US20060196424A1 - Plasma generating electrode assembly - Google Patents

Plasma generating electrode assembly Download PDF

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Publication number
US20060196424A1
US20060196424A1 US10/543,715 US54371505A US2006196424A1 US 20060196424 A1 US20060196424 A1 US 20060196424A1 US 54371505 A US54371505 A US 54371505A US 2006196424 A1 US2006196424 A1 US 2006196424A1
Authority
US
United States
Prior art keywords
plasma
electrodes
assembly
electrode
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/543,715
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English (en)
Inventor
Frank Swallow
Peter Dobbyn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Corning Ireland Ltd
Original Assignee
Dow Corning Ireland Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0302265A external-priority patent/GB0302265D0/en
Priority claimed from GB0304094A external-priority patent/GB0304094D0/en
Application filed by Dow Corning Ireland Ltd filed Critical Dow Corning Ireland Ltd
Assigned to DOW CORNING IRELAND LIMITED reassignment DOW CORNING IRELAND LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DOBBYN, PETER, SWALLOW, FRANK
Publication of US20060196424A1 publication Critical patent/US20060196424A1/en
Priority to US12/274,984 priority Critical patent/US7892611B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges

Definitions

  • the dielectric materials used in accordance with the present invention may be made from any suitable dielectric, examples include but are not restricted to polycarbonate, polyethylene, glass, glass laminates, epoxy filled glass laminates and the like.
  • the dielectric has sufficient strength in order to prevent any bowing or disfigurement of the dielectric by the conductive material in the electrode.
  • the dielectric used is machinable and is provided at a thickness of up to 50 mm in thickness, more preferably up to 40 mm thickness and most preferably 15 to 30 mm thickness. In instances where the selected dielectric is not sufficiently transparent, a glass or the like window may be utilized to enable diagnostic viewing of the generated plasma.
  • a major advantage of the present invention is conformity, by using a liquid/paste to ensure a constant and intimate contact/adherence thereof to the interfaces with the inner and outer walls of the electrode. Whilst contact/adherence may be obtained by the use of a flowable medium such as a liquid or paste, it may also be obtained by physical adhesion to both the surfaces of the inner and outer walls of the electrode by a conductive medium that can absorb mechanical and thermal stresses at those surfaces that would lead to de-lamination. As such, an adhesive elastomer with both thermal and electrically conductive properties could be used as the medium between the surfaces of the inner and outer walls of the electrode.
  • the path length of the plasma zone caused by the introduction the support ribs may be readily altered and optimised.
  • a single plasma assembly may be utilised with a means for varying the materials passing through the plasma zone formed between the electrodes.
  • the only substance passing through the plasma zone might be the process gas such as helium which is excited by the application of the potential between the electrodes to form a plasma zone.
  • the resulting helium plasma may be utilised to clean and/or activate the substrate which is passed through or relative to the plasma zone.
  • one or more coating forming precursor material(s) may be introduced and are excited by passing through the plasma zone and treating the substrate.
  • the substrate to be coated may comprise any material, sufficiently flexible to be transported through the assembly as hereinbefore described, for example plastics for example thermoplastics such as polyolefins e.g. polyethylene, and polypropylene, polycarbonates, polyurethanes, polyvinyl chloride, polyesters (for example polyalkylene terephthalates, particularly polyethylene terephthalate), polymethacrylates (for example polymethylmethacrylate and polymers of hydroxyethylmethacrylate), polyepoxides, polysulphones, polyphenylenes, polyetherketones, polyimides, polyamides, polystyrenes, polydimethylsiloxanes, phenolic, epoxy and melamine-formaldehyde resins, and blends and copolymers thereof.
  • plastics for example thermoplastics such as polyolefins e.g. polyethylene, and polypropylene, polycarbonates, polyurethanes, polyvinyl chloride, polyesters
  • Substrates which may be treated by an assembly in accordance with the present invention may be in the form of synthetic and/or natural fibres, woven or non-woven fibres, powder, siloxane, fabrics, woven or non-woven fibres, natural fibres, synthetic fibres cellulosic material and powder or a blend of an organic polymeric material and a organosilicon-containing additive which is miscible or substantially non-miscible with the organic polymeric material as described in the applicants co-pending patent application WO 01/40359.
  • the dimensions of the substrate are limited by the dimensions of the volume within which the atmospheric pressure plasma discharge is generated, i.e. the distance between the inner walls of the electrodes in accordance with the present invention. For typical plasma generating apparatus, the plasma is generated within a gap of from 3 to 50 mm, for example 5 to 25 mm.
  • the present invention has particular utility for coating films, fibres and powders.
  • FIG. 11 is a view of an assembly of the present invention for treating a substrate passing between pairs of electrodes.
  • FIG. 12 is a graph showing that the plasma produced is of a glow discharge type.
  • Electrode 2 is a composite electrode with a metallic plate 6 a , and conductive liquid 11 forming a composite electrode.
  • plate 6 a forms a constraining surface for the conductive liquid in chamber 11 and is designed so as to provide structural integrity to the electrode assembly 2 .
  • FIG. 5 a shows an electrode assembly where the electrically conductive liquid previously used is replaced by an electrically and thermally conductive paste 40 in chamber 11 which affects both a homogeneous electric field and the efficient transport of heat from the inner wall 5 to the cooled plate 6 a having cooling fins or the like 30 .
  • FIG. 5 b shows an electrode assembly using a one piece dielectric 67 , having a chamber 11 b , which has been engineered out of the body of the dielectric 67 .
  • the dielectric is adapted to receive plate 6 a having cooling fins 30 and encase the electrically conductive liquid.
  • the dielectric material is hollowed out, with or without support ribs 15 which when present are formed by leaving un-hollowed sections.
  • the need for the hollowed out chamber 11 b can be avoided by replacing the conductive liquid with a suitable cured or uncured layer of electrically conductive paste 62 which is position between inner wall 5 and plate 6 a .
  • the paste can remain uncured, but preferably is cured to improve adhesion to both plate 6 a and dielectric 61 .
  • plate 6 a is either cooled by air or chilled liquid.
  • the electrical potential is applied to metallic plate 6 a and dispersed evenly to the rear face of the inner wall 5 through the conductive liquid and paste respectively in chamber 11 .
  • the conductive liquid is encased within the internal and external regions of a double concentric pipe arrangement as seen in FIGS. 6 and 7 , wherein the gap between outer pipe 32 and the inner pipe 34 forms a plasma zone 36 which in use is generated between the pipes.
  • This embodiment may be utilised to treat materials such as, gases, liquid aerosols, powders, fibres, flake, foams etc. that can be transported through such concentric pipe arrangements for plasma treatment.
  • the pipe may for example be utilized in a substantially vertical position as seen in FIG. 7 .
  • a cooling liquid may be passed into, through and out of inner pipe 34 by way of inlet 3 a and outlet 4 a and an outer cooling coil 25 a may be utilized to at least substantially surround outer pipe 32 to remove heat generated by effecting the plasma.
  • plasma zone 160 generates a coating for the substrate by means of the introduction of a reactive precursor.
  • the reactive precursor may comprise gaseous, liquid and/or solid coating making material, but are preferably liquid and solid coating making materials introduced in a liquid or solid form through nebuliser 174 .
  • An important aspect of the fact that the reactive agent being coated is a liquid or solid is that said atomised liquid or solid travels under gravity through plasma zone 160 and is kept separate from plasma zone 125 and as such no coating occurs in plasma zone 125 .
  • the substrate to be coated then passes through plasma zone 160 and is coated and transported over roller 172 and is subsequently collected or further treated with, for example, additional plasma treatments.
  • Dielectric barrier discharges exist as either filamentary or glow discharges. Filamentary discharges occur when local non-uniformities in either electric field potential or charge densities cause the ionisation of the gas to become localized and lead to a highly concentrated current discharge over a very short time span (in the region of approximately 2-5 nanoseconds duration). These types of discharges can produce non-uniform coatings or damage the substrates due to the locally intense nature of the filamentary discharges.
  • the choice of electrodes in accordance with the present invention in combination with suitable electrode geometries, gas compositions and power/frequency conditions ensure that atmospheric pressure dielectric barrier discharges can occur in glow discharge modes where the plasma is formed uniformly across the width of the electrodes. This leads to a current discharge which is much longer than the filamentary discharge with a duration of 2-10 microseconds which results in the formation of significantly more uniform coatings.
US10/543,715 2003-01-31 2004-01-28 Plasma generating electrode assembly Abandoned US20060196424A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/274,984 US7892611B2 (en) 2003-01-31 2008-11-20 Plasma generating electrode assembly

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GBGB0302265.4 2003-01-31
GB0302265A GB0302265D0 (en) 2003-01-31 2003-01-31 Plasma generating electrode assembly
GBGB0304094.6 2003-02-24
GB0304094A GB0304094D0 (en) 2003-02-24 2003-02-24 Plasma generating electrode assembly
PCT/EP2004/001756 WO2004068916A1 (en) 2003-01-31 2004-01-28 Plasma generating electrode assembly

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/274,984 Division US7892611B2 (en) 2003-01-31 2008-11-20 Plasma generating electrode assembly

Publications (1)

Publication Number Publication Date
US20060196424A1 true US20060196424A1 (en) 2006-09-07

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Family Applications (2)

Application Number Title Priority Date Filing Date
US10/543,715 Abandoned US20060196424A1 (en) 2003-01-31 2004-01-28 Plasma generating electrode assembly
US12/274,984 Expired - Fee Related US7892611B2 (en) 2003-01-31 2008-11-20 Plasma generating electrode assembly

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Country Status (13)

Country Link
US (2) US20060196424A1 (ru)
EP (1) EP1588592B1 (ru)
JP (1) JP2006515708A (ru)
KR (1) KR101072792B1 (ru)
AT (1) ATE451823T1 (ru)
BR (1) BRPI0407155A (ru)
CA (1) CA2513327A1 (ru)
DE (1) DE602004024500D1 (ru)
EA (1) EA010388B1 (ru)
ES (1) ES2336329T3 (ru)
MX (1) MXPA05008024A (ru)
TW (1) TW200423824A (ru)
WO (1) WO2004068916A1 (ru)

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US7892611B2 (en) 2011-02-22
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ATE451823T1 (de) 2009-12-15
US20110006039A1 (en) 2011-01-13
MXPA05008024A (es) 2006-01-27
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EP1588592A1 (en) 2005-10-26
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BRPI0407155A (pt) 2006-02-07
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