DE3702984C2 - - Google Patents
Info
- Publication number
- DE3702984C2 DE3702984C2 DE3702984A DE3702984A DE3702984C2 DE 3702984 C2 DE3702984 C2 DE 3702984C2 DE 3702984 A DE3702984 A DE 3702984A DE 3702984 A DE3702984 A DE 3702984A DE 3702984 C2 DE3702984 C2 DE 3702984C2
- Authority
- DE
- Germany
- Prior art keywords
- gas
- substrate
- arc discharge
- gas plasma
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 claims description 110
- 239000007789 gas Substances 0.000 claims description 92
- 239000000758 substrate Substances 0.000 claims description 46
- 238000006243 chemical reaction Methods 0.000 claims description 38
- 230000008569 process Effects 0.000 claims description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 36
- 239000000203 mixture Substances 0.000 claims description 33
- 238000010891 electric arc Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 25
- 229910052757 nitrogen Inorganic materials 0.000 claims description 24
- 238000004381 surface treatment Methods 0.000 claims description 20
- 239000010410 layer Substances 0.000 claims description 17
- 238000005240 physical vapour deposition Methods 0.000 claims description 15
- 238000009826 distribution Methods 0.000 claims description 14
- 229910052796 boron Inorganic materials 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 238000007733 ion plating Methods 0.000 claims description 6
- 238000000465 moulding Methods 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 3
- 238000001311 chemical methods and process Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000002344 surface layer Substances 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 239000011574 phosphorus Substances 0.000 claims 1
- 238000007770 physical coating process Methods 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000011593 sulfur Substances 0.000 claims 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 23
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 18
- 229910052739 hydrogen Inorganic materials 0.000 description 18
- 239000001257 hydrogen Substances 0.000 description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 14
- 238000012360 testing method Methods 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 10
- 229910052786 argon Inorganic materials 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 7
- 239000010959 steel Substances 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 230000035515 penetration Effects 0.000 description 6
- 238000005121 nitriding Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- 229910000997 High-speed steel Inorganic materials 0.000 description 2
- LCTONWCANYUPML-UHFFFAOYSA-N Pyruvic acid Chemical compound CC(=O)C(O)=O LCTONWCANYUPML-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000005256 carbonitriding Methods 0.000 description 2
- 238000005255 carburizing Methods 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 238000007542 hardness measurement Methods 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000002547 anomalous effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- -1 hydrogen compound Chemical class 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229940107700 pyruvic acid Drugs 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- SANRKQGLYCLAFE-UHFFFAOYSA-H uranium hexafluoride Chemical compound F[U](F)(F)(F)(F)F SANRKQGLYCLAFE-UHFFFAOYSA-H 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002347 wear-protection layer Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH2415/86A CH671407A5 (enExample) | 1986-06-13 | 1986-06-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3702984A1 DE3702984A1 (de) | 1987-12-17 |
| DE3702984C2 true DE3702984C2 (enExample) | 1993-02-25 |
Family
ID=4233265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19873702984 Granted DE3702984A1 (de) | 1986-06-13 | 1987-02-02 | Verfahren zur thermochemischen oberflaechenbehandlung von werkstoffen in einem reaktiven gasplasma |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4762756A (enExample) |
| JP (1) | JPS62294160A (enExample) |
| CH (1) | CH671407A5 (enExample) |
| DE (1) | DE3702984A1 (enExample) |
| FR (1) | FR2600082B1 (enExample) |
| GB (1) | GB2192196B (enExample) |
| NL (1) | NL194551C (enExample) |
| SE (1) | SE465578B (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19526387A1 (de) * | 1994-07-19 | 1996-02-29 | Sumitomo Metal Mining Co | Doppelt beschichteter Stahlverbundgegenstand und Verfahren zu dessen Herstellung |
| DE10048589A1 (de) * | 2000-09-30 | 2002-04-25 | Volkswagen Ag | Schaltvorrichtung für ein Kraftfahrzeuggetriebe |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3742317A1 (de) * | 1987-12-14 | 1989-06-22 | Repenning Detlev | Verfahren zur herstellung korrosion-, verschleiss- und pressfester schichten |
| FR2630133B1 (fr) * | 1988-04-18 | 1993-09-24 | Siderurgie Fse Inst Rech | Procede pour l'amelioration de la resistance a la corrosion de materiaux metalliques |
| US5079089A (en) * | 1988-07-28 | 1992-01-07 | Nippon Steel Corporation | Multi ceramic layer-coated metal plate and process for manufacturing same |
| US5192410A (en) * | 1988-07-28 | 1993-03-09 | Nippon Steel Corporation | Process for manufacturing multi ceramic layer-coated metal plate |
| US5304417A (en) * | 1989-06-02 | 1994-04-19 | Air Products And Chemicals, Inc. | Graphite/carbon articles for elevated temperature service and method of manufacture |
| DE3918562A1 (de) * | 1989-06-07 | 1990-12-13 | Repenning Detlev | Verfahren zur herstellung hochharter schichten auf refraktaeren metallwerkstoffen sowie ihren legierungen |
| WO1991005076A1 (fr) * | 1989-09-29 | 1991-04-18 | Sumitomo Electric Industries, Ltd. | Element dur revêtu en surface pour outils de coupe et pour outils resistant a l'abrasion |
| EP0518879A4 (en) * | 1990-03-09 | 1993-09-01 | Kennametal Inc. | Physical vapor deposition of titanium nitride on a nonconductive substrate |
| US5264297A (en) * | 1990-03-09 | 1993-11-23 | Kennametal Inc. | Physical vapor deposition of titanium nitride on a nonconductive substrate |
| US5707692A (en) * | 1990-10-23 | 1998-01-13 | Canon Kabushiki Kaisha | Apparatus and method for processing a base substance using plasma and a magnetic field |
| DE69227313T2 (de) * | 1991-04-29 | 1999-04-08 | Scientific-Industrial Enterprise Novatech, Moscow | Verfahren und vorrichtung zur behandlung von bauteilen in einem gasentladungsplasma |
| CH683776A5 (de) * | 1991-12-05 | 1994-05-13 | Alusuisse Lonza Services Ag | Beschichten einer Substratfläche mit einer Permeationssperre. |
| US5383980A (en) * | 1992-01-20 | 1995-01-24 | Leybold Durferrit Gmbh | Process for hardening workpieces in a pulsed plasma discharge |
| CA2121266C (en) * | 1992-08-14 | 1998-06-09 | Simon K. Nieh | Surface preparation and deposition method for titanium nitride onto carbonaceous |
| DE4416525B4 (de) * | 1993-05-27 | 2008-06-05 | Oerlikon Trading Ag, Trübbach | Verfahren zur Herstellung einer Beschichtung erhöhter Verschleißfestigkeit auf Werkstückoberflächen, und dessen Verwendung |
| JPH07142416A (ja) * | 1993-06-21 | 1995-06-02 | Applied Materials Inc | 改良された界面を有する層のプラズマ化学蒸着法 |
| JP2909361B2 (ja) * | 1993-09-21 | 1999-06-23 | 大阪府 | チタン金属の表面処理方法 |
| RU2048601C1 (ru) * | 1993-12-20 | 1995-11-20 | Рыжов Николай Михайлович | Способ диагностики процесса химико-термической обработки сталей и сплавов в тлеющем разряде и устройство для его осуществления |
| US5628829A (en) | 1994-06-03 | 1997-05-13 | Materials Research Corporation | Method and apparatus for low temperature deposition of CVD and PECVD films |
| US5975912A (en) | 1994-06-03 | 1999-11-02 | Materials Research Corporation | Low temperature plasma-enhanced formation of integrated circuits |
| US5665640A (en) | 1994-06-03 | 1997-09-09 | Sony Corporation | Method for producing titanium-containing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor |
| EP0694629A3 (de) | 1994-07-27 | 1998-09-23 | Balzers Sa | Korrosions- und verschleissfester Körper, Verfahren zu dessen Herstellung sowie Vakuumbehandlungsanlage |
| EP0703303A1 (de) * | 1994-07-27 | 1996-03-27 | Balzers Sa | Korrosions- und verschleissfester Körper sowie Verfahren zu dessen Herstellung |
| US5830540A (en) * | 1994-09-15 | 1998-11-03 | Eltron Research, Inc. | Method and apparatus for reactive plasma surfacing |
| DE4440521C1 (de) | 1994-11-12 | 1995-11-02 | Rowo Coating Ges Fuer Beschich | Vorrichtung zum Beschichten von Substraten mit einem Materialdampf im Unterdruck oder Vakuum |
| US5753045A (en) * | 1995-01-25 | 1998-05-19 | Balzers Aktiengesellschaft | Vacuum treatment system for homogeneous workpiece processing |
| DE59603312D1 (de) * | 1995-01-25 | 1999-11-18 | Balzers Ag Liechtenstein | Verfahren zur reaktiven Schichtabscheidung |
| US6821500B2 (en) | 1995-03-14 | 2004-11-23 | Bechtel Bwxt Idaho, Llc | Thermal synthesis apparatus and process |
| US7576296B2 (en) * | 1995-03-14 | 2009-08-18 | Battelle Energy Alliance, Llc | Thermal synthesis apparatus |
| US5749937A (en) | 1995-03-14 | 1998-05-12 | Lockheed Idaho Technologies Company | Fast quench reactor and method |
| WO1996031899A1 (en) * | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
| US5972790A (en) * | 1995-06-09 | 1999-10-26 | Tokyo Electron Limited | Method for forming salicides |
| US6452338B1 (en) | 1999-12-13 | 2002-09-17 | Semequip, Inc. | Electron beam ion source with integral low-temperature vaporizer |
| AU2906401A (en) * | 1999-12-21 | 2001-07-03 | Bechtel Bwxt Idaho, Llc | Hydrogen and elemental carbon production from natural gas and other hydrocarbons |
| US6605160B2 (en) | 2000-08-21 | 2003-08-12 | Robert Frank Hoskin | Repair of coatings and surfaces using reactive metals coating processes |
| RU2205893C2 (ru) * | 2001-04-23 | 2003-06-10 | ООО "Инженерно-физический центр" | Способ и устройство нанесения покрытий методом плазмохимического осаждения |
| US6936145B2 (en) * | 2002-02-28 | 2005-08-30 | Ionedge Corporation | Coating method and apparatus |
| BR0205419B1 (pt) * | 2002-12-20 | 2017-10-24 | Coppe/Ufrj Coordenacao Dos Programas De Pos Graduacao De Engenharia Da Univ Federal Do Rio De Janeir | Process of ionic nitretation by pulsed plasma for obtaining diffusion barrier for hydrogen for steel api 5l x-65 |
| US7216067B2 (en) * | 2002-12-31 | 2007-05-08 | Tokyo Electron Limited | Non-linear test load and method of calibrating a plasma system |
| CA2538897C (en) * | 2003-09-19 | 2011-08-09 | Akzo Nobel N.V. | Metallization of substrate(s) by a liquid/vapor deposition process |
| US20050281958A1 (en) * | 2004-06-22 | 2005-12-22 | Walton Scott G | Electron beam enhanced nitriding system (EBENS) |
| US7354561B2 (en) * | 2004-11-17 | 2008-04-08 | Battelle Energy Alliance, Llc | Chemical reactor and method for chemically converting a first material into a second material |
| US8591821B2 (en) * | 2009-04-23 | 2013-11-26 | Battelle Energy Alliance, Llc | Combustion flame-plasma hybrid reactor systems, and chemical reactant sources |
| BRPI1010577A2 (pt) * | 2009-05-15 | 2016-03-15 | Gillette Co | revestimento da lâmina de navalha. |
| US9761424B1 (en) | 2011-09-07 | 2017-09-12 | Nano-Product Engineering, LLC | Filtered cathodic arc method, apparatus and applications thereof |
| US10304665B2 (en) | 2011-09-07 | 2019-05-28 | Nano-Product Engineering, LLC | Reactors for plasma-assisted processes and associated methods |
| RU2611251C2 (ru) * | 2015-06-15 | 2017-02-21 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Уфимский государственный авиационный технический университет" | Способ азотирования в плазме повышенной плотности |
| JP7244387B2 (ja) * | 2019-07-31 | 2023-03-22 | Ｄｏｗａサーモテック株式会社 | 珪窒化バナジウム膜被覆部材の製造方法および珪窒化バナジウム膜被覆部材 |
| DE102024105074A1 (de) | 2024-02-22 | 2025-08-28 | Trivalent Oberflächentechnik Gmbh | Verfahren zur wenigstens teilweisen Beschichtung eines Substrats mit einer dreiwertigen Chromschicht |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1150655B (de) * | 1960-05-05 | 1963-06-27 | Siemens Ag | Verfahren zum Dotieren eines festen Halbleiterkristalls |
| US3639151A (en) * | 1969-03-13 | 1972-02-01 | United Aircraft Corp | Vapor randomization in vacuum deposition of coatings |
| RO74414A2 (ro) * | 1974-03-23 | 1981-09-24 | Institutul De Cercetari Si Proiectari Tehnologice Pentru Sectoare Calde,Ro | Procedeu de nitrurare ionica |
| JPS5118944A (ja) * | 1974-08-07 | 1976-02-14 | Suwa Seikosha Kk | Kisohokaho |
| GB1483966A (en) * | 1974-10-23 | 1977-08-24 | Sharp Kk | Vapourized-metal cluster ion source and ionized-cluster beam deposition |
| CS176690B1 (enExample) * | 1975-03-04 | 1977-06-30 | ||
| GB1422519A (en) * | 1975-03-21 | 1976-01-28 | Telic Corp | Sputtering method and apparatus |
| GB1582231A (en) * | 1976-08-13 | 1981-01-07 | Nat Res Dev | Application of a layer of carbonaceous material to a surface |
| SE407081B (sv) * | 1977-07-27 | 1979-03-12 | Hultquist Gunnar B | Sett att framstella ytskikt med forbettrade korrosionsegenskaper pa foremal av jernkromlegerigar |
| GB2030180B (en) * | 1978-01-26 | 1983-05-25 | Secr Defence | Vapour deposition of metal in plasma discharge |
| JPS5845177B2 (ja) * | 1979-03-09 | 1983-10-07 | 富士通株式会社 | 半導体表面絶縁膜の形成法 |
| GB2058146B (en) * | 1979-09-14 | 1983-08-10 | Atomic Energy Authority Uk | Ion implanting ferrous metals to improve corrosion resistance |
| JPS5665975A (en) * | 1979-11-02 | 1981-06-04 | Akihiro Saito | Surface treatment of metal |
| GB2070340B (en) * | 1980-02-07 | 1983-10-12 | Shinetsu Chemical Co | Method for surface properties of a disclike shaped article of a vinyl chloridebased resin |
| JPS56116869A (en) * | 1980-02-18 | 1981-09-12 | Shunpei Yamazaki | Inductive reduced pressure gaseous phase method |
| FR2501727A1 (fr) * | 1981-03-13 | 1982-09-17 | Vide Traitement | Procede de traitements thermochimiques de metaux par bombardement ionique |
| FI63783C (fi) * | 1981-09-30 | 1983-08-10 | Kymin Oy Kymmene Ab | Foerfarande foer nitrering vid laogt tryck med hjaelp av glimurladdning |
| JPS58141376A (ja) * | 1982-02-16 | 1983-08-22 | Seiko Epson Corp | プラズマセメンテ−シヨン |
| JPS58174568A (ja) * | 1982-04-08 | 1983-10-13 | Toshiba Corp | 金属化合物被膜の形成方法 |
| EP0106638A1 (en) * | 1982-10-12 | 1984-04-25 | National Research Development Corporation | Method and apparatus for growing material in a glow discharge |
| JPH079700B2 (ja) * | 1982-10-12 | 1995-02-01 | ティーディーケイ株式会社 | 磁気記録媒体 |
| GB2134431B (en) * | 1983-02-04 | 1986-05-21 | Atomic Energy Authority Uk | Improvements in ball-point pens |
| JPS59205471A (ja) * | 1983-05-02 | 1984-11-21 | Kowa Eng Kk | 被処理物品の表面に黒色被膜を形成する方法 |
| JPS59205470A (ja) * | 1983-05-02 | 1984-11-21 | Kowa Eng Kk | 硬質被膜の形成装置及びその形成方法 |
| EP0154814A3 (en) * | 1984-03-16 | 1987-08-26 | American Cyanamid Company | Substrates coated by plasma enhanced chemical vapor deposition, apparatus and process for their production |
| JPS60200523A (ja) * | 1984-03-26 | 1985-10-11 | Agency Of Ind Science & Technol | シリコン薄膜の製造法 |
| IL71530A (en) * | 1984-04-12 | 1987-09-16 | Univ Ramot | Method and apparatus for surface-treating workpieces |
| JPS61205146A (ja) * | 1985-03-08 | 1986-09-11 | Hitachi Koki Co Ltd | ドツトプリンタ用印字ヘツド |
| GB8512455D0 (en) * | 1985-05-16 | 1985-06-19 | Atomic Energy Authority Uk | Coating apparatus |
| CN85106828B (zh) * | 1985-09-10 | 1987-09-09 | 张戈飞 | 金属零件表面形成硫化物层的方法及设备 |
| JPS62188771A (ja) * | 1986-02-14 | 1987-08-18 | Daido Steel Co Ltd | 構造用鋼の表面硬化方法 |
| JPS6320300A (ja) * | 1986-07-14 | 1988-01-27 | 三菱重工業株式会社 | 有翼回収飛行体の緊急脱出装置 |
-
1986
- 1986-06-13 CH CH2415/86A patent/CH671407A5/de not_active IP Right Cessation
-
1987
- 1987-02-02 DE DE19873702984 patent/DE3702984A1/de active Granted
- 1987-04-17 JP JP62093484A patent/JPS62294160A/ja active Pending
- 1987-05-18 GB GB8711657A patent/GB2192196B/en not_active Expired - Lifetime
- 1987-06-09 FR FR8707993A patent/FR2600082B1/fr not_active Expired - Lifetime
- 1987-06-09 NL NL8701340A patent/NL194551C/nl not_active IP Right Cessation
- 1987-06-10 SE SE8702410A patent/SE465578B/sv not_active IP Right Cessation
- 1987-06-12 US US07/062,226 patent/US4762756A/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19526387A1 (de) * | 1994-07-19 | 1996-02-29 | Sumitomo Metal Mining Co | Doppelt beschichteter Stahlverbundgegenstand und Verfahren zu dessen Herstellung |
| DE19526387C2 (de) * | 1994-07-19 | 1998-12-10 | Sumitomo Metal Mining Co | Doppelt beschichteter Stahlverbundgegenstand und Verfahren zu dessen Herstellung |
| DE10048589A1 (de) * | 2000-09-30 | 2002-04-25 | Volkswagen Ag | Schaltvorrichtung für ein Kraftfahrzeuggetriebe |
Also Published As
| Publication number | Publication date |
|---|---|
| CH671407A5 (enExample) | 1989-08-31 |
| JPS62294160A (ja) | 1987-12-21 |
| NL8701340A (nl) | 1988-01-04 |
| GB2192196B (en) | 1991-01-02 |
| NL194551C (nl) | 2002-07-02 |
| FR2600082A1 (fr) | 1987-12-18 |
| GB2192196A (en) | 1988-01-06 |
| SE8702410D0 (sv) | 1987-06-10 |
| DE3702984A1 (de) | 1987-12-17 |
| NL194551B (nl) | 2002-03-01 |
| SE465578B (sv) | 1991-09-30 |
| GB8711657D0 (en) | 1987-06-24 |
| US4762756A (en) | 1988-08-09 |
| SE8702410L (sv) | 1987-12-14 |
| FR2600082B1 (fr) | 1993-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3702984C2 (enExample) | ||
| EP0306612B1 (de) | Verfahren zur Aufbringung von Schichten auf Substraten | |
| DE2823876C2 (de) | Verfahren zum Verdampfen von Material mittels eines Niedervoltbogens | |
| DE3144192C2 (de) | Verfahren zum Bedampfen einer Oberfläche mit Hartstoffen und Anwendung des Verfahrens | |
| DE3027526C2 (enExample) | ||
| DE3841731C1 (en) | Process for coating a tool base, and tool produced by this process | |
| DE3117299C3 (de) | Verfahren zur Herstellung eines mit einem Hartstoff beschichteten Gegenstandes | |
| DE3513014C2 (de) | Verfahren zur Behandlung der Oberfläche von Werkstücken | |
| EP2718481B1 (de) | Entschichtungsverfahren für harte kohlenstoffschichten | |
| DE3614384A1 (de) | Verfahren zur beschichtung von substraten in einer vakuumkammer | |
| EP3423609A1 (de) | Wasserstofffreie kohlenstoffbeschichtung mit zirkonium haftschicht | |
| CH664377A5 (de) | Dekorative schwarze verschleissschutzschicht. | |
| DE102004054193A1 (de) | Gegen Abrasion und hohe Flächenpressungen beständige Hartstoffbeschichtung auf nachgiebigen Substraten | |
| EP0867036B1 (de) | Verfahren und einrichtung zur vorbehandlung von substraten | |
| DE4416525B4 (de) | Verfahren zur Herstellung einer Beschichtung erhöhter Verschleißfestigkeit auf Werkstückoberflächen, und dessen Verwendung | |
| DE4006457C2 (de) | Verfahren zum Verdampfen von Material in einer Vakuumaufdampfanlage sowie Anlage derselben | |
| EP1088118A1 (de) | Verfahren zum aufbringen einer schmierstoffschicht auf einen gegenstand sowie gegenstand mit haftender schmierstoffschicht | |
| DE102010036332B4 (de) | Verfahren zum Beschichten von Elektroden für die Elektrolyse mittels eines Lichtbogens | |
| CH687880A5 (de) | Verfahren zur Erhoehung der Verschleissfestigkeit von Werkstueckoberflaechen und nach diesem behandetes Werkstueck. | |
| DE4340952A1 (de) | Verfahren zur Reinigung von nachmals zu beschichtenden Oberflächen | |
| DD298003A5 (de) | Verfahren zum beschichten eines metallischen grundkoerpers mit einem nichtleitenden beschichtungsmaterial | |
| DE19822926C2 (de) | Verfahren zur Beschichtung von spanend eingreifenden Spanflächen spanabhebender Werkzeuge mit definierten Schneidengeometrien, insbesondere für Fräser, Drehstähle, Wendeschneideplatten, Bohrer sowie Werkzeuge zum Reiben und Räumen | |
| DE19822904C2 (de) | Verfahren zum haftenden Aufbringen einer Schmierstoffschicht auf eine freiliegende und tribologisch beanspruchte Oberfläche einer Anlaufscheibe sowie Anlaufscheibe | |
| DE19822935A1 (de) | Verfahren zum haftenden Aufbringen einer Schmierstoffschicht auf eine freiliegende und triologisch beanspruchte Oberfläche eines Formwerkzeuges, insbesondere eines Umformwerkzeuges wie Tiefziehpressen und dgl. sowie Formwerkzeug mit auf seiner freiliegenden Oberfläche haftenden Schmierstoffschicht | |
| DE19822898A1 (de) | Verfahren zur Beschichtung einer Ventilbrücke sowie Ventilbrücke |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: BALZERS AG, BALZERS, LI |
|
| 8339 | Ceased/non-payment of the annual fee |