BR112015007957A2 - aparelho e método para aplicar revestimentos de superfície - Google Patents

aparelho e método para aplicar revestimentos de superfície

Info

Publication number
BR112015007957A2
BR112015007957A2 BR112015007957A BR112015007957A BR112015007957A2 BR 112015007957 A2 BR112015007957 A2 BR 112015007957A2 BR 112015007957 A BR112015007957 A BR 112015007957A BR 112015007957 A BR112015007957 A BR 112015007957A BR 112015007957 A2 BR112015007957 A2 BR 112015007957A2
Authority
BR
Brazil
Prior art keywords
electrode layers
sheet
plasma chamber
coating
applying
Prior art date
Application number
BR112015007957A
Other languages
English (en)
Inventor
Rogge Eva
Legein Filip
Original Assignee
Europlasma Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB201218054A external-priority patent/GB201218054D0/en
Priority claimed from GBGB1316113.8A external-priority patent/GB201316113D0/en
Application filed by Europlasma Nv filed Critical Europlasma Nv
Publication of BR112015007957A2 publication Critical patent/BR112015007957A2/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/52—Polymerisation initiated by wave energy or particle radiation by electric discharge, e.g. voltolisation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32403—Treating multiple sides of workpieces, e.g. 3D workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0471—Surface coating material
    • B01D2239/0478—Surface coating material on a layer of the filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

apparatus and method for applying surface coatings abstract: the present invention provides a method for applying a surface coating on, for example, a sheet of fabric and further provides a plasma chamber (10) for coating a sheet of fabric, e.g. a textile material, with a polymer layer, the plasma chamber (10) comprising a plurality of electrode layers (rf, m) arranged successively within the plasma chamber, wherein at least two adjacent electrode layers are radiofrequency electrode layers (rf) or ground electrode layers (m), thereby providing a surface coating on both sides of a fabric sheet. ] tradução do resumo resumo patente de invenção: "aparelho e método para aplicar revestimentos de superfície". a presente invenção se refere a um método para aplicar um revestimento de superfície, por exemplo, sobre uma folha de pano, e fornece adicionalmente uma câmara de plasma (10) para revestir uma folha de pano, por exemplo, um material têxtil, com uma camada de polímero, sendo que a camada de plasma (10) compreende uma pluralidade de camadas de eletrodos (rf, m) dispostas sucessivamente no interior da câmara de plasma, em que pelo menos duas camadas de eletrodos adjacentes são camadas de eletrodos de radiofrequência (rf) ou camadas de eletrodos de aterramento (m), fornecendo, desse modo, um revestimento de superfície sobre ambos os lados de uma folha de pano. 1/1
BR112015007957A 2012-10-09 2013-10-09 aparelho e método para aplicar revestimentos de superfície BR112015007957A2 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB201218054A GB201218054D0 (en) 2012-10-09 2012-10-09 Apparatus and method of using same
GBGB1316113.8A GB201316113D0 (en) 2013-09-10 2013-09-10 Apparatus and method for applying surface coatings
PCT/EP2013/071020 WO2014056968A1 (en) 2012-10-09 2013-10-09 Apparatus and method for applying surface coatings

Publications (1)

Publication Number Publication Date
BR112015007957A2 true BR112015007957A2 (pt) 2017-07-04

Family

ID=49354645

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112015007957A BR112015007957A2 (pt) 2012-10-09 2013-10-09 aparelho e método para aplicar revestimentos de superfície

Country Status (12)

Country Link
US (1) US10366868B2 (pt)
EP (1) EP2906739B1 (pt)
JP (2) JP2016502588A (pt)
KR (1) KR102184276B1 (pt)
CN (1) CN104822859B (pt)
AU (1) AU2013328747A1 (pt)
BR (1) BR112015007957A2 (pt)
CA (1) CA2887871A1 (pt)
DK (1) DK2906739T3 (pt)
IL (1) IL238193A0 (pt)
RU (1) RU2015117763A (pt)
WO (1) WO2014056968A1 (pt)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201316113D0 (en) * 2013-09-10 2013-10-23 Europlasma Nv Apparatus and method for applying surface coatings
EP3101170B1 (en) 2015-06-03 2018-08-22 Europlasma NV Surface coatings
CN107177835B (zh) * 2017-05-21 2018-06-19 江苏菲沃泰纳米科技有限公司 一种循环大占空比脉冲放电制备多功能性纳米防护涂层的方法
WO2020168382A1 (en) * 2019-02-19 2020-08-27 Xefco Pty Ltd System for treatment and/or coating of substrates
CN114502252A (zh) * 2019-10-24 2022-05-13 纱帝股份公司 一种用于制备复合过滤介质的方法和用该方法获得的复合过滤介质
CN116783346A (zh) 2021-02-12 2023-09-19 旭硝子欧洲玻璃公司 借助于等离子体在织物基材上涂覆的方法
RU2763379C1 (ru) * 2021-06-18 2021-12-28 Федеральное государственное бюджетное образовательное учреждение высшего образования «Казанский национальный исследовательский технологический университет» (ФГБОУ ВО «КНИТУ») Способ получения электропроводящего металлизированного текстильного материала

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039088B2 (ja) * 1977-12-08 1985-09-04 東レ株式会社 高分子樹脂の放電処理方法
US4331526A (en) * 1979-09-24 1982-05-25 Coulter Systems Corporation Continuous sputtering apparatus and method
US4282077A (en) * 1980-07-03 1981-08-04 General Dynamics, Pomona Division Uniform plasma etching system
US4389970A (en) * 1981-03-16 1983-06-28 Energy Conversion Devices, Inc. Apparatus for regulating substrate temperature in a continuous plasma deposition process
US4829189A (en) * 1986-07-18 1989-05-09 Sando Iron Works Co., Ltd. Apparatus for low-temperature plasma treatment of sheet material
US4968918A (en) 1987-07-06 1990-11-06 Kanebo, Ltd. Apparatus for plasma treatment
JPH0630877Y2 (ja) * 1988-08-19 1994-08-17 鐘紡株式会社 プラズマ処理装置
JPH0369657A (ja) * 1989-08-08 1991-03-26 Naigai Tokushu Senko Kk 長尺シート状物の搬送装置及びその搬送装置に用いる長尺シート状物の張力調整装置、並びに前記搬送装置を備えた長尺シート状物の処理装置
DE4117332C2 (de) * 1991-05-31 1995-11-23 Ivanovskij Ni Skij Eksperiment Verfahren zur Behandlung von laufendem Substrat mit Hilfe eines elektrischen Entladungsplasmas und Vorrichtung zu dessen Durchführung
JP3571785B2 (ja) * 1993-12-28 2004-09-29 キヤノン株式会社 堆積膜形成方法及び堆積膜形成装置
JPH09176855A (ja) * 1995-12-22 1997-07-08 Fuji Electric Corp Res & Dev Ltd 薄膜形成装置
US6638359B2 (en) * 2000-01-31 2003-10-28 Canon Kabushiki Kaisha Deposited film forming apparatus and deposited film forming method
US20030116281A1 (en) * 2000-02-11 2003-06-26 Anthony Herbert Atmospheric pressure plasma system
US20060118242A1 (en) * 2001-02-12 2006-06-08 Anthony Herbert Atmospheric pressure plasma system
JP2002322558A (ja) * 2001-04-25 2002-11-08 Konica Corp 薄膜形成方法、光学フィルム、偏光板及び画像表示装置
GB0208261D0 (en) * 2002-04-10 2002-05-22 Dow Corning An atmospheric pressure plasma assembly
CA2435639A1 (en) 2003-07-21 2005-01-21 Robert C. Rajewski Timing apparatus
WO2005021833A2 (en) * 2003-08-28 2005-03-10 Surface Innovations Limited Apparatus for the coating and/or conditioning of substrates
WO2007112370A1 (en) * 2006-03-26 2007-10-04 Lotus Applied Technology, Llc Atomic layer deposition system and method for coating flexible substrates
JP5455405B2 (ja) * 2008-03-31 2014-03-26 日本碍子株式会社 シリコン系薄膜量産方法
JP5241383B2 (ja) * 2008-08-27 2013-07-17 株式会社神戸製鋼所 連続成膜装置
JP5240782B2 (ja) * 2009-05-18 2013-07-17 株式会社神戸製鋼所 連続成膜装置
BE1019159A5 (nl) * 2010-01-22 2012-04-03 Europlasma Nv Werkwijze voor de afzetting van een gelijkmatige nanocoating door middel van een lage druk plasma proces.
JP5648402B2 (ja) * 2010-09-30 2015-01-07 住友金属鉱山株式会社 スパッタリング装置、スパッタリング方法及び金属ベース層付樹脂フィルムの製造方法
GB2489761B (en) 2011-09-07 2015-03-04 Europlasma Nv Surface coatings

Also Published As

Publication number Publication date
CA2887871A1 (en) 2014-04-17
CN104822859A (zh) 2015-08-05
JP2016502588A (ja) 2016-01-28
EP2906739A1 (en) 2015-08-19
AU2013328747A1 (en) 2015-05-28
JP2019035153A (ja) 2019-03-07
EP2906739B1 (en) 2016-11-30
KR102184276B1 (ko) 2020-12-01
KR20150065890A (ko) 2015-06-15
US10366868B2 (en) 2019-07-30
US20150255252A1 (en) 2015-09-10
CN104822859B (zh) 2019-03-12
WO2014056968A1 (en) 2014-04-17
IL238193A0 (en) 2015-05-31
JP6998852B2 (ja) 2022-01-18
DK2906739T3 (en) 2017-03-13
RU2015117763A (ru) 2016-12-10

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Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]
B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]