KR970704607A - 탄소막코팅 플라스틱용기의 제조장치 및 제조방법(apparatus for and method of manufacturing plastic container coated with carbon film) - Google Patents

탄소막코팅 플라스틱용기의 제조장치 및 제조방법(apparatus for and method of manufacturing plastic container coated with carbon film) Download PDF

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KR970704607A
KR970704607A KR1019970700628A KR19970700628A KR970704607A KR 970704607 A KR970704607 A KR 970704607A KR 1019970700628 A KR1019970700628 A KR 1019970700628A KR 19970700628 A KR19970700628 A KR 19970700628A KR 970704607 A KR970704607 A KR 970704607A
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container
electrode
space
outer electrode
wall surface
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가즈후미 나가시마
히데아키 시마
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마나베 게이사쿠
기린비루 가부시기가이샤
쓰지 오사무
가부시기가이샤 사무코 인터내셔날겐큐쇼
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D1/00Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348Dielectric barrier discharge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08Plant for applying liquids or other fluent materials to objects
    • B05B5/12Plant for applying liquids or other fluent materials to objects specially adapted for coating the interior of hollow bodies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
    • B05D7/227Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes of containers, cans or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D23/00Details of bottles or jars not otherwise provided for
    • B65D23/02Linings or internal coatings
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563Gas nozzles
    • C23C16/45578Elongated nozzles, tubes with holes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082Radio frequency generated discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32Processing objects by plasma generation
    • H01J2237/33Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332Coating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Chemical Vapour Deposition (AREA)
  • Containers Having Bodies Formed In One Piece (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)

Abstract

용기(20)를 수용하기 위하여 형성되어 용기의 외형과 대략 상사형(相似形)의 공간을 가지는 중공상(中空狀)의 외부전극(12)과, 이 외부전극의 공간에에 용기가 수용되었을 때에 이 용기의 입구가 맞닿는 동시에 외부전극을 절연하는 절연판(11)과, 외부전극의 공간내에 수용된 용기의 내측에 용기의 입구로부터 삽입되는 내부전극(16)과 외부전극의 공간내에 연통되어 공간내의 배기를 행하는 배기수단과, 외부전극의 공간내에 수용된 용기의 내측에 원료가스를 공급하는 공급수단과, 외부전극에 접속된 고주파전원(14)과를 구비하고 있으며, 외부전극의 공간내에 용기를 수용하여 외부전극을 절연부재에 의하여 절연하고, 용기내에 내부전극을 삽입하는 동시에 이 내부전극을 접지하고, 외부전극의 공간내를 배기하고, 외부전극의 공간내에 수용된 용기의 내측에 원료가스를 공급한 후, 외부전극에 고주파를 인가하여 탄소막코팅을 행한다.

Description

탄소막코팅 플라스틱용기의 제조장치 및 제조방법(APPARATUS FOR AND METHOD OF MANUFCTURING PLASTIC CONTAINER COATED WITH CARBON FILM)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 이 발명에 의한 탄소막코팅 플라스틱용기를 제조하기 위한 제조장치의 일실시예를 나타낸 측단면도.
제2도는 이 실시예의 일부를 확대하여 나타낸 단면도이다.
제3도는 이 실시예의 단열판을 나타낸 평면도이다.
제4도는 이 발명에 의한 탄소막코팅 플라스틱용기의 일실시예를 나타낸 측단면도이다.
제5도는 경질탄소막의 헝성조건을 나타낸 표이다.

Claims (13)

  1. 용기를 수용하기 위하여 형성되어 수용되는 용기의 외형과 대락 상사형(相似形)의 공간을 가지는 중공상(中空狀)의 외부전극과,이 외부전극의 공간내에 용기가 수용되었을 때에 이 용기의 입구가 맞닿는 동시에 외부전극을 절연하는 절연부재와, 접지되어 외부전극의 공간내에 수용된 용기의 내측에 용기의 입구로부터 삽입되는 내부전극과, 외부전극의 고안내에 연통되어 공간내의 배기를 행하는 배기수단과, 외부전극의 공간내에 수용된 용기의 내측에 원료가스를 공급하는 공급수단과, 외부전극에 접속된 고주파전원파를 구비하고 있는 것을 특징으로 하는 탄소막코팅 플라스틱용기의 제조장치.
  2. 청구항1에 있어서, 상기 내부전극의 외형이 외부전극의 공간내에 수용되는 용기의 내벽면의 형상과 대략 상사형으로 형성되어 있는 탄소막코팅 플라스틱용기의 제조장치.
  3. 청구항1에 있어서 상기 내부전극에 원료가스의 분출공이 형성되어, 상기 공급수단으로부터 공급되는 원료가스가, 내부전극의 분출공으로부터 외부전극의 공간내에 수용된 용기내에 분출되는 탄소막코팅 플라스틱용기의 제조장치.
  4. 청구항3에 있어서, 상기 내부전극의 분출공이, 1개 또는 복수개 형성되어 있는 탄소막코팅 플라스틱용기의 제조장치.
  5. 청구항1에 있어서, 상기 절연부재에 홈부가 형성되고, 이 절연부재에 외부전극의 공간내에 수용된 용기의 입구가 맞닿았을 때, 외부전극의 내벽면과 용기의 외벽면과의 사이에 형성되는 공간과 용기의 내부가 홈부에 의하여 연통되는 탄소막코팅 플라스틱용기의 제조장치.
  6. 청구항1에 있어서, 상기 용기가 음료용 병인 탄소막코팅 플라스틱용기의 제조장치.
  7. 용기를 수용하여 수용되는 용기의 외형과 대략 상사형의 공간을 외부전극에 형성하고, 이 공간내에 수용되는 용기의 입구부가 맞닿는 절연부재에 의하여 외부전극을 절연하고, 공간내에 수용된 용기의 내측에 용기의 입구로부터 내부전극을 삽입하는 동시에 이 내부전극을 접지하고, 외부전극의 공간내를 배기하고, 외부전극의 공간내에 수용된 용기의 내측에 원료가스를 공급한 후, 외부전극에 고주파를 인가하는 것을 특징으로 하는 탄소막 코팅 플라스틱용기의 제조방법.
  8. 청구항7에 있어서, 상기 용기가 음료용 병인 탄소막코팅 플라스틱용기의 제조방법.
  9. 청구항7에 있어서, 상기 외부전극의 내벽면과 이 외부전극내에 수용된 용기의 외벽면과의 사이의 간격 및 이 용기의 내벽면과 내부전극의 외벽면과의 사이의 간격을 대략 균일하게 유지하는 탄소막코팅 플라스틱용기의 제조방법.
  10. 청구항7에 있어서, 상기 절연부재에 홈을 형성하고, 이 홈을 통하여 용기의 내부공간과 함께 용기의 외벽면과 외부전극의 내벽면과의 사이의 외부공간도 배기하는 탄소막코팅 플라스틱용기의 제조방법.
  11. 청구항10에 있어서, 상기 용기의 외벽면과 외부전극의 내벽면과의 사이의 외부공간의 배기 직후에 외부전극의 공간내에 수용된 용기의 내측에 원료가스를 공급하는 탄소막코팅 플라스틱용기의 제조방법.
  12. 청구항7에 있어서, 플라스틱용기에 탄소막코팅하기 전에, 무가가스에 의하여 플라즈마처리를 행하는 탄소막코팅 플라스틱용기의 제조방법
  13. 청구항7에 이어서, 외부전극의 공간내의 배기에 의한 진공도가10-2∼10-5torr인 탄소막코팅 플라스틱용기 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970700628A 1994-08-11 1995-08-09 탄소막코팅 플라스틱용기의 제조장치 및 제조방법 KR100347249B1 (ko)

Applications Claiming Priority (2)

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JP6189224A JP2788412B2 (ja) 1994-08-11 1994-08-11 炭素膜コーティングプラスチック容器の製造装置および製造方法
JP1994-189224 1994-08-11

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KR100347249B1 KR100347249B1 (ko) 2003-03-10

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US (1) US5798139A (ko)
EP (1) EP0773167B1 (ko)
JP (1) JP2788412B2 (ko)
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AT (1) ATE226166T1 (ko)
CA (1) CA2196894C (ko)
DE (1) DE69528588T2 (ko)
DK (1) DK0773167T3 (ko)
MY (1) MY113185A (ko)
TW (1) TW493012B (ko)
WO (1) WO1996005112A1 (ko)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0853116A (ja) * 1994-08-11 1996-02-27 Kirin Brewery Co Ltd 炭素膜コーティングプラスチック容器
US5965217A (en) * 1996-10-08 1999-10-12 Citizen Watch Co., Ltd. Method of forming DLC films over inner surface of cylindrical member
AU776224B2 (en) * 1997-02-19 2004-09-02 Kirin Beer Kabushiki Kaisha Apparatus and method for manufacturing plastic container coated with carbon film
EP1010773A4 (en) * 1997-02-19 2004-08-25 Kirin Brewery METHOD AND DEVICE FOR PRODUCING PLASTIC CONTAINER COATED WITH CARBON FILM
US5879763A (en) * 1997-09-03 1999-03-09 Citizen Watch Co., Ltd. Method of forming hard carbon film over inner surface of cylindrical member
BR9812701A (pt) * 1997-09-30 2000-08-22 Tetra Laval Holdings & Finance Método e aparelho para o tratamento da superfìcie interna de garrafas plásticas em um processo intensificado por plasma
JP3669138B2 (ja) 1998-03-05 2005-07-06 日新電機株式会社 プラズマcvd法、プラズマcvd装置及び電極
US6277480B1 (en) 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
US6335086B1 (en) 1999-05-03 2002-01-01 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6368664B1 (en) 1999-05-03 2002-04-09 Guardian Industries Corp. Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon
US6447891B1 (en) 1999-05-03 2002-09-10 Guardian Industries Corp. Low-E coating system including protective DLC
US6461731B1 (en) 1999-05-03 2002-10-08 Guardian Industries Corp. Solar management coating system including protective DLC
US6312808B1 (en) 1999-05-03 2001-11-06 Guardian Industries Corporation Hydrophobic coating with DLC & FAS on substrate
US6261693B1 (en) 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6475573B1 (en) 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
US6280834B1 (en) 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate
US7166336B1 (en) * 1999-05-19 2007-01-23 Mitsubishi Shoji Plastics Corporation DLC film, DLC-coated plastic container, and method and apparatus for manufacturing DLC-coated plastic container
NZ510273A (en) 1999-08-06 2003-08-29 Plastipak Packaging Inc Plastic container having a carbon-treated internal surface
US6475579B1 (en) 1999-08-06 2002-11-05 Plastipak Packaging, Inc. Multi-layer plastic container having a carbon-treated internal surface and method for making the same
FR2799994B1 (fr) * 1999-10-25 2002-06-07 Sidel Sa Dispositif pour le traitement d'un recipient a l'aide d'un plasma a basse pression comportant un circuit de vide perfectionne
DE19957744A1 (de) * 1999-12-01 2001-06-07 Tetra Laval Holdings & Finance Vorrichtung zum Abdichten des Stirnrandes eines Behälterhalses
US6528947B1 (en) 1999-12-06 2003-03-04 E. I. Du Pont De Nemours And Company Hollow cathode array for plasma generation
US20030087030A1 (en) * 1999-12-27 2003-05-08 Kenichi Hama Pet container for foods and drinks containing recycled resin and having dlc coating film formed on surface thereof
DE10004274A1 (de) * 2000-02-01 2001-08-02 Tetra Laval Holdings & Finance Vorrichtung zum Beschichten der inneren Oberfläche eines Hohlkörpers
JP4492985B2 (ja) 2000-02-24 2010-06-30 三菱商事プラスチック株式会社 液体医薬品用プラスチック容器及び液体医薬品の保存回収方法
JP2001240115A (ja) * 2000-02-24 2001-09-04 Mitsubishi Shoji Plast Kk 乾燥固体食品用プラスチック容器
JP2001322656A (ja) * 2000-05-15 2001-11-20 Hokkai Can Co Ltd 合成樹脂製キャップ
FR2812665B1 (fr) * 2000-08-01 2003-08-08 Sidel Sa Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede
JP3993971B2 (ja) * 2000-08-09 2007-10-17 北海製罐株式会社 ガスバリア被覆層を有するプラスチック製容器及びその製法
FR2814382B1 (fr) * 2000-09-28 2003-05-09 Cebal Procede de depot d'un revetement interne dans un recipient en matiere plastique
US6461699B1 (en) * 2000-10-06 2002-10-08 Plastipak Packaging, Inc. Plastic container having a carbon-treated internal surface for non-carbonated food products
DE10054653A1 (de) * 2000-11-03 2002-05-08 Ver Foerderung Inst Kunststoff Verfahren und Vorrichtung zum Beschichten von Hohlkörper
AU2001222223A1 (en) * 2000-12-21 2002-07-01 Mitsubishi Shoji Plastics Corporation Apparatus for manufacturing dlc-film-coated plastic container, method of manufacturing the same, and method for cleaning inner electrode
CN1235771C (zh) 2000-12-25 2006-01-11 三菱商事塑料株式会社 用于制造类金刚石薄膜涂敷的塑料容器的设备及其制造方法
JP4678959B2 (ja) * 2001-02-05 2011-04-27 サムコ株式会社 プラスチック容器の壁面への成膜方法、成膜装置及びプラスチック容器
GB2383340B (en) 2001-04-19 2004-09-29 Nissei Asb Machine Co Ltd Machine for making a gas barrier synthetic resin container
JP4659279B2 (ja) * 2001-06-19 2011-03-30 北海製罐株式会社 プラスチック製ボトルの内面被膜検査方法
WO2003000558A1 (fr) * 2001-06-20 2003-01-03 Mitsubishi Shoji Plastics Corporation Contenant en plastique a cloisons de separation et caracteristique d'isolation contre l'humidite et les gaz, dispositif et procede de fabrication dudit contenant en plastique
EP1400456A1 (en) * 2001-06-26 2004-03-24 Mitsubishi Shoji Plastics Corporation MANUFACTURING DEVICE FOR DLC FILM COATED PLASTIC CONTAINER; DLC FILM COATED PLASTIC CONTAINER, AND METHOD OF MANUFACTURING THE DLC FILM COATED PLASTIC CONTAINER
JP3653035B2 (ja) * 2001-07-31 2005-05-25 三菱重工業株式会社 プラスチック容器内面への炭素膜形成装置および内面炭素膜被覆プラスチック容器の製造方法
DE10138696A1 (de) * 2001-08-07 2003-03-06 Schott Glas Verfahren und Vorrichtung zum gleichzeitigen Beschichten und Formen eines dreidimensionalen Körpers
DE10139305A1 (de) 2001-08-07 2003-03-06 Schott Glas Verbundmaterial aus einem Substratmaterial und einem Barriereschichtmaterial
DE10138697B4 (de) * 2001-08-07 2005-02-24 Schott Ag Verfahren und Vorrichtung zum Beschichten und Spritzblasen eines dreidimensionalen Körpers
DE10204363A1 (de) * 2002-02-02 2003-08-14 Schott Glas Interferenzbeschichtung zur Verbesserung des Energiehaushaltes von HID-Lampen
WO2003086878A1 (fr) * 2002-04-15 2003-10-23 Mitsubishi Shoji Plastics Corporation Systeme et procede de formation d'un film dlc sur une surface interieure d'un contenant en plastique
WO2003100116A1 (de) * 2002-05-24 2003-12-04 Sig Technology Ltd. Verfahren und vorrichtung zur plasmabehandlung von werkstücken
JP4132982B2 (ja) * 2002-05-28 2008-08-13 麒麟麦酒株式会社 Dlc膜コーティングプラスチック容器の製造装置
AU2003241765B2 (en) 2002-05-28 2009-08-06 Kirin Beer Kabushiki Kaisha DLC film coated plastic container, and device and method for manufacturing the plastic container
EP1510595A4 (en) 2002-06-05 2007-05-09 Mitsubishi Shoji Plastics Corp METHOD AND DEVICE FOR CLEANING A GAS INSERTION TUBE OF RAW MATERIALS USED IN A VAPOR PHASE CHEMICAL DEPOSITION FILM FORMING APPARATUS
JP4149748B2 (ja) 2002-06-24 2008-09-17 三菱商事プラスチック株式会社 ロータリー型量産用cvd成膜装置及びプラスチック容器内表面へのcvd膜成膜方法
DE10242086A1 (de) * 2002-09-11 2004-04-15 Sig Technology Ltd. Behälter zur Verpackung von Produkten, Vorrichtung zur Verarbeitung von Kunstoff sowie Verfahren zur Behälterherstellung
WO2004031440A1 (ja) 2002-09-30 2004-04-15 Toppan Printing Co., Ltd. 薄膜成膜方法、薄膜成膜装置および薄膜成膜プロセスの監視方法
US7513953B1 (en) * 2003-11-25 2009-04-07 Nano Scale Surface Systems, Inc. Continuous system for depositing films onto plastic bottles and method
FR2872718B1 (fr) * 2004-07-08 2006-10-20 Sidel Sa Sa Procede de traitement d'un recipient comportant des phases de pompage a vide et machine pour sa mise en oeuvre
JP4171452B2 (ja) 2004-10-18 2008-10-22 三菱重工食品包装機械株式会社 バリア膜形成用内部電極及び成膜装置
US20060198973A1 (en) * 2005-03-03 2006-09-07 Jester Randy D Packaging with cycloolefin food/beverage contact layer
US8186301B2 (en) 2005-05-27 2012-05-29 Kirin Beer Kabushiki Kaisha Apparatus for manufacturing gas barrier plastic container, method for manufacturing the container, and the container
DE102005040266A1 (de) * 2005-08-24 2007-03-01 Schott Ag Verfahren und Vorrichtung zur innenseitigen Plasmabehandlung von Hohlkörpern
WO2007029050A1 (en) * 2005-09-09 2007-03-15 Sidel Barrier layer
JP5355860B2 (ja) * 2007-03-16 2013-11-27 三菱重工食品包装機械株式会社 バリア膜形成装置、バリア膜形成方法及びバリア膜被覆容器
DE102007041573A1 (de) 2007-09-01 2009-03-05 Khs Corpoplast Gmbh & Co. Kg Verfahren und Vorrichtung zum Sterilisieren sowie Vorrichtung zur Blasformung von Behältern
DE102008037159A1 (de) * 2008-08-08 2010-02-11 Krones Ag Vorrichtung und Verfahren zur Plasmabehandlung von Hohlkörpern
US9260781B2 (en) * 2009-02-18 2016-02-16 Council Of Scientific And Industrial Research Process to deposit diamond like carbon as surface of a shaped object
JP4873037B2 (ja) * 2009-03-31 2012-02-08 東洋製罐株式会社 非耐圧性プラスチック容器
JP4372833B1 (ja) * 2009-04-13 2009-11-25 麒麟麦酒株式会社 ガスバリア性薄膜コーティングプラスチック容器の製造方法
US20110001103A1 (en) * 2009-07-01 2011-01-06 Chi-Kuang Chen Elevating mechanism for measuring concentrations of medicines
DE102012201956A1 (de) * 2012-02-09 2013-08-14 Krones Ag Hohlkathoden-Gaslanze für die Innenbeschichtung von Behältern
DE102012201955A1 (de) * 2012-02-09 2013-08-14 Krones Ag Powerlanze und plasmaunterstützte Beschichtung mit Hochfrequenzeinkopplung
JP6047308B2 (ja) 2012-05-28 2016-12-21 日精エー・エス・ビー機械株式会社 樹脂容器用コーティング装置
JP6093552B2 (ja) 2012-11-08 2017-03-08 日精エー・エス・ビー機械株式会社 樹脂容器用コーティング装置
CN103014652B (zh) * 2012-12-07 2016-01-20 中国电子科技集团公司第十一研究所 单晶生长用石英安瓿内壁碳膜制备装置
ITFI20130001A1 (it) * 2013-01-02 2014-07-03 Enomatic S R L Dispositivo erogatore di bevande gassate.
CN104368482B (zh) * 2014-11-11 2016-06-29 深圳格普斯电热技术有限公司 电热膜的内壁喷涂装置及其喷涂方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60228250A (ja) * 1984-04-24 1985-11-13 テルモ株式会社 合成樹脂製容器の製造方法
FR2592874B1 (fr) * 1986-01-14 1990-08-03 Centre Nat Rech Scient Procede pour tremper un objet en verre ou vitreux et objet ainsi trempe
EP0304220B1 (en) * 1987-08-10 1994-12-07 Semiconductor Energy Laboratory Co., Ltd. Thin film carbon material and method of depositing the same
JPH01100277A (ja) * 1987-10-12 1989-04-18 Idemitsu Petrochem Co Ltd 硬質炭素膜付着湾曲板、硬質炭素膜付着湾曲板の製造方法および硬質炭素膜付着湾曲板の製造装置
JPH0270059A (ja) * 1987-12-02 1990-03-08 Idemitsu Petrochem Co Ltd 器具およびその製造方法
JPH0627342B2 (ja) * 1988-02-05 1994-04-13 株式会社半導体エネルギー研究所 炭素膜形成方法
JPH01239919A (ja) * 1988-03-22 1989-09-25 Semiconductor Energy Lab Co Ltd プラズマ処理方法およびプラズマ処理装置
US4846101A (en) * 1988-07-01 1989-07-11 Becton, Dickinson And Company Apparatus for plasma treatment of small diameter tubes
US4859489A (en) * 1988-07-18 1989-08-22 Vapor Technologies Inc. Method of coating a metal gas-pressure bottle or tank
US5041201A (en) * 1988-09-16 1991-08-20 Semiconductor Energy Laboratory Co., Ltd. Plasma processing method and apparatus
US5185179A (en) * 1988-10-11 1993-02-09 Semiconductor Energy Laboratory Co., Ltd. Plasma processing method and products thereof
JPH02138469A (ja) * 1988-11-16 1990-05-28 Hitachi Ltd ダイアモンド表面を有する真空用材料、この真空用材料の表面処理法、ダイアモンド膜表面の作製法、真空用材料を用いた真空容器とその部品,真空内駆動機構,電子放出源,真空内ヒータおよび蒸着源容器
JPH03130363A (ja) * 1989-10-16 1991-06-04 Nikon Corp ダイヤモンド状炭素膜被覆プラスチツック物品
US5112025A (en) * 1990-02-22 1992-05-12 Tdk Corporation Molds having wear resistant release coatings
US5169452A (en) * 1990-05-14 1992-12-08 Tdk Corporation Apparatus for the synthesis of diamond-like thin films
US5190807A (en) * 1990-10-18 1993-03-02 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
JPH04304373A (ja) * 1991-03-29 1992-10-27 Shimadzu Corp 硬質カーボン膜形成方法
MX9303141A (es) * 1992-05-28 1994-04-29 Polar Materials Inc Metodos y aparatos para depositar recubrimientos de barrera.
US5308649A (en) * 1992-06-26 1994-05-03 Polar Materials, Inc. Methods for externally treating a container with application of internal bias gas
US5470661A (en) * 1993-01-07 1995-11-28 International Business Machines Corporation Diamond-like carbon films from a hydrocarbon helium plasma
US5565248A (en) * 1994-02-09 1996-10-15 The Coca-Cola Company Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance

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EP0773167A1 (en) 1997-05-14
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ATE226166T1 (de) 2002-11-15
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JPH0853117A (ja) 1996-02-27
JP2788412B2 (ja) 1998-08-20
KR100347249B1 (ko) 2003-03-10
US5798139A (en) 1998-08-25
DE69528588D1 (de) 2002-11-21
DE69528588T2 (de) 2003-07-10
TW493012B (en) 2002-07-01
CA2196894A1 (en) 1996-02-22
WO1996005112A1 (fr) 1996-02-22

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