DE68915619D1 - Herstellungsverfahren von Halbleiteranordnungen, die mindestens eine reaktive ionische Ätzstufe enthalten. - Google Patents
Herstellungsverfahren von Halbleiteranordnungen, die mindestens eine reaktive ionische Ätzstufe enthalten.Info
- Publication number
- DE68915619D1 DE68915619D1 DE68915619T DE68915619T DE68915619D1 DE 68915619 D1 DE68915619 D1 DE 68915619D1 DE 68915619 T DE68915619 T DE 68915619T DE 68915619 T DE68915619 T DE 68915619T DE 68915619 D1 DE68915619 D1 DE 68915619D1
- Authority
- DE
- Germany
- Prior art keywords
- contain
- manufacturing
- semiconductor devices
- etching stage
- reactive ionic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005530 etching Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30612—Etching of AIIIBV compounds
- H01L21/30621—Vapour phase etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3081—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their composition, e.g. multilayer masks, materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3086—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/131—Reactive ion etching rie
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/945—Special, e.g. metal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
- Y10S438/951—Lift-off
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8808504A FR2633451B1 (fr) | 1988-06-24 | 1988-06-24 | Procede de realisation de dispositifs semiconducteurs incluant au moins une etape de gravure ionique reactive |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68915619D1 true DE68915619D1 (de) | 1994-07-07 |
DE68915619T2 DE68915619T2 (de) | 1994-12-22 |
Family
ID=9367677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68915619T Expired - Fee Related DE68915619T2 (de) | 1988-06-24 | 1989-06-19 | Herstellungsverfahren von Halbleiteranordnungen, die mindestens eine reaktive ionische Ätzstufe enthalten. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4925813A (de) |
EP (1) | EP0347992B1 (de) |
JP (1) | JPH0680645B2 (de) |
KR (1) | KR0139541B1 (de) |
DE (1) | DE68915619T2 (de) |
FR (1) | FR2633451B1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5053105A (en) * | 1990-07-19 | 1991-10-01 | Micron Technology, Inc. | Process for creating an etch mask suitable for deep plasma etches employing self-aligned silicidation of a metal layer masked with a silicon dioxide template |
US5068007A (en) * | 1990-09-24 | 1991-11-26 | Motorola, Inc. | Etching of materials in a noncorrosive environment |
EP0503473A3 (en) * | 1991-03-12 | 1992-10-28 | Texas Instruments Incorporated | Method of dry etching ina1as and ingaas lattice matched to inp |
DE4317722C2 (de) * | 1993-05-27 | 1996-12-05 | Siemens Ag | Verfahren zum anisotropen Ätzen einer aluminiumhaltigen Schicht und Verwendung einer hierzu geeigneten Ätzgasmischung |
US5946594A (en) * | 1996-01-02 | 1999-08-31 | Micron Technology, Inc. | Chemical vapor deposition of titanium from titanium tetrachloride and hydrocarbon reactants |
JPH09326298A (ja) * | 1996-04-01 | 1997-12-16 | Denso Corp | ドライエッチング方法及びel素子の製造方法 |
KR100374228B1 (ko) * | 2001-03-28 | 2003-03-03 | 주식회사 하이닉스반도체 | 금속배선 형성 방법 |
JP4030982B2 (ja) * | 2004-05-10 | 2008-01-09 | ユーディナデバイス株式会社 | 半導体装置および半導体装置の製造方法 |
KR100759808B1 (ko) * | 2005-12-08 | 2007-09-20 | 한국전자통신연구원 | Iii-v 족 반도체 다층구조의 식각 방법 및 이를이용한 수직공진형 표면방출 레이저 제조 방법 |
US20070161529A1 (en) * | 2005-12-22 | 2007-07-12 | Tosoh Corporation | Cleaning composition for semiconductor device-manufacturing apparatus and cleaning method |
JP2008098456A (ja) * | 2006-10-13 | 2008-04-24 | Eudyna Devices Inc | 半導体装置の製造方法 |
CN102110592A (zh) * | 2010-12-02 | 2011-06-29 | 南京大学扬州光电研究院 | 用于干法刻蚀的蓝宝石衬底表面加工前期生产方法 |
DE102013100035B4 (de) | 2012-05-24 | 2019-10-24 | Universität Kassel | Ätzverfahren für III-V Halbleitermaterialien |
US11756793B2 (en) * | 2019-12-27 | 2023-09-12 | Hitachi High-Tech Corporation | Semiconductor device manufacturing method |
CN113053744B (zh) * | 2019-12-27 | 2024-03-22 | 株式会社日立高新技术 | 半导体装置的制造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5914893B2 (ja) * | 1975-09-08 | 1984-04-06 | ソニー株式会社 | ガリウム砒素系化合物半導体用エツチング液 |
US4467521A (en) * | 1983-08-15 | 1984-08-28 | Sperry Corporation | Selective epitaxial growth of gallium arsenide with selective orientation |
JPS64785A (en) * | 1986-07-29 | 1989-01-05 | Ricoh Co Ltd | Manufacture of mask semiconductor laser |
FR2613381B1 (fr) * | 1987-04-01 | 1989-06-23 | Cit Alcatel | Procede d'attaque d'une surface d'une piece en phosphure d'indium |
US4771017A (en) * | 1987-06-23 | 1988-09-13 | Spire Corporation | Patterning process |
-
1988
- 1988-06-24 FR FR8808504A patent/FR2633451B1/fr not_active Expired - Lifetime
-
1989
- 1989-06-13 US US07/366,107 patent/US4925813A/en not_active Expired - Fee Related
- 1989-06-19 EP EP89201585A patent/EP0347992B1/de not_active Expired - Lifetime
- 1989-06-19 DE DE68915619T patent/DE68915619T2/de not_active Expired - Fee Related
- 1989-06-21 KR KR1019890008532A patent/KR0139541B1/ko not_active IP Right Cessation
- 1989-06-23 JP JP1159805A patent/JPH0680645B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0244721A (ja) | 1990-02-14 |
FR2633451B1 (fr) | 1990-10-05 |
JPH0680645B2 (ja) | 1994-10-12 |
KR0139541B1 (ko) | 1998-07-15 |
KR910001871A (ko) | 1991-01-31 |
DE68915619T2 (de) | 1994-12-22 |
US4925813A (en) | 1990-05-15 |
EP0347992B1 (de) | 1994-06-01 |
FR2633451A1 (fr) | 1989-12-29 |
EP0347992A1 (de) | 1989-12-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |