MXPA05008024A - Unidad de electrodos para generacion de plasma. - Google Patents

Unidad de electrodos para generacion de plasma.

Info

Publication number
MXPA05008024A
MXPA05008024A MXPA05008024A MXPA05008024A MXPA05008024A MX PA05008024 A MXPA05008024 A MX PA05008024A MX PA05008024 A MXPA05008024 A MX PA05008024A MX PA05008024 A MXPA05008024 A MX PA05008024A MX PA05008024 A MXPA05008024 A MX PA05008024A
Authority
MX
Mexico
Prior art keywords
electrodes
electrode assembly
plasma generating
generating electrode
housing
Prior art date
Application number
MXPA05008024A
Other languages
English (en)
Inventor
Peter Dobbyn
Original Assignee
Dow Corning Ireland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0302265A external-priority patent/GB0302265D0/en
Priority claimed from GB0304094A external-priority patent/GB0304094D0/en
Application filed by Dow Corning Ireland Ltd filed Critical Dow Corning Ireland Ltd
Publication of MXPA05008024A publication Critical patent/MXPA05008024A/es

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Secondary Cells (AREA)
  • Ceramic Capacitors (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Una unidad para generacion de descargas luminiscentes plasmaticas y/o descargas de barrera dielectrica (1) que comprende al menos un par de electrodos separados sustancialmente equidistantes (2), la separacion entre los electrodos se adapta para formar una zona de plasma (8) en el momento de la introduccion de un gas de proceso y permitir el paso, cuando se requiera, de precursores liquidos y/o solidos, gaseosos caracterizado porque al menos uno de los electrodos (2) comprende un alojamiento (20) que tiene una pared interna (5) y externa (6), en donde la pared interna (5) se forma de material del dielectrico no poroso, y el alojamiento (20) retiene sustancialmente al menos un material conductor electricamente que practicamente no es metalico.
MXPA05008024A 2003-01-31 2004-01-28 Unidad de electrodos para generacion de plasma. MXPA05008024A (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0302265A GB0302265D0 (en) 2003-01-31 2003-01-31 Plasma generating electrode assembly
GB0304094A GB0304094D0 (en) 2003-02-24 2003-02-24 Plasma generating electrode assembly
PCT/EP2004/001756 WO2004068916A1 (en) 2003-01-31 2004-01-28 Plasma generating electrode assembly

Publications (1)

Publication Number Publication Date
MXPA05008024A true MXPA05008024A (es) 2006-01-27

Family

ID=32827039

Family Applications (1)

Application Number Title Priority Date Filing Date
MXPA05008024A MXPA05008024A (es) 2003-01-31 2004-01-28 Unidad de electrodos para generacion de plasma.

Country Status (13)

Country Link
US (2) US20060196424A1 (es)
EP (1) EP1588592B1 (es)
JP (1) JP2006515708A (es)
KR (1) KR101072792B1 (es)
AT (1) ATE451823T1 (es)
BR (1) BRPI0407155A (es)
CA (1) CA2513327A1 (es)
DE (1) DE602004024500D1 (es)
EA (1) EA010388B1 (es)
ES (1) ES2336329T3 (es)
MX (1) MXPA05008024A (es)
TW (1) TW200423824A (es)
WO (1) WO2004068916A1 (es)

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GB0208261D0 (en) 2002-04-10 2002-05-22 Dow Corning An atmospheric pressure plasma assembly

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US20110006039A1 (en) 2011-01-13
DE602004024500D1 (de) 2010-01-21
EA010388B1 (ru) 2008-08-29
KR20050103201A (ko) 2005-10-27
US20060196424A1 (en) 2006-09-07
CA2513327A1 (en) 2004-08-12
EA200501210A1 (ru) 2005-12-29
WO2004068916A1 (en) 2004-08-12
ATE451823T1 (de) 2009-12-15
JP2006515708A (ja) 2006-06-01
TW200423824A (en) 2004-11-01
EP1588592B1 (en) 2009-12-09
EP1588592A1 (en) 2005-10-26
KR101072792B1 (ko) 2011-10-14

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