EA200501210A1 - Электродный узел для генерации плазмы - Google Patents

Электродный узел для генерации плазмы

Info

Publication number
EA200501210A1
EA200501210A1 EA200501210A EA200501210A EA200501210A1 EA 200501210 A1 EA200501210 A1 EA 200501210A1 EA 200501210 A EA200501210 A EA 200501210A EA 200501210 A EA200501210 A EA 200501210A EA 200501210 A1 EA200501210 A1 EA 200501210A1
Authority
EA
Eurasian Patent Office
Prior art keywords
electrodes
electrode assembly
plasma generation
housing
wall
Prior art date
Application number
EA200501210A
Other languages
English (en)
Other versions
EA010388B1 (ru
Inventor
Фрэнк Суоллоу
Питер Доббин
Original Assignee
Дау Корнинг Айэлэнд Лимитед
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0302265A external-priority patent/GB0302265D0/en
Priority claimed from GB0304094A external-priority patent/GB0304094D0/en
Application filed by Дау Корнинг Айэлэнд Лимитед filed Critical Дау Корнинг Айэлэнд Лимитед
Publication of EA200501210A1 publication Critical patent/EA200501210A1/ru
Publication of EA010388B1 publication Critical patent/EA010388B1/ru

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes

Abstract

Установка (1) для генерации плазменного тлеющего разряда и/или диэлектрического барьерного разряда, содержащая по меньшей мере одну пару, по существу, удаленных на равное расстояние друг от друга электродов (2), причем расстояние между электродами приспособлено для формирования плазменной зоны (8) при введении технологического газа и обеспечении прохождения, при необходимости, газообразного, жидкого и/или твердого прекурсора (прекурсоров), отличающаяся тем, что по меньшей мере один из электродов (2) содержит корпус (20), имеющий внутреннюю (5) и внешнюю (6) стенку, причем внутренняя стенка (5) выполнена из непористого диэлектрического материала, а корпус (20), по существу, вмещает, по меньшей мере, по существу неметаллический электропроводящий материал.Международная заявка была опубликована вместе с отчетом о международном поиске.
EA200501210A 2003-01-31 2004-01-28 Электродный узел для генерации плазмы EA010388B1 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0302265A GB0302265D0 (en) 2003-01-31 2003-01-31 Plasma generating electrode assembly
GB0304094A GB0304094D0 (en) 2003-02-24 2003-02-24 Plasma generating electrode assembly
PCT/EP2004/001756 WO2004068916A1 (en) 2003-01-31 2004-01-28 Plasma generating electrode assembly

Publications (2)

Publication Number Publication Date
EA200501210A1 true EA200501210A1 (ru) 2005-12-29
EA010388B1 EA010388B1 (ru) 2008-08-29

Family

ID=32827039

Family Applications (1)

Application Number Title Priority Date Filing Date
EA200501210A EA010388B1 (ru) 2003-01-31 2004-01-28 Электродный узел для генерации плазмы

Country Status (13)

Country Link
US (2) US20060196424A1 (ru)
EP (1) EP1588592B1 (ru)
JP (1) JP2006515708A (ru)
KR (1) KR101072792B1 (ru)
AT (1) ATE451823T1 (ru)
BR (1) BRPI0407155A (ru)
CA (1) CA2513327A1 (ru)
DE (1) DE602004024500D1 (ru)
EA (1) EA010388B1 (ru)
ES (1) ES2336329T3 (ru)
MX (1) MXPA05008024A (ru)
TW (1) TW200423824A (ru)
WO (1) WO2004068916A1 (ru)

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JP3641608B2 (ja) * 2001-11-22 2005-04-27 東芝三菱電機産業システム株式会社 オゾン発生器
GB0208261D0 (en) 2002-04-10 2002-05-22 Dow Corning An atmospheric pressure plasma assembly

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US20060196424A1 (en) 2006-09-07
EP1588592A1 (en) 2005-10-26
CA2513327A1 (en) 2004-08-12
MXPA05008024A (es) 2006-01-27
TW200423824A (en) 2004-11-01
EP1588592B1 (en) 2009-12-09
WO2004068916A1 (en) 2004-08-12
KR20050103201A (ko) 2005-10-27
KR101072792B1 (ko) 2011-10-14
EA010388B1 (ru) 2008-08-29
ATE451823T1 (de) 2009-12-15
US20110006039A1 (en) 2011-01-13
ES2336329T3 (es) 2010-04-12
DE602004024500D1 (de) 2010-01-21
US7892611B2 (en) 2011-02-22
BRPI0407155A (pt) 2006-02-07
JP2006515708A (ja) 2006-06-01

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