EA200401343A1 - Плазменный агрегат, работающий при атмосферном давлении - Google Patents

Плазменный агрегат, работающий при атмосферном давлении

Info

Publication number
EA200401343A1
EA200401343A1 EA200401343A EA200401343A EA200401343A1 EA 200401343 A1 EA200401343 A1 EA 200401343A1 EA 200401343 A EA200401343 A EA 200401343A EA 200401343 A EA200401343 A EA 200401343A EA 200401343 A1 EA200401343 A1 EA 200401343A1
Authority
EA
Eurasian Patent Office
Prior art keywords
dielectric plate
atmospheric pressure
electrode
pair
working
Prior art date
Application number
EA200401343A
Other languages
English (en)
Other versions
EA008013B1 (ru
Inventor
Эндрю Джеймс Гудвин
Стюарт Лидли
Фрэнк Суоллоу
Питер Доббин
Original Assignee
Дау Корнинг Айэлэнд Лимитед
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Дау Корнинг Айэлэнд Лимитед filed Critical Дау Корнинг Айэлэнд Лимитед
Publication of EA200401343A1 publication Critical patent/EA200401343A1/ru
Publication of EA008013B1 publication Critical patent/EA008013B1/ru

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Secondary Cells (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Materials For Medical Uses (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

Плазменный агрегат (1), работающий при атмосферном давлении, содержащий первую и вторую пару вертикально расположенных, параллельных разнесенных плоских электродов (36) по меньшей мере с одной диэлектрической пластинкой (31) между упомянутой первой парой, смежной одному из электродов, и по меньшей мере с одной диэлектрической пластинкой (31) между упомянутой второй парой, смежной одному из электродов, причем промежуток между диэлектрической пластинкой и другой диэлектрической пластинкой или электродом каждой первой и второй пар электродов образует первую и вторую области (25, 60) плазмы, отличающийся тем, что агрегат дополнительно содержит средство (70, 71, 72) перемещения подложки последовательно через упомянутые первую и вторую области (25, 60) плазмы, и распылитель (74), выполненный с возможностью введения распыленной жидкости или твердого материала для изготовления покрытия в одну из упомянутых первой или второй областей плазмы.Международная заявка была опубликована вместе с отчетом о международном поиске.
EA200401343A 2002-04-10 2003-04-08 Плазменный агрегат, работающий при атмосферном давлении EA008013B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0208261.8A GB0208261D0 (en) 2002-04-10 2002-04-10 An atmospheric pressure plasma assembly
PCT/EP2003/004349 WO2003086031A1 (en) 2002-04-10 2003-04-08 An atmospheric pressure plasma assembly

Publications (2)

Publication Number Publication Date
EA200401343A1 true EA200401343A1 (ru) 2005-04-28
EA008013B1 EA008013B1 (ru) 2007-02-27

Family

ID=9934594

Family Applications (1)

Application Number Title Priority Date Filing Date
EA200401343A EA008013B1 (ru) 2002-04-10 2003-04-08 Плазменный агрегат, работающий при атмосферном давлении

Country Status (16)

Country Link
US (1) US20050178330A1 (ru)
EP (1) EP1493309B1 (ru)
JP (1) JP2005524930A (ru)
KR (1) KR100940454B1 (ru)
CN (1) CN1314301C (ru)
AT (1) ATE321436T1 (ru)
AU (1) AU2003229731A1 (ru)
BR (1) BR0308805A (ru)
CA (1) CA2481715A1 (ru)
DE (1) DE60304167T2 (ru)
EA (1) EA008013B1 (ru)
ES (1) ES2260619T3 (ru)
GB (1) GB0208261D0 (ru)
MX (1) MXPA04009894A (ru)
TW (1) TWI289868B (ru)
WO (1) WO2003086031A1 (ru)

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KR100940454B1 (ko) 2010-02-04
ES2260619T3 (es) 2006-11-01
JP2005524930A (ja) 2005-08-18
US20050178330A1 (en) 2005-08-18
WO2003086031A1 (en) 2003-10-16
DE60304167T2 (de) 2007-03-08
BR0308805A (pt) 2005-01-04
TW200306606A (en) 2003-11-16
EP1493309B1 (en) 2006-03-22
CN1643997A (zh) 2005-07-20
TWI289868B (en) 2007-11-11
ATE321436T1 (de) 2006-04-15
CA2481715A1 (en) 2003-10-16
CN1314301C (zh) 2007-05-02
EP1493309A1 (en) 2005-01-05
AU2003229731A1 (en) 2003-10-20
DE60304167D1 (de) 2006-05-11
EA008013B1 (ru) 2007-02-27
KR20040099423A (ko) 2004-11-26
GB0208261D0 (en) 2002-05-22
MXPA04009894A (es) 2004-12-13

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