DE60304167D1 - Atmosphärendruck-plasmavorrichtung - Google Patents

Atmosphärendruck-plasmavorrichtung

Info

Publication number
DE60304167D1
DE60304167D1 DE60304167T DE60304167T DE60304167D1 DE 60304167 D1 DE60304167 D1 DE 60304167D1 DE 60304167 T DE60304167 T DE 60304167T DE 60304167 T DE60304167 T DE 60304167T DE 60304167 D1 DE60304167 D1 DE 60304167D1
Authority
DE
Germany
Prior art keywords
dielectric plate
atmospheric pressure
electrode
pair
pressure plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60304167T
Other languages
English (en)
Other versions
DE60304167T2 (de
Inventor
Andrew James Goodwin
Stuart Leadley
Frank Swallow
Peter Dobbyn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Corning Ireland Ltd
Original Assignee
Dow Corning Ireland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Ireland Ltd filed Critical Dow Corning Ireland Ltd
Application granted granted Critical
Publication of DE60304167D1 publication Critical patent/DE60304167D1/de
Publication of DE60304167T2 publication Critical patent/DE60304167T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Secondary Cells (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
DE60304167T 2002-04-10 2003-04-08 Atmosphärendruck-plasmavorrichtung Expired - Lifetime DE60304167T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0208261 2002-04-10
GBGB0208261.8A GB0208261D0 (en) 2002-04-10 2002-04-10 An atmospheric pressure plasma assembly
PCT/EP2003/004349 WO2003086031A1 (en) 2002-04-10 2003-04-08 An atmospheric pressure plasma assembly

Publications (2)

Publication Number Publication Date
DE60304167D1 true DE60304167D1 (de) 2006-05-11
DE60304167T2 DE60304167T2 (de) 2007-03-08

Family

ID=9934594

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60304167T Expired - Lifetime DE60304167T2 (de) 2002-04-10 2003-04-08 Atmosphärendruck-plasmavorrichtung

Country Status (16)

Country Link
US (1) US20050178330A1 (de)
EP (1) EP1493309B1 (de)
JP (1) JP2005524930A (de)
KR (1) KR100940454B1 (de)
CN (1) CN1314301C (de)
AT (1) ATE321436T1 (de)
AU (1) AU2003229731A1 (de)
BR (1) BR0308805A (de)
CA (1) CA2481715A1 (de)
DE (1) DE60304167T2 (de)
EA (1) EA008013B1 (de)
ES (1) ES2260619T3 (de)
GB (1) GB0208261D0 (de)
MX (1) MXPA04009894A (de)
TW (1) TWI289868B (de)
WO (1) WO2003086031A1 (de)

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TW200409669A (en) * 2002-04-10 2004-06-16 Dow Corning Ireland Ltd Protective coating composition
GB0323295D0 (en) * 2003-10-04 2003-11-05 Dow Corning Deposition of thin films
GB0410749D0 (en) * 2004-05-14 2004-06-16 Dow Corning Ireland Ltd Coating apparatus

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CN1314301C (zh) 2007-05-02
AU2003229731A1 (en) 2003-10-20
CA2481715A1 (en) 2003-10-16
TWI289868B (en) 2007-11-11
US20050178330A1 (en) 2005-08-18
JP2005524930A (ja) 2005-08-18
ATE321436T1 (de) 2006-04-15
KR100940454B1 (ko) 2010-02-04
WO2003086031A1 (en) 2003-10-16
EP1493309A1 (de) 2005-01-05
EA008013B1 (ru) 2007-02-27
CN1643997A (zh) 2005-07-20
EP1493309B1 (de) 2006-03-22
EA200401343A1 (ru) 2005-04-28
BR0308805A (pt) 2005-01-04
DE60304167T2 (de) 2007-03-08
KR20040099423A (ko) 2004-11-26
ES2260619T3 (es) 2006-11-01
GB0208261D0 (en) 2002-05-22
MXPA04009894A (es) 2004-12-13
TW200306606A (en) 2003-11-16

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