DE60139463D1 - Prozess zur herstellung von dünnfilmtransistoren - Google Patents
Prozess zur herstellung von dünnfilmtransistorenInfo
- Publication number
- DE60139463D1 DE60139463D1 DE60139463T DE60139463T DE60139463D1 DE 60139463 D1 DE60139463 D1 DE 60139463D1 DE 60139463 T DE60139463 T DE 60139463T DE 60139463 T DE60139463 T DE 60139463T DE 60139463 D1 DE60139463 D1 DE 60139463D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- manufacture
- thin film
- film transistors
- transistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000004642 Polyimide Substances 0.000 abstract 1
- 229920000265 Polyparaphenylene Polymers 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229920001721 polyimide Polymers 0.000 abstract 1
- -1 polyphenylene Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78603—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the insulating substrate or support
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Bipolar Transistors (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US19773100P | 2000-04-18 | 2000-04-18 | |
| PCT/US2001/012429 WO2001080287A2 (en) | 2000-04-18 | 2001-04-17 | Process for fabricating thin film transistors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE60139463D1 true DE60139463D1 (de) | 2009-09-17 |
Family
ID=22730530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60139463T Expired - Lifetime DE60139463D1 (de) | 2000-04-18 | 2001-04-17 | Prozess zur herstellung von dünnfilmtransistoren |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US6825068B2 (de) |
| EP (1) | EP1275156B1 (de) |
| JP (1) | JP2003531487A (de) |
| KR (1) | KR100767233B1 (de) |
| CN (1) | CN1237623C (de) |
| AT (1) | ATE438927T1 (de) |
| AU (1) | AU2001253575A1 (de) |
| DE (1) | DE60139463D1 (de) |
| WO (1) | WO2001080287A2 (de) |
Families Citing this family (197)
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|---|---|---|---|---|
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| US7259744B2 (en) | 1995-07-20 | 2007-08-21 | E Ink Corporation | Dielectrophoretic displays |
| US7848006B2 (en) | 1995-07-20 | 2010-12-07 | E Ink Corporation | Electrophoretic displays with controlled amounts of pigment |
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| US7999787B2 (en) * | 1995-07-20 | 2011-08-16 | E Ink Corporation | Methods for driving electrophoretic displays using dielectrophoretic forces |
| US7583251B2 (en) | 1995-07-20 | 2009-09-01 | E Ink Corporation | Dielectrophoretic displays |
| US6866760B2 (en) * | 1998-08-27 | 2005-03-15 | E Ink Corporation | Electrophoretic medium and process for the production thereof |
| US7327511B2 (en) * | 2004-03-23 | 2008-02-05 | E Ink Corporation | Light modulators |
| US7193625B2 (en) | 1999-04-30 | 2007-03-20 | E Ink Corporation | Methods for driving electro-optic displays, and apparatus for use therein |
| US8040594B2 (en) | 1997-08-28 | 2011-10-18 | E Ink Corporation | Multi-color electrophoretic displays |
| DE69934618T2 (de) | 1998-07-08 | 2007-05-03 | E-Ink Corp., Cambridge | Verbesserte farbige mikroverkapselte elektrophoretische Anzeige |
| US7012600B2 (en) * | 1999-04-30 | 2006-03-14 | E Ink Corporation | Methods for driving bistable electro-optic displays, and apparatus for use therein |
| US7119772B2 (en) | 1999-04-30 | 2006-10-10 | E Ink Corporation | Methods for driving bistable electro-optic displays, and apparatus for use therein |
| US7119759B2 (en) * | 1999-05-03 | 2006-10-10 | E Ink Corporation | Machine-readable displays |
| US8009348B2 (en) | 1999-05-03 | 2011-08-30 | E Ink Corporation | Machine-readable displays |
| US8115729B2 (en) | 1999-05-03 | 2012-02-14 | E Ink Corporation | Electrophoretic display element with filler particles |
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| KR100586241B1 (ko) * | 2000-10-28 | 2006-06-02 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 어레이기판 및 제조방법 |
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-
2001
- 2001-04-17 JP JP2001577586A patent/JP2003531487A/ja not_active Ceased
- 2001-04-17 DE DE60139463T patent/DE60139463D1/de not_active Expired - Lifetime
- 2001-04-17 KR KR1020027013880A patent/KR100767233B1/ko active IP Right Grant
- 2001-04-17 CN CNB018081681A patent/CN1237623C/zh not_active Expired - Fee Related
- 2001-04-17 US US09/836,884 patent/US6825068B2/en not_active Expired - Lifetime
- 2001-04-17 WO PCT/US2001/012429 patent/WO2001080287A2/en active Application Filing
- 2001-04-17 EP EP01927094A patent/EP1275156B1/de not_active Expired - Lifetime
- 2001-04-17 AT AT01927094T patent/ATE438927T1/de not_active IP Right Cessation
- 2001-04-17 AU AU2001253575A patent/AU2001253575A1/en not_active Abandoned
-
2004
- 2004-08-17 US US10/919,657 patent/US7365394B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US6825068B2 (en) | 2004-11-30 |
| WO2001080287A3 (en) | 2002-05-23 |
| US20050067656A1 (en) | 2005-03-31 |
| EP1275156B1 (de) | 2009-08-05 |
| AU2001253575A1 (en) | 2001-10-30 |
| EP1275156A2 (de) | 2003-01-15 |
| KR20020089479A (ko) | 2002-11-29 |
| CN1441967A (zh) | 2003-09-10 |
| WO2001080287A2 (en) | 2001-10-25 |
| CN1237623C (zh) | 2006-01-18 |
| US7365394B2 (en) | 2008-04-29 |
| US20020019081A1 (en) | 2002-02-14 |
| JP2003531487A (ja) | 2003-10-21 |
| ATE438927T1 (de) | 2009-08-15 |
| KR100767233B1 (ko) | 2007-10-17 |
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