | Applied Materials Inc. | HDP-CVD deposition process for filling high aspect ratio gaps |
TW561515B (en) * | 2001-11-30 | 2003-11-11 | Tokyo Electron Ltd | Processing device, and gas discharge suppressing member |
US20040011290A1 (en) * | 2002-06-10 | 2004-01-22 | Takaharu Kondo | Apparatus and process for forming deposited film |
CN100495219C (zh) * | 2002-12-12 | 2009-06-03 | 佳能株式会社 | 电摄影感光体 |
US6808748B2 (en) | 2003-01-23 | 2004-10-26 | Applied Materials, Inc. | Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology |
US6958112B2 (en) | 2003-05-27 | 2005-10-25 | Applied Materials, Inc. | Methods and systems for high-aspect-ratio gapfill using atomic-oxygen generation |
US6903031B2 (en) * | 2003-09-03 | 2005-06-07 | Applied Materials, Inc. | In-situ-etch-assisted HDP deposition using SiF4 and hydrogen |
US7229931B2 (en) | 2004-06-16 | 2007-06-12 | Applied Materials, Inc. | Oxygen plasma treatment for enhanced HDP-CVD gapfill |
US7183227B1 (en) | 2004-07-01 | 2007-02-27 | Applied Materials, Inc. | Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gas |
US7087536B2 (en) | 2004-09-01 | 2006-08-08 | Applied Materials | Silicon oxide gapfill deposition using liquid precursors |
CN101198719B (zh) * | 2005-06-16 | 2012-05-30 | 京瓷株式会社 | 感光体的制造方法及制造装置 |
CN100367829C (zh) * | 2005-12-08 | 2008-02-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种等离子体激励方法 |
EP1993627A4 (de) * | 2006-02-27 | 2012-10-10 | Nanosurface Technologies Llc | Molekulare plasmaabscheidung von kolloidalen materialien |
US20080138374A1 (en) * | 2006-02-27 | 2008-06-12 | Storey Daniel M | Molecular Plasma Deposition of Bioactive Small Molecules |
US8197636B2 (en) * | 2007-07-12 | 2012-06-12 | Applied Materials, Inc. | Systems for plasma enhanced chemical vapor deposition and bevel edge etching |
KR101545525B1 (ko) * | 2007-07-12 | 2015-08-19 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 에지 구역을 프로세싱하기 위한 장치 및 방법 |
US7678715B2 (en) | 2007-12-21 | 2010-03-16 | Applied Materials, Inc. | Low wet etch rate silicon nitride film |
CN101609858B (zh) * | 2008-06-20 | 2011-06-22 | 福建钧石能源有限公司 | 薄膜沉积方法 |
JP5751549B2 (ja) * | 2010-03-15 | 2015-07-22 | 株式会社日立国際電気 | 熱処理装置及び半導体の製造方法 |
JP4959029B1 (ja) * | 2011-09-12 | 2012-06-20 | キヤノン株式会社 | 電子写真感光体の製造方法 |
CN102573264A (zh) * | 2011-12-01 | 2012-07-11 | 西安交通大学 | 大气压下开放式单极射频低温等离子体发生装置 |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100255703B1 (ko) * | 1991-06-27 | 2000-05-01 | 조셉 제이. 스위니 | 전자기 rf연결부를 사용하는 플라즈마 처리기 및 방법 |
US5582880A (en) * | 1992-03-27 | 1996-12-10 | Canon Kabushiki Kaisha | Method of manufacturing non-single crystal film and non-single crystal semiconductor device |
JP3237788B2 (ja) * | 1992-09-16 | 2001-12-10 | キヤノン株式会社 | 非晶質シリコン薄膜の製造方法 |
JP3155413B2 (ja) * | 1992-10-23 | 2001-04-09 | キヤノン株式会社 | 光受容部材の形成方法、該方法による光受容部材および堆積膜の形成装置 |
JP3351843B2 (ja) * | 1993-02-24 | 2002-12-03 | 忠弘 大見 | 成膜方法 |
WO2004083486A1 (ja) * | 1993-03-23 | 2004-09-30 | Atsushi Yamagami | 超短波を用いたプラズマcvd法及び該プラズマcvd装置 |
JP3236111B2 (ja) * | 1993-03-31 | 2001-12-10 | キヤノン株式会社 | プラズマ処理装置及び処理方法 |
DE4400898C1 (de) * | 1994-01-14 | 1995-03-30 | Bergische Stahlindustrie | Wellenbremsscheibe für Schienenfahrzeuge |
JP3372647B2 (ja) * | 1994-04-18 | 2003-02-04 | キヤノン株式会社 | プラズマ処理装置 |
-
1995
- 1995-11-30 JP JP7312345A patent/JPH08225947A/ja active Pending
- 1995-12-13 US US08/571,784 patent/US5849455A/en not_active Expired - Fee Related
- 1995-12-15 CN CN95120912A patent/CN1057349C/zh not_active Expired - Fee Related
- 1995-12-15 KR KR1019950050403A patent/KR100256197B1/ko not_active IP Right Cessation
- 1995-12-15 DE DE69528743T patent/DE69528743T2/de not_active Expired - Fee Related
- 1995-12-15 EP EP95119868A patent/EP0717127B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0717127A3 (de) | 1996-06-26 |
EP0717127A2 (de) | 1996-06-19 |
CN1132800A (zh) | 1996-10-09 |
EP0717127B1 (de) | 2002-11-06 |
US5849455A (en) | 1998-12-15 |
DE69528743D1 (de) | 2002-12-12 |
KR100256197B1 (ko) | 2000-05-15 |
JPH08225947A (ja) | 1996-09-03 |
KR960026129A (ko) | 1996-07-22 |
CN1057349C (zh) | 2000-10-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |