DE602004024500D1 - Plasmaerzeugungselektrodenbaugruppe - Google Patents

Plasmaerzeugungselektrodenbaugruppe

Info

Publication number
DE602004024500D1
DE602004024500D1 DE602004024500T DE602004024500T DE602004024500D1 DE 602004024500 D1 DE602004024500 D1 DE 602004024500D1 DE 602004024500 T DE602004024500 T DE 602004024500T DE 602004024500 T DE602004024500 T DE 602004024500T DE 602004024500 D1 DE602004024500 D1 DE 602004024500D1
Authority
DE
Germany
Prior art keywords
electrodes
electrode assembly
plasma generation
generation electrode
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004024500T
Other languages
English (en)
Inventor
Frank Swallow
Peter Dobbyn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Corning Ireland Ltd
Original Assignee
Dow Corning Ireland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0302265A external-priority patent/GB0302265D0/en
Priority claimed from GB0304094A external-priority patent/GB0304094D0/en
Application filed by Dow Corning Ireland Ltd filed Critical Dow Corning Ireland Ltd
Publication of DE602004024500D1 publication Critical patent/DE602004024500D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Secondary Cells (AREA)
  • Ceramic Capacitors (AREA)
  • Chemical Vapour Deposition (AREA)
DE602004024500T 2003-01-31 2004-01-28 Plasmaerzeugungselektrodenbaugruppe Expired - Lifetime DE602004024500D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0302265A GB0302265D0 (en) 2003-01-31 2003-01-31 Plasma generating electrode assembly
GB0304094A GB0304094D0 (en) 2003-02-24 2003-02-24 Plasma generating electrode assembly
PCT/EP2004/001756 WO2004068916A1 (en) 2003-01-31 2004-01-28 Plasma generating electrode assembly

Publications (1)

Publication Number Publication Date
DE602004024500D1 true DE602004024500D1 (de) 2010-01-21

Family

ID=32827039

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004024500T Expired - Lifetime DE602004024500D1 (de) 2003-01-31 2004-01-28 Plasmaerzeugungselektrodenbaugruppe

Country Status (13)

Country Link
US (2) US20060196424A1 (de)
EP (1) EP1588592B1 (de)
JP (1) JP2006515708A (de)
KR (1) KR101072792B1 (de)
AT (1) ATE451823T1 (de)
BR (1) BRPI0407155A (de)
CA (1) CA2513327A1 (de)
DE (1) DE602004024500D1 (de)
EA (1) EA010388B1 (de)
ES (1) ES2336329T3 (de)
MX (1) MXPA05008024A (de)
TW (1) TW200423824A (de)
WO (1) WO2004068916A1 (de)

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Also Published As

Publication number Publication date
TW200423824A (en) 2004-11-01
CA2513327A1 (en) 2004-08-12
EA200501210A1 (ru) 2005-12-29
KR20050103201A (ko) 2005-10-27
US7892611B2 (en) 2011-02-22
ATE451823T1 (de) 2009-12-15
BRPI0407155A (pt) 2006-02-07
EA010388B1 (ru) 2008-08-29
EP1588592B1 (de) 2009-12-09
MXPA05008024A (es) 2006-01-27
US20060196424A1 (en) 2006-09-07
JP2006515708A (ja) 2006-06-01
KR101072792B1 (ko) 2011-10-14
EP1588592A1 (de) 2005-10-26
ES2336329T3 (es) 2010-04-12
WO2004068916A1 (en) 2004-08-12
US20110006039A1 (en) 2011-01-13

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