ATE451823T1 - Plasmaerzeugungselektrodenbaugruppe - Google Patents

Plasmaerzeugungselektrodenbaugruppe

Info

Publication number
ATE451823T1
ATE451823T1 AT04705817T AT04705817T ATE451823T1 AT E451823 T1 ATE451823 T1 AT E451823T1 AT 04705817 T AT04705817 T AT 04705817T AT 04705817 T AT04705817 T AT 04705817T AT E451823 T1 ATE451823 T1 AT E451823T1
Authority
AT
Austria
Prior art keywords
electrodes
electrode assembly
plasma generation
generation electrode
housing
Prior art date
Application number
AT04705817T
Other languages
English (en)
Inventor
Frank Swallow
Peter Dobbyn
Original Assignee
Dow Corning Ireland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0302265A external-priority patent/GB0302265D0/en
Priority claimed from GB0304094A external-priority patent/GB0304094D0/en
Application filed by Dow Corning Ireland Ltd filed Critical Dow Corning Ireland Ltd
Application granted granted Critical
Publication of ATE451823T1 publication Critical patent/ATE451823T1/de

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/46Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/4697Generating plasma using glow discharges
AT04705817T 2003-01-31 2004-01-28 Plasmaerzeugungselektrodenbaugruppe ATE451823T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0302265A GB0302265D0 (en) 2003-01-31 2003-01-31 Plasma generating electrode assembly
GB0304094A GB0304094D0 (en) 2003-02-24 2003-02-24 Plasma generating electrode assembly
PCT/EP2004/001756 WO2004068916A1 (en) 2003-01-31 2004-01-28 Plasma generating electrode assembly

Publications (1)

Publication Number Publication Date
ATE451823T1 true ATE451823T1 (de) 2009-12-15

Family

ID=32827039

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04705817T ATE451823T1 (de) 2003-01-31 2004-01-28 Plasmaerzeugungselektrodenbaugruppe

Country Status (13)

Country Link
US (2) US20060196424A1 (de)
EP (1) EP1588592B1 (de)
JP (1) JP2006515708A (de)
KR (1) KR101072792B1 (de)
AT (1) ATE451823T1 (de)
BR (1) BRPI0407155A (de)
CA (1) CA2513327A1 (de)
DE (1) DE602004024500D1 (de)
EA (1) EA010388B1 (de)
ES (1) ES2336329T3 (de)
MX (1) MXPA05008024A (de)
TW (1) TW200423824A (de)
WO (1) WO2004068916A1 (de)

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Also Published As

Publication number Publication date
TW200423824A (en) 2004-11-01
EA010388B1 (ru) 2008-08-29
EA200501210A1 (ru) 2005-12-29
WO2004068916A1 (en) 2004-08-12
US7892611B2 (en) 2011-02-22
DE602004024500D1 (de) 2010-01-21
US20060196424A1 (en) 2006-09-07
US20110006039A1 (en) 2011-01-13
MXPA05008024A (es) 2006-01-27
KR20050103201A (ko) 2005-10-27
EP1588592A1 (de) 2005-10-26
EP1588592B1 (de) 2009-12-09
JP2006515708A (ja) 2006-06-01
CA2513327A1 (en) 2004-08-12
ES2336329T3 (es) 2010-04-12
BRPI0407155A (pt) 2006-02-07
KR101072792B1 (ko) 2011-10-14

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