ATE321436T1 - Atmosphärendruck-plasmavorrichtung - Google Patents

Atmosphärendruck-plasmavorrichtung

Info

Publication number
ATE321436T1
ATE321436T1 AT03722550T AT03722550T ATE321436T1 AT E321436 T1 ATE321436 T1 AT E321436T1 AT 03722550 T AT03722550 T AT 03722550T AT 03722550 T AT03722550 T AT 03722550T AT E321436 T1 ATE321436 T1 AT E321436T1
Authority
AT
Austria
Prior art keywords
dielectric plate
atmospheric pressure
electrode
pair
pressure plasma
Prior art date
Application number
AT03722550T
Other languages
English (en)
Inventor
Andrew James Goodwin
Stuart Leadley
Frank Swallow
Peter Dobbyn
Original Assignee
Dow Corning Ireland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Ireland Ltd filed Critical Dow Corning Ireland Ltd
Application granted granted Critical
Publication of ATE321436T1 publication Critical patent/ATE321436T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Secondary Cells (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Electrostatic Spraying Apparatus (AREA)
AT03722550T 2002-04-10 2003-04-08 Atmosphärendruck-plasmavorrichtung ATE321436T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0208261.8A GB0208261D0 (en) 2002-04-10 2002-04-10 An atmospheric pressure plasma assembly

Publications (1)

Publication Number Publication Date
ATE321436T1 true ATE321436T1 (de) 2006-04-15

Family

ID=9934594

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03722550T ATE321436T1 (de) 2002-04-10 2003-04-08 Atmosphärendruck-plasmavorrichtung

Country Status (16)

Country Link
US (1) US20050178330A1 (de)
EP (1) EP1493309B1 (de)
JP (1) JP2005524930A (de)
KR (1) KR100940454B1 (de)
CN (1) CN1314301C (de)
AT (1) ATE321436T1 (de)
AU (1) AU2003229731A1 (de)
BR (1) BR0308805A (de)
CA (1) CA2481715A1 (de)
DE (1) DE60304167T2 (de)
EA (1) EA008013B1 (de)
ES (1) ES2260619T3 (de)
GB (1) GB0208261D0 (de)
MX (1) MXPA04009894A (de)
TW (1) TWI289868B (de)
WO (1) WO2003086031A1 (de)

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Publication number Publication date
AU2003229731A1 (en) 2003-10-20
TWI289868B (en) 2007-11-11
CN1643997A (zh) 2005-07-20
MXPA04009894A (es) 2004-12-13
JP2005524930A (ja) 2005-08-18
WO2003086031A1 (en) 2003-10-16
GB0208261D0 (en) 2002-05-22
CN1314301C (zh) 2007-05-02
BR0308805A (pt) 2005-01-04
DE60304167T2 (de) 2007-03-08
KR100940454B1 (ko) 2010-02-04
EA200401343A1 (ru) 2005-04-28
DE60304167D1 (de) 2006-05-11
TW200306606A (en) 2003-11-16
EP1493309B1 (de) 2006-03-22
EP1493309A1 (de) 2005-01-05
CA2481715A1 (en) 2003-10-16
KR20040099423A (ko) 2004-11-26
EA008013B1 (ru) 2007-02-27
ES2260619T3 (es) 2006-11-01
US20050178330A1 (en) 2005-08-18

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